Semiconductor structure including optical device and method for manufacturing the same
US-2024230996-A1 · Jul 11, 2024 · US
US11048046B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11048046-B2 |
| Application number | US-201414904809-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 11, 2014 |
| Priority date | Jul 15, 2013 |
| Publication date | Jun 29, 2021 |
| Grant date | Jun 29, 2021 |
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The invention relates to an optical coupler (10) in a vertical configuration, capable of working for a wavelength and comprising a first waveguide (12) and a second waveguide (14). The second waveguide (14) has a patterning (33) in the form of a series of patterns (36), the patterns (36) extending along a transverse direction (X) perpendicular to the longitudinal direction (Z), being parallel to each other and orthogonal to the general direction of the first waveguide (12), each pattern (36) being arranged both in the core (30) and the cladding (32) of the second waveguide (14) and having parameters influencing the evanescent wave coupling between the first waveguide (12) and the second waveguide (14), said parameters being chosen such that the coupling (C) is greater than 15%.
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The invention claimed is: 1. An optical coupler in a vertical configuration, capable of working for a wavelength, wherein said optical coupler comprises: a first waveguide extending in the longitudinal direction and capable of propagating a first propagation mode of the light having a first effective index, an entry plane, and an exit plane being defined for the first waveguide, a second waveguide distinct from the first waveguide, parallel to the first waveguide, having a core and a cladding and capable of propagating a second propagation mode of the light having a second effective index, the second effective index being different from the first effective index, an entry plane, and an exit plane being defined for the second waveguide, the entry plane of the first waveguide being situated between the entry plane of the second waveguide and the exit plane of the second waveguide, the second waveguide having a patterning, the patterning having a period along the longitudinal direction below the ratio between the wavelength at which the optical coupler is capable of operating and the product of two by the second effective index, the patterning being in the form of a series of patterns, the patterns extending along a transverse direction perpendicular to the longitudinal direction, being parallel to each other and orthogonal to the general direction of the first waveguide, each pattern having parameters influencing the evanescent wave coupling between the first waveguide and the second waveguide so that the coupling is determined by a ratio between an intensity of an electrical field at the entry plane of the first waveguide and an intensity of an electrical field at the exit plane of the second waveguide and is greater than 15%, wherein the patterns have a dimension along the transverse direction larger than the dimension of the core of the second waveguide along the transverse direction. 2. The optical coupler according to claim 1 , wherein the patterns are selected from the group consisting of: openings made in the second waveguide, and blades. 3. The optical coupler according to claim 1 , wherein the core of the second waveguide having an optical index, the second effective index is greater than the first effective index and the patterns are made from a material having an optical index below the optical index of the core of the second waveguide. 4. The optical coupler according to claim 1 , wherein the patterning has a fill factor, the patterns are made from a material having an optical index, the parameters influencing the evanescent wave coupling between the first waveguide and the second waveguide being the fill factor of the patterning, the optical index of the material from which the patterns are made, and the spacing along the longitudinal direction between each pattern. 5. The optical coupler according to claim 1 , wherein each waveguide includes a cladding and a core, the optical index of the core of the first waveguide being below the optical index of the cladding of the second waveguide. 6. The optical coupler according to claim 1 , wherein the first waveguide includes a core made from a material belonging to column III of the periodic table formed with a material from column V of the periodic table and two lower and upper layers surrounding the core. 7. The optical coupler according to claim 1 , wherein the optical coupler includes a substrate, made from a first material, in which the second waveguide is buried, the first waveguide being arranged in contact with the substrate and formed from a material different from the first material. 8. The optical coupler according to claim 1 , wherein the optical coupler includes a third waveguide distinct from the first and second waveguides and extending parallel to the first and second waveguides, the third waveguide being arranged between the first waveguide and the second waveguide and being capable of propagating a third light propagation mode having a third effective index. 9. The optical coupler according to claim 1 , including a thermal insulation zone of the first waveguide in which the patterning is arranged. 10. An optical component comprising an optical coupler according to claim 1 . 11. An optical coupler in a vertical configuration, capable of working for a wavelength, wherein said optical coupler comprises: a first waveguide extending in the longitudinal direction and capable of propagating a first propagation mode of the light having a first effective index, an entry plane, and an exit plane being defined for the first waveguide, a second waveguide distinct from the first waveguide, parallel to the first waveguide, having a core and a cladding and capable of propagating a second propagation mode of the light having a second effective index, the second effective index being different from the first effective index, an entry plane, and an exit plane being defined for the second waveguide, the entry plane of the first waveguide being situated between the entry plane of the second waveguide and the exit plane of the second waveguide, the second waveguide having a patterning, the patterning having a period along the longitudinal direction below the ratio between the wavelength at which the optical coupler is capable of operating and the product of two by the second effective index, the patterning being in the form of a series of patterns, the patterns extending along a transverse direction perpendicular to the longitudinal direction, being parallel to each other and orthogonal to the general direction of the first waveguide, each pattern having parameters influencing the evanescent wave coupling between the first waveguide and the second waveguide so that the coupling is determined by a ratio between an intensity of an electrical field at the entry plane of the first waveguide and an intensity of an electrical field at the exit plane of the second waveguide and is greater than 15%, wherein each pattern is arranged both in the core and the cladding of the second waveguide. 12. An optical coupler in a vertical configuration, capable of working for a wavelength, wherein said optical coupler comprises: a first waveguide extending in the longitudinal direction and capable of propagating a first propagation mode of the light having a first effective index, an entry plane, and an exit plane being defined for the first waveguide, a second waveguide distinct from the first waveguide, parallel to the first waveguide, having a core and a cladding and capable of propagating a second propagation mode of the light having a second effective index, the second effective index being different from the first effective index, an entry plane, and an exit plane being defined for the second waveguide, the entry plane of the first waveguide being situated between the entry plane of the second waveguide and the exit plane of the second waveguide, the second waveguide having a patterning, the patterning having a period along the longitudinal direction below the ratio between the wavelength at which the optical coupler is capable of operating and the product of two by the second effective index, the patterning being in the form of a series of patterns, the patterns extending along a transverse direction perpendicular to the longitudinal direction, being parallel to each other and orthogonal to the general direction of the first waveguide, each pattern having parameters influencing the evanescent wave coupling between the first waveguide and the second waveguide so that the coupling is determined by a ratio between an intensity of an electrical field at the entry plane of the first waveguide and an intensity of an electrical field at the exit plane
Geodesic lenses or integrated gratings · CPC title
Mode converters · CPC title
Silicon based substrates · CPC title
Coupler · CPC title
operating by evanescent wave coupling · CPC title
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