Method and device for polymerizing a composition comprising hydridosilanes and subsequently using the polymers to produce silicon-containing layers
US-2016297997-A1 · Oct 13, 2016 · US
US11059995B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11059995-B2 |
| Application number | US-201816500253-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 3, 2018 |
| Priority date | Apr 4, 2017 |
| Publication date | Jul 13, 2021 |
| Grant date | Jul 13, 2021 |
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[Problem] To provide a film forming composition curable at low temperature and a film forming method using the same. [Means for Solution] A film forming composition comprising a polysilazane, an organic solvent and aspecific additive, and a film forming method comprising applying it on a substrate and curing. The specific additive is selected from the group consisting of (A) guanidines substituted by a hydrocarbylgroup, (B) crown ether amines containing oxygen and nitrogen as a member thereof, (C) cycloalkanes having an amino-substituted polycyclic structure, (D) oximes substituted by a hydrocarbyl group, and (E) imidazolines.
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The invention claimed is: 1. A film forming composition comprising: a polysilazane, an organic solvent, and an additive which is a crown ether amine containing oxygen and nitrogen as a member thereof, and represented by the following general formula (B): wherein L is a linker consisting of one or more of the following linker unit (B 1 ) and one or more of the following linker unit (B 2 ) wherein L B1 and L B2 are each independently a C 1-6 alkylene and L B1 and L B2 are bonded with oxygen or nitrogen of other linker unit, R B is hydrogen or a C 6-10 aryl, and the total number of linker units included in L is 2 to 10. 2. The composition according to claim 1 , wherein L B1 and L B2 are each independently a C 2-4 alkylene and the total number of linker units included in L is a number of 4 to 10. 3. The composition according to claim 1 , further comprising an additional additive which is a guanidine substituted by a hydrocarbyl group and represented by the following general formula (A): wherein R A is selected from the group consisting of a C 1-3 alkyl, a C 5-8 cycloalkyl, a C 6-10 aryl, a C 1-6 alkylene, and a C 1-6 heteroalkylene. 4. The composition according to claim 1 , which further comprises additive which is an imidazoline represented by the following general formula (E): wherein R E is a C 1-20 hydrocarbyl group. 5. The composition according to claim 4 , wherein said R E is a C 1-15 alkyl or a C 6-20 aryl. 6. A film forming composition comprising: a polysilazane, an organic solvent, and an additive which is a cycloalkane having an amino-substituted polycyclic structure and represented by the following general formula C: wherein nC is a number of 1 to 16, and R c s are each independently amino, hydroxy, carboxy, a C 1-10 hydrocarbyl group or an amino-substituted C 1-10 hydrocarbyl group, and at least one R c contains amino. 7. The composition according to claim 6 , wherein said R c is a C 1-6 alkyl, amino, a C 1-6 aminoalkyl, a C 1-6 alkylaminoalkyl, a C 1-6 aminoalkylamino, hydroxy, or carboxy and at least one R c contains amino. 8. The composition according to claim 6 , which further comprises additive which is an imidazoline represented by the following general formula (E): wherein R E is a a C 1-20 hydrocarbyl group. 9. A film forming composition comprising: a polysilazane, an organic solvent, and an additive which is an oxime substituted by a hydrocarbyl group and represented by the following general formula (D): wherein R D s are each independently hydrogen or a monovalent C 1-20 hydrocarbyl group, with the proviso that at least one R D is a monovalent C 1-20 hydrocarbyl group or two R D s are bonded with a bivalent hydrocarbyl group to form a cyclic structure. 10. The composition according to claim 9 , wherein said R D is a C 1-10 aryl or a C 1-10 heteroaryl. 11. The composition according to claim 9 , wherein said two R D s are bonded with a bivalent alkylene or cycloalkylene and said oximes represented by the general formula (D) has a cyclic structure. 12. The composition according to claim 9 , which further comprises additive which is an imidazoline represented by the following general formula (E): wherein R E is a 1-20 hydrocarbyl group. 13. The composition according to claim 1 , wherein said polysilazane comprises a structural unit of the following general formula (1): wherein R 1 s are groups each independently selected from the group consisting of hydrogen, alkyl, alkenyl, cycloalkyl, aryl, alkoxy, amino, alkoxysilylalkyl, alkylsilyl and silyl. 14. The composition according to claim 13 , wherein said R 1 s are groups each independently selected from the group consisting of hydrogen, alkyl, alkenyl, aryl, alkylsilyl and alkoxysilylalkyl. 15. The composition according to claim 1 , wherein said polysilazane is perhydropolysilazane. 16. The composition according to claim 1 , comprising 0.01 to 5 mmol of said additive based on 1 g of said polysilazane. 17. The composition according to claim 1 , wherein the content percentage of said polysilazane is 1 to 60 mass % based on the total mass of said composition. 18. The composition according to claim 1 , wherein said organic solvent comprises one or more kind of solvent which is aromatic hydrocarbon, saturated hydrocarbon compound, alicyclic hydrocarbon compound or alkyl ether. 19. A film forming method, comprising applying the composition according to claim 1 on a substrate and curing it. 20. An electronic device, a medical device, a packaging container or a wrapping paper, which comprises the film according to claim 19 .
Nitrogen atoms · CPC title
Additives · CPC title
in which all the silicon atoms are connected by linkages other than oxygen atoms · CPC title
Five-membered rings · CPC title
Oximes · CPC title
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