Method of purifying silicon carbide powder

Patent metadata

Field	Value
Publication number	US-11046582-B2
Application number	US-201916729065-A
Country	US
Kind code	B2
Filing date	Dec 27, 2019
Priority date	Nov 11, 2019
Publication date	Jun 29, 2021
Grant date	Jun 29, 2021

Abstract

A method of purifying silicon carbide powder includes: providing a container with a surface coated by a nitrogen-removal metal layer, wherein the nitrogen-removal metal layer is tantalum, niobium, tungsten, or a combination thereof; putting a silicon carbide powder into the container to contact the nitrogen-removal metal layer; and heating the silicon carbide powder under an inert gas at a pressure of 400 torr to 760 torr at 1700° C. to 2300° C. for 2 to 10 hours, thereby reducing the nitrogen content of the silicon carbide powder.

First claim

What is claimed is:

1. A method of purifying silicon carbide powder, comprising:
providing a container with a surface coated by a nitrogen-removal metal layer, wherein the nitrogen-removal metal layer is tantalum, niobium, tungsten, or a combination thereof;
putting an initial silicon carbide powder into the container to contact the nitrogen-removal metal layer; and
heating the initial silicon carbide powder under an inert gas at a pressure of 400 torr to 760 torr at 1700° C. to 2300° C. for 2 hours to 10 hours to provide a final silicon carbide powder, wherein the final silicon carbide powder has a nitrogen content of less than or equal to 29.1 ppm.

2. The method as claimed in claim 1 , wherein the initial silicon carbide powder is formed by:
mixing a carbon source powder and a silicon source powder to form a mixture; and
heating the mixture under a pressure of 1 torr to 100 torr at 1500° C. to 2000° C. for 2 to 5 hours, thereby forming the initial silicon carbide powder,
wherein the temperature of heating the mixture is lower than the temperature of heating the initial silicon carbide powder.

3. The method as claimed in claim 2 , wherein the silicon source powder comprises silicon, silicon oxide, or a combination thereof.

4. The method as claimed in claim 2 , wherein the carbon source powder comprises carbon black, graphite, graphene, carbon nanotube, or a combination thereof.

5. The method as claimed in claim 1 , wherein a material of the container comprises graphite, ceramic, or a high-melting point metal.

6. The method as claimed in claim 1 , wherein the inert gas comprises hydrogen, argon, or a combination thereof.

7. The method as claimed in claim 1 , wherein a pipeline for providing the inert gas includes a nitrogen filtration device.

8. The method as claimed in claim 1 , wherein the initial silicon carbide powder has a diameter of 10 nm to 5 micrometers.

9. The method as claimed in claim 1 , wherein the initial silicon carbide powder has a diameter of 10 nm to 100 nm, and the temperature of heating the initial silicon carbide powder is 1700° C. to 1900° C.

10. The method as claimed in claim 1 , wherein the initial silicon carbide powder has a diameter of 100 nm to 1 micrometer, and the temperature of heating the initial silicon carbide powder is 1900° C. to 2100° C.

11. The method as claimed in claim 1 , wherein the initial silicon carbide powder has a diameter of 1 micrometer to 5 micrometers, and the temperature of heating the initial silicon carbide powder is 2100° C. to 2300° C.

12. The method of claim 1 , wherein the final silicon carbide powder has a nitrogen content of less than or equal to 17.2 ppm.

13. The method of claim 1 , wherein the final silicon carbide powder has a nitrogen content of less than or equal to 10.6 ppm.

14. The method of claim 1 , wherein the final silicon carbide powder has a nitrogen content of less than or equal to 2 ppm.

Assignees

• Ind Tech Res Inst

Inventors

• Hsiao Ta-Ching
• Jeng Chu-Pi
• Sung Mu-Hsi
• Huang Kuo-Lun

Classifications

• C01P2004/61

  Micrometer sized, i.e. from 1-100 micrometer · CPC title

• C01P2004/60

  Particles characterised by their size · CPC title

• C01B32/963

  Preparation from compounds containing silicon · CPC title

• C01B32/97

  Preparation from SiO or SiO2 · CPC title

• C01B32/956 Primary

  Silicon carbide · CPC title