Phase contrast monitoring for extreme ultra-violet (EUV) masks defect inspection
US-10634623-B2 · Apr 28, 2020 · US
US11061216B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11061216-B2 |
| Application number | US-201816495748-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 14, 2018 |
| Priority date | Mar 20, 2017 |
| Publication date | Jul 13, 2021 |
| Grant date | Jul 13, 2021 |
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A microscope for imaging an object, comprising a lens assembly, which defines an optical axis and a focal plane perpendicular thereto, and correction optics, which are adjustable for adjustment to a depth position and which correct a spherical aberration on the lens assembly which occurs during imaging of the object at a specific depth position of the focal plane. The microscope may be used to determine a phase difference of radiation from a first lateral region and a second lateral region of the object, and to use a previously known connection between the phase difference and a modification of the spherical aberration caused thereby in order to determine an adjustment value of the correction optics, such that the spherical aberration is reduced when imaging the second region.
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The invention claimed is: 1. A method for microscopic imaging of an object, the method comprising the following steps: providing a microscope comprising an objective which defines an optical axis and a focal plane perpendicular thereto, and which comprises a correction unit for correcting spherical aberration for one aberration corrected depth position of the focal plane, wherein the correction unit is adjustable to set the aberration corrected depth position of the focal plane; illuminating the object; capturing radiation reflected or transmitted by the object; performing quantitative phase contrast imaging in a first lateral region and in a second lateral region of the object and determining a phase difference value between radiation from the first lateral region and from the second lateral region of the object; providing a relationship between phase difference and change in spherical aberration; determining a set value of the correction optical unit by utilizing the relationship and the phase difference value, and adjusting the correction optical unit to the set value and imaging the object in the second region. 2. The method as claimed in claim 1 , wherein the performing step comprises using information on one of the following parameters for the first region of the object: spherical aberration of imaging, refractive index of the object, and setting of the correction optical unit required to correct spherical aberration in the first region. 3. The method as claimed in claim 1 , wherein the determining step comprises ascertaining a path length being an object depth region from which radiation from the object contributes to the imaging in the first or second region. 4. The method as claimed in claim 3 , wherein the path length ascertaining step comprises varying an effective refractive index of the object in the first region and measuring the phase difference for at least two values of the refractive index of the object in the first region and determining the path length from the measured phase difference. 5. The method as claimed in claim 4 , comprising varying the effective refractive index by using a dispersive medium in the first region and measuring the phase difference at two different wavelengths. 6. The method as claimed in claim 3 , comprising using a thickness of the object as the path length. 7. The method as claimed in claim 1 , wherein determining the phase difference value comprises determining a plurality of phase difference values in a plurality of object planes that are spaced apart from one another along the optical axis. 8. The method as claimed in claim 1 , wherein further a third lateral region of the object is imaged, wherein the set value for the second region is also used for imaging the third region. 9. The method as claimed in claim 1 , wherein at least one of the following parameter values is captured: a temperature of the object, a material of an object carrier, an object carrier thickness, an immersion medium utilized in imaging, and a wavelength of radiation used for imaging the object, wherein the step of providing the relationship includes modifying the relationship depending on the at least one parameter value. 10. The method as claimed in claim 1 , wherein the quantitative phase contrast imaging step includes quantitative phase contrast imaging in the infrared spectral range. 11. The method as claimed in claim 1 , wherein the set value is determined on a basis of the phase difference value in at least one first object plane and the object is imaged using the set value in another, second object plane. 12. A microscope for imaging an object, comprising: an objective which defines an optical axis and a focal plane perpendicular thereto, and which comprises a correction unit for correcting spherical aberration for one aberration corrected depth position of the focal plane, wherein the correction unit is adjustable to set the aberration corrected depth position of the focal plane; a drive which adjusts the correction optical unit regarding the aberration corrected depth position of the focal plane; a quantitative phase contrast imaging device configured to illuminate the object, to capture radiation reflected or transmitted by the object and to determine a phase difference value between radiation from a first lateral region and from a second lateral region; and a control device configured to control the quantitative phase contrast imaging device and including a pre-stored relationship between phase difference and change in spherical aberration, wherein the control device is further configured: to determine a set value of the correction optical unit from the relationship and the phase difference value such that the spherical aberration in the second region is reduced, to control the drive to adjust the correction optical unit to the set value, and to image the object in the second region. 13. The microscope as claimed in claim 12 , wherein the quantitative phase contrast imaging device is configured to use information on one of the following parameters in the first region of the object: spherical aberration of imaging, refractive index of the object, and setting of the correction optical unit required to correct spherical aberration in the first region. 14. The microscope as claimed in claim 12 , wherein the quantitative phase contrast imaging device is configured to determine a plurality of phase difference values in a plurality of object planes that are spaced apart from one another along the optical axis. 15. The microscope as claimed in claim 12 , comprising a determining unit configured to capture at least one of the following parameter values: a temperature of the object, a material of an object carrier, an object carrier thickness, an immersion medium for the objective, and a wavelength of radiation utilized for imaging the object, wherein the relationship depends on the at least one of the parameter values. 16. The microscope as claimed in claim 12 , wherein the quantitative phase contrast imaging device is configured for quantitative phase contrast imaging in the infrared spectral range.
for optical correction, e.g. distorsion, aberration · CPC title
by analyzing the image formed by the object to be tested · CPC title
Objectives · CPC title
affording illumination for phase-contrast observation · CPC title
Control or image processing arrangements for digital or video microscopes (G02B21/361, G02B21/362 take precedence) · CPC title
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