Movable flexure and MEMS elements for improved optical coupling to photonic integrated circuits

Patent metadata

Field	Value
Publication number	US-11048053-B2
Application number	US-201916697821-A
Country	US
Kind code	B2
Filing date	Nov 27, 2019
Priority date	Nov 27, 2019
Publication date	Jun 29, 2021
Grant date	Jun 29, 2021

Abstract

An optical system includes a laser source that provides a beam of light, a photonic integrated circuit (PIC) with an input aperture, and an alignment fixture that has at least one actuator. The alignment fixture may be mounted on the PIC. The optical system is aligned such that the beam of light travels from the laser source to the alignment fixture and from the alignment fixture to the input aperture of the PIC. The alignment fixture can move in at least one direction upon actuation of the at least one actuator to adjust coupling between the laser source and the PIC. The at least one actuator may be a micro-electro-mechanical system (MEMS) structure actuated by an electrical signal.

First claim

What is claimed is:

1. An apparatus comprising:
a laser source that provides a beam of light;
a photonic integrated circuit having an input waveguide with movable grating; and
at least one MEMS actuator coupled to the movable grating and mounted on the photonic integrated circuit,
wherein a first axis is defined by a major axis of the input waveguide and a second axis is defined by a minor axis of the input waveguide, and wherein the movable grating is disposed in a first plane defined by first axis and the second axis;
wherein the laser source and the grating are aligned such that the beam of light travels from the laser source to the grating; and
wherein the at least one MEMS actuator adjusts at least one of a position and an orientation of the movable grating within the first plane when actuated by an electrical signal to adjust coupling of the beam of light into the input waveguide of the photonic integrated circuit.

2. The apparatus of claim 1 , wherein the at least one MEMS actuator adjusts the position of the movable grating along the first axis.

3. The apparatus of claim 2 , wherein the at least one MEMS actuator further adjusts the position of the movable grating along the second axis.

4. The apparatus of claim 1 , wherein the at least one MEMS actuator adjusts the orientation of the movable grating about a rotational axis perpendicular to the first plane.

5. An apparatus comprising:
a laser source that provides a beam of light;
a photonic integrated circuit having an input aperture;
a MEMS stage having a first surface; and
at least one lens mounted on the MEMS stage,
wherein the laser source, the at least one lens, and the photonic integrated circuit are aligned such that the beam of light travels from the laser source to the lens and from the lens to the input aperture of the photonic integrated circuit,
wherein the MEMS stage comprises at least one actuator configured to move the MEMS stage in at least one direction when actuated by an electrical signal to adjust coupling of the beam of light into the photonic integrated circuit; and
wherein the MEMS stage is movable in a plane parallel to the first surface and a direction perpendicular to the first surface.

6. The apparatus of claim 5 , wherein the at least one actuator moves the MEMS stage in the plane parallel to the first surface.

7. The apparatus of claim 6 , wherein the at least one actuator further moves the MEMS stage in the direction perpendicular to the first surface.

8. The apparatus of claim 5 , wherein the at least one actuator is a comb drive.

9. The apparatus of claim 7 , wherein the MEMS stage has a range of movement that is larger in the plane parallel to the first surface than in the direction perpendicular to the first surface.

Assignees

• Charles Stark Draper Laboratory Inc

Inventors

• Moebius Michael G
• Spector Steven J
• Cook Eugene H
• O'Connor Sean P

Classifications

• G02B6/4227

  Active alignment methods, e.g. procedures and algorithms · CPC title

• G02B6/4226

  Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount · CPC title

• G02B6/4225

  by a direct measurement of the degree of coupling, e.g. the amount of light power coupled to the fibre or the opto-electronic element · CPC title

• G02B26/0808

  by means of one or more diffracting elements · CPC title

• G02B26/0841 Primary

  the reflecting element being moved or deformed by electrostatic means · CPC title