Optical contrast enhancement for defect inspection

Patent metadata

Field	Value
Publication number	US-11055836-B2
Application number	US-201916273162-A
Country	US
Kind code	B2
Filing date	Feb 12, 2019
Priority date	Feb 13, 2018
Publication date	Jul 6, 2021
Grant date	Jul 6, 2021

Abstract

An inspection system and a method for inspection an object. The method may include acquiring a defocused image of an area of an object, and processing the defocused image of the area to find a phase shift between optical paths associated with certain proximate points of the area. The phase shift may be indicative of a defect. The acquiring of the defocused image may include illuminating the area with a radiation beam that may be spatially coherent and collimated when impinging on the area. The illuminating may include passing the radiation beam through an aperture that may be defined by an aperture stop that may be positioned within an aperture stop plane. The size of the aperture may be a fraction of a size of the aperture stop.

First claim

I claim:

1. A method for inspection an object, the method comprises:
acquiring a defocused image of an area of an object; and
processing the defocused image of the area to find a phase shift between optical paths associated with proximate points of the area; wherein the phase shift is indicative of a defect;
wherein the acquiring of the defocused image comprises illuminating the area with a radiation beam that is spatially coherent and collimated when impinging on the area;
wherein the illuminating comprises passing the radiation beam through an aperture that is defined by an aperture stop that is positioned within an aperture stop plane; and
wherein a size of the aperture is a fraction of a size of the aperture stop; wherein the acquiring of the defocused image is preceded by entering the aperture stop within an illumination path and is followed by removing the aperture stop from the illumination path.

2. The method according to claim 1 wherein the acquiring of the defocused image of the area comprises sensing, by a sensor, sensed radiation that was reflected by the area; wherein the sensed radiation comprises interference patterns formed between radiation reflected from different points of the area; wherein the different points of the area comprise the proximate points and additional points.

3. The method according to claim 2 comprising sensing a difference between interference patterns associated with the proximate points and interference patterns associated with the additional points.

4. A method for inspection an object, the method comprises: acquiring a defocused image of an area of an object and processing the defocused image of the area to find a phase shift between optical paths associated with proximate points of the area; wherein the phase shift is indicative of a defect wherein the acquiring of the defocused image comprises illuminating the area with a radiation beam that is spatially coherent and collimated when impinging on the area; wherein the illuminating comprises passing the radiation beam through an aperture that is defined by an aperture stop that is positioned within an aperture stop plane; and wherein a size of the aperture is a fraction of a size of the aperture stop; wherein the fraction does not exceed one to two and a half percent.

5. The method according to claim 1 wherein the aperture is located at a center of the aperture stop.

6. The method according to claim 1 wherein the aperture is located outside a center of the aperture stop.

7. The method according to claim 4 wherein the acquiring of the defocused image is preceded by entering the aperture stop within an illumination path and is followed by removing the aperture stop from the illumination path.

8. The method according to claim 4 comprising acquiring multiple defocused images of the area, at different defocus conditions.

9. A method for inspection an object, the method comprises: acquiring a defocused image of an area of an object; and processing the defocused image of the area to find a phase shift between optical paths associated with proximate points of the area; wherein the phase shift is indicative of a defect wherein the acquiring of the defocused image comprises illuminating the area with a radiation beam that is spatially coherent and collimated when impinging on the area; wherein the illuminating comprises passing the radiation beam through an aperture that is defined by an aperture stop that is positioned within an aperture stop plane; and wherein a size of the aperture is a fraction of a size of the aperture stop; wherein the method comprises:
acquiring multiple defocused images of the area, at different defocus conditions;
selecting a selected defocus condition of the different defocus conditions; and
acquiring defocused images of areas of other objects using the selected defocus condition.

10. The method according to claim 9 wherein the selecting of the selected defocus condition is based on contrast associated with the phase shift.

11. The method according to claim 1 wherein the illuminating further comprises passing the radiation beam through an additional aperture that is defined by the aperture stop.

12. An inspection system that comprises:
an imager that is constructed and arranged to acquire a defocused image of an area of an object; and
a processor that is constructed and arranged to process the defocused image of the area to find a phase shift between optical paths associated with proximate points of the area;

wherein the phase shift is indicative of a defect;
wherein the imager comprises illumination optics that are constructed and arranged to illuminate the area with a radiation beam that is spatially coherent and collimated when impinging on the area;
wherein the illumination optics comprise an aperture stop that comprises an aperture;
wherein the illumination optics is constructed and arranged to pass the radiation beam through the aperture before reaching the area;
wherein a size of the aperture is a fraction of a size of the aperture stop;
wherein the imager is constructed and arranged to acquire multiple defocused images of the area, at different defocus conditions; and
wherein the processor is constructed and arranged to select a selected defocus condition of the different defocus conditions and acquire defocused images of areas of other objects using the selected defocus condition.

13. The inspection system according to claim 12 wherein the imager comprises a sensor that is constructed and arranged to sense sensed radiation that was reflected by the area; wherein the sensed radiation comprises interference patterns formed between radiation reflected from different points of the area; wherein the different points of the area comprise the proximate points and additional points.

14. The inspection system according to claim 13 wherein the sensor is constructed and arranged to sense a difference between interference patterns associated with the proximate points and interference patterns associated with the additional points.

15. An inspection system that comprises:
an imager that is constructed and arranged to acquire a defocused image of an area of an object; and
a processor that is constructed and arranged to process the defocused image of the area to find a phase shift between optical paths associated with proximate points of the area;

wherein the phase shift is indicative of a defect;
wherein the imager comprises illumination optics that are constructed and arranged to illuminate the area with a radiation beam that is spatially coherent and collimated when impinging on the area;
wherein the illumination optics comprise an aperture stop that comprises an aperture;

wherein the illumination optics is constructed and arranged to pass the radiation beam through the aperture before reaching the area; and
wherein the fraction does not exceed one to two and a half percent.

16. The inspection system according to claim 12 wherein the aperture is located at a center of the aperture stop.

17. The inspection system according to claim 12 wherein the aperture is located outside a center of the aperture stop.

18. The inspection system according to claim 12 wherein aperture stop is a removable part of the illumination optics.

19. The inspection system according to claim 15 wherein the imager is constructed and arranged to acquire multiple defocused images of the area, at different defocus conditions.

20. The inspection system according to claim 19 wherein the proc

Assignees

• Camtek Ltd

Inventors

• Ben Ezer Zehava

Classifications

• H04N23/67

  Focus control based on electronic image sensor signals · CPC title

• G02B21/361

  Optical details, e.g. image relay to the camera or image sensor (G02B21/364 takes precedence; illumination details G02B21/06 and subgroups) · CPC title

• G02B21/082

  for incident illumination only · CPC title

• G01N2201/06

  Illumination; Optics · CPC title

• G01N21/8806 Primary

  Specially adapted optical and illumination features · CPC title