Nanovoided polymers using phase inversion

Patent metadata

Field	Value
Publication number	US-11045835-B1
Application number	US-201916449964-A
Country	US
Kind code	B1
Filing date	Jun 24, 2019
Priority date	Dec 11, 2018
Publication date	Jun 29, 2021
Grant date	Jun 29, 2021

Abstract

Example methods include depositing a precursor layer onto a substrate where the precursor layer includes droplets comprising a polymerizable material, inducing a phase inversion in the precursor layer to obtain a modified precursor layer including droplets of a non-polymerizable liquid within a polymerizable liquid mixture, and polymerizing the polymerizable liquid mixture to obtain a nanovoided polymer element. Examples include devices fabricated using nanovoided polymer elements fabricated using such methods, including electroactive devices such as actuators and sensors.

First claim

What is claimed is:

1. A method, comprising:
depositing a precursor layer onto a substrate, the precursor layer including droplets comprising a polymerizable material;
inducing a phase inversion in the precursor layer to obtain a modified precursor layer including droplets of a non-polymerizable liquid within a polymerizable liquid mixture comprising the polymerizable material; and
polymerizing the polymerizable liquid mixture to obtain a nanovoided polymer element,
wherein the nanovoided polymer element comprises an electroactive polymer, and
the substrate comprises a first electrode, the method further comprising forming a second electrode on the nanovoided polymer element so that nanovoided polymer element is located at least in part between the first electrode and the second electrode.

2. The method of claim 1 , wherein application of a potential difference between the first electrode and the second electrode induces an electroactive response in the nanovoided polymer element.

3. The method of claim 1 , wherein the polymerizable liquid mixture comprises at least one polymerizable species, wherein the at least one polymerizable species comprises a monomer or an oligomer.

4. The method of claim 3 , wherein the at least one polymerizable species comprises at least one of an acrylate, an ether, an amide, an acrylamide, an amine, a vinyl, an epoxy, a siloxane, or an isocyanate.

5. The method of claim 1 , wherein polymerizing the polymerizable liquid mixture to obtain the nanovoided polymer element comprises irradiation of the polymerizable liquid mixture with UV or visible electromagnetic radiation.

6. The method of claim 1 , further comprising fabricating an electroactive device comprising the nanovoided polymer element, wherein the electroactive device is an actuator or a sensor.

7. The method of claim 1 , wherein depositing the precursor layer onto the substrate comprises a deposition process,
wherein the deposition process comprises one or more of evaporation, spin coating, inkjet printing, non-inkjet printing, vapor deposition, vapor coating, thermal spraying, lamination, mist deposition, extrusion, or transfer of a separately formed material film.

8. The method of claim 1 , wherein inducing a phase inversion in the precursor layer comprises modifying a chemical composition of the precursor layer.

9. The method of claim 1 , wherein inducing a phase inversion in the precursor layer comprises modifying a temperature of the precursor layer.

10. The method of claim 1 , further comprising removing at least a portion of the non-polymerizable liquid from the nanovoided polymer element.

11. The method of claim 10 , wherein removing at least a portion of the non-polymerizable liquid from the nanovoided polymer element comprises using a reduced pressure, an increased temperature, or both.

12. A method, comprising:
depositing a precursor layer onto a substrate, the precursor layer comprising droplets comprising a polymerizable material;
inducing a phase inversion in the precursor layer to obtain a modified precursor layer comprising droplets of a non-polymerizable liquid within a liquid mixture comprising the polymerizable material;
polymerizing the liquid mixture to obtain a nanovoided polymer element; and
depositing a pair of electrodes on the nanovoided polymer element, so that at least a portion of the nanovoided polymer element is located between the pair of electrodes, wherein
the nanovoided polymer element comprises an electroactive polymer,
the nanovoided polymer element comprises a nanovoided polymer layer having a layer thickness of between approximately 10 nm and approximately 1 mm, and
the nanovoided polymer layer comprises a plurality of nanovoids.

13. The method of claim 12 , further comprising removing one or more liquids from the nanovoided polymer element after polymerizing the liquid mixture.

14. The method of claim 12 , wherein inducing a phase inversion in the precursor layer comprises modifying a chemical composition or a temperature of the precursor layer.

15. The method of claim 12 , wherein
the precursor layer has a thickness between approximately 10 nm and approximately 100 microns.

16. A method, comprising:
depositing a first electrode;
depositing a precursor layer onto the first electrode, the precursor layer comprising droplets comprising a polymerizable material, the droplets being located within a non-polymerizable liquid mixture;
inducing a phase inversion in the precursor layer to obtain a phase-inverted precursor layer comprising droplets of a non-polymerizable liquid within a polymerizable liquid mixture;
polymerizing the polymerizable liquid mixture to obtain a nanovoided polymer element; and
depositing a second electrode onto the nanovoided polymer element,
wherein the nanovoided polymer element comprises an electroactive polymer comprising a plurality of nanovoids.

17. The method of claim 16 , further comprising removing one or more liquids from the nanovoided polymer element after polymerizing the polymerizable liquid mixture.

18. The method of claim 16 , wherein the method is performed by a deposition apparatus.

19. The method of claim 18 , wherein depositing the precursor layer is performed by a vaporizer of the deposition apparatus.

Assignees

• Facebook Tech Llc

Inventors

• Landig Renate Eva Klementine
• Diest Kenneth
• Ye Sheng
• Ouderkirk Andrew John

Classifications

• G02B2207/107

  Porous materials, e.g. for reducing the refractive index · CPC title

• G02B5/045

  Prism arrays · CPC title

• G02B3/0087

  with index gradient · CPC title

• G02B3/00

  Simple or compound lenses · CPC title

• B29K2995/0026

  Transparent · CPC title