Methods of making microfluidic devices

Patent metadata

Field	Value
Publication number	US-11065616-B2
Application number	US-201615776872-A
Country	US
Kind code	B2
Filing date	Nov 22, 2016
Priority date	Nov 23, 2015
Publication date	Jul 20, 2021
Grant date	Jul 20, 2021

Abstract

Microfluidics has advanced in terms of designs and structures, however, fabrication methods are either time consuming or expensive to produce, in terms of the facilities and equipment needed. A fast and economically viable method is provided to allow, for example, research groups to have access to microfluidic fabrication. Unlike most fabrication methods, a method is provided to fabricate a microfluidic device in one step. In an embodiment, a resolution of 50 micrometers was achieved by using maskless high-resolution digital light projection (MDLP). Bonding and channel fabrication of complex or simple structures can be rapidly incorporated to fabricate the microfluidic devices.

First claim

Therefore, the following is claimed:

1. A method of fabricating a microfluidic device, comprising the steps of:
receiving a design pattern of the entire microfluidic device;
providing a pair of surfaces, at least one of the surfaces formed of a light transmissive material;
depositing a light sensitive material onto a surface of the pair of surfaces;
placing another surface of the pair of surfaces in contact with the light sensitive material;
providing a light source that is configured to generate a light pattern, which corresponds to the design pattern of the entire microfluidic device;
positioning the pair of surfaces including the light sensitive material there between in relation to the light source to receive light projected therefrom;
using the light source to project at once, the entire light pattern through the surface formed of the light transmissive material and to expose, without a mask, selected areas of the light sensitive material causing photo initiation of a reaction within the selected areas of the light sensitive material leaving certain undesired portions of the material soft, so that the design pattern of the entire microfluidic device is formed into the light sensitive material in only one exposure; and
using pressurized air or vacuum to remove the undesired portions of the light sensitive material while each surface of the pair of surfaces remains in contact with desired portions of the light sensitive material, to form channels, which correspond to the design pattern, within the light sensitive material.

2. The method of claim 1 , wherein the light sensitive material is selected from the group consisting of photo sensitive resins.

3. The method of claim 1 , wherein the at least one surface formed of a light transmissive material is selected from the group of quartz, Pyrex, PMMA and other transparent polymers.

4. The method of claim 1 , wherein the pair of surfaces comprise a pair of opposed, parallel flat surfaces.

5. The method of claim 4 , wherein the flat surfaces are each formed of a glass slide.

6. The method of claim 4 , wherein the surfaces are disposed apart a distance of from 10 micron to 500 micron or larger than 800 micron, depending on the viscosity of the photo sensitive resin.

7. The method of claim 1 , wherein the light sensitive material is exposed for a period of 2 seconds to 20 seconds.

8. The method of claim 1 , wherein the pressurized air has either a positive or a negative air pressure.

9. The method of claim 1 , including the step of flushing the channels with a solvent.

10. The method of claim 9 , wherein the solvent is selected from the group consisting of isopropyl alcohol, ethanol, methanol, alcohol, and chloroform.

11. A method of fabricating a microfluidic device, comprising the steps of:
forming holes in a top substrate;
depositing a light sensitive material on a bottom substrate, wherein the bottom substrate comprises a light transmissive material;
arranging the top substrate on the bottom substrate so that the light sensitive material is interposed between the top and bottom substrates;
projecting an entire light pattern at once, on the light sensitive material, via the bottom substrate to form in only one exposure, without a mask, a corresponding design pattern in the light sensitive material, wherein the light pattern corresponds to the design pattern, which describes the entire microfluidic device; and
forming microfluidic channels by removing undesired portions of the light sensitive material while the top and bottom substrates remain in contact with desired portions of the light sensitive material.

12. The method of claim 11 , further comprising:
attaching tubing supports to the holes in the top substrate; and
attaching tubing to the tubing supports.

13. The method of claim 11 , wherein the undesired portions of the light sensitive material are removed using a pressurized air or vacuum.

14. The method of claim 13 , further comprising:
flushing the undesired portions of the light sensitive materials using a solvent.

15. The method of claim 11 , further comprising:
aligning the holes in the top substrate with the light sensitive material.

16. A method of fabricating a microfluidic device, comprising the steps of:
applying a photocurable resin on a bottom substrate;
aligning a top substrate on the bottom substrate so that the photocurable resin is interposed between the top and bottom substrates;
exposing at once, without a mask, the light sensitive material to a light pattern to form a design pattern in the light sensitive material in only one exposure, to selectively cure portions of the light sensitive material corresponding to the light pattern, wherein the light pattern corresponds to the design pattern, which describes the entire microfluidic device; and
flushing undesired portions of the light sensitive material, while the top and bottom substrates remain in contact with desired portions of the light sensitive material, to form microfluidic channels.

17. The method of claim 16 , wherein the flushing of undesired portions involves pressurized air or a vacuum, as well as a solvent.

18. The method of claim 16 , wherein the top substrate includes inlet and outlet holes, the method further comprising:
attaching tubing to the inlet and outlet holes.

19. The method of claim 18 , wherein the inlet or outlet holes are formed by drilling into the top substrate.

20. The method of claim 16 , further comprising:
applying an adhesion promoter that promotes adhesion of the light sensitive material to the top and bottom substrates.

Assignees

• Univ King Abdullah Sci & Tech

Inventors

• Buttner Ulrich
• Mashraei Yousof
• Agambayev Sumeyra
• Salama Khaled N

Classifications

• B33Y70/00

  Materials specially adapted for additive manufacturing · CPC title

• B81C2201/0188

  Selective deposition techniques not provided for in B81C2201/0184 - B81C2201/0187 · CPC title

• B81B2201/051

  Micromixers, microreactors · CPC title

• B81C2203/038

  Bonding techniques not provided for in B81C2203/031 - B81C2203/037 · CPC title

• B81C1/00119

  Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems · CPC title