Process kit for multi-cathode processing chamber

Patent metadata

Field	Value
Publication number	US-11043364-B2
Application number	US-201715614595-A
Country	US
Kind code	B2
Filing date	Jun 5, 2017
Priority date	Jun 5, 2017
Publication date	Jun 22, 2021
Grant date	Jun 22, 2021

Abstract

Embodiments of a process kit for use in a multi-cathode process chamber are disclosed herein. In some embodiments, a process kit includes a rotatable shield having a base, a conical portion extend downward and radially outward from the base, and a collar portion extending radially outward from a bottom of the conical portion; an inner deposition ring having a leg portion, a flat portion extending radially inward from the leg portion, a first recessed portion extending radially inward from the flat portion, and a first lip extending upward from an innermost section of the first recessed portion; and an outer deposition ring having a collar portion, an upper flat portion disposed above and extending radially inward from the collar portion, a second recessed portion extending inward from the upper flat portion, and a second lip extending upward from an innermost section of the second recessed portion.

First claim

The invention claimed is:

1. A process kit for use in a multi-cathode processing chamber, comprising:
a rotatable shield having a base, a conical portion extend downward and radially outward from the base, and a collar portion extending radially outward from a bottom of the conical portion, wherein an egg-shaped hole is formed through the conical portion;
an inner deposition ring having a leg portion, a flat portion extending radially inward from the leg portion, a first recessed portion extending radially inward from the flat portion, and a first lip extending upward from an innermost section of the first recessed portion;
an outer deposition ring having a collar portion, an upper flat portion disposed above and extending radially inward from the collar portion, a second recessed portion extending downward and radially inward from the upper flat portion, and a second lip extending upward from an innermost section of the second recessed portion, wherein the outer deposition ring has an outermost diameter greater than an outermost diameter of the inner deposition ring, wherein the leg portion of the inner deposition ring is configured to fit within the second recessed portion of the outer deposition ring; and
a cover ring configured to surround the inner deposition ring, wherein an outermost diameter of the cover ring is greater than the outermost diameter of the inner deposition ring, and wherein an outer peripheral portion of the cover ring includes a ring portion that curves up to form a bowl.

2. The process kit of claim 1 , wherein the outer deposition ring includes a plurality of features, where each feature comprises a protrusion that protrudes from a bottom surface of the upper flat portion and are configured to rest on an underlying chamber component.

3. The process kit of claim 1 , wherein a tortuous path between the inner deposition ring and the outer deposition ring extends between an upper surface of the second lip of the outer deposition ring and a lower surface of the flat portion of the inner deposition ring.

4. The process kit of claim 1 , wherein at least one of:
a second inner diameter of the outer deposition ring is about 12.2 inches or
a second outer diameter of the outer deposition ring is between about 13.7 inches and 14.6 inches.

5. The process kit of claim 1 , wherein the second lip of the outer deposition ring is raised with respect to the upper flat portion of the outer deposition ring.

6. The process kit of claim 1 , further comprising:
a plurality of shrouds configured to be disposed about a corresponding plurality of targets between the plurality of targets and the rotatable shield.

7. The process kit of claim 1 , further comprising:
a conical shield, wherein a top section of the conical shield is configured to surround a lower portion of the rotatable shield, and wherein a bottom section of the conical shield is configured to surround a substrate support.

8. The process kit of claim 7 ,
wherein the cover ring is configured to rest on the bottom section of the conical shield.

9. A multi-cathode processing chamber, comprising:
a substrate support to support a substrate;
a plurality of cathodes coupled to a carrier and having a corresponding plurality of targets to be sputtered onto the substrate; and
a process kit disposed within the multi-cathode processing chamber, wherein the process kit comprises:
a rotatable shield rotatably disposed between the substrate support and the plurality of targets, wherein the rotatable shield includes a base, a conical portion extend downward and radially outward from the base, and a collar portion extending radially outward from a bottom of the conical portion, wherein an egg-shaped hole is formed through the conical portion to expose one of the plurality of targets while covering a remainder of the plurality of targets;
an inner deposition ring configured to be disposed atop the substrate support and beneath an outer edge of the substrate, wherein the inner deposition ring includes a leg portion, a flat portion extending radially inward from the leg portion, a first recessed portion extending radially inward from the flat portion, and a first lip extending upward from an innermost section of the first recessed portion; and
an outer deposition ring disposed radially outward of the inner deposition ring and having a collar portion, an upper flat portion disposed above and extending radially inward from the collar portion, a second recessed portion extending downward and radially inward from the upper flat portion, and a second lip extending upward from an innermost section of the second recessed portion,
wherein the leg portion of the inner deposition ring extends into the second recessed portion of the outer deposition ring to form a tortuous path between the inner and outer deposition rings, and wherein the outer deposition ring has an outermost diameter greater than an outermost diameter of the inner deposition ring; and a cover ring configured to surround the inner deposition ring, wherein an outermost diameter of the cover ring is greater than the outermost diameter of the inner deposition ring, and wherein an outer peripheral portion of the cover ring includes a ring portion that curves up to form a bowl.

10. The multi-cathode processing chamber of claim 9 , wherein the leg portion of the inner deposition ring is vertically spaced apart from the second recessed portion of the outer deposition ring by a first gap between about 0.045 inches and about 0.055 inches.

11. The multi-cathode processing chamber of claim 9 , wherein the first lip of the inner deposition ring is vertically spaced apart from the substrate by a second gap between about 0.008 inches and about 0.012 inches.

12. The multi-cathode processing chamber of claim 9 , wherein the plurality of cathodes includes five cathodes.

13. The multi-cathode processing chamber of claim 9 , further comprising:
a plurality of shrouds each surrounding a corresponding one of the plurality of targets.

14. The multi-cathode processing chamber of claim 9 , wherein the process kit further comprises:
a conical shield, wherein a top section of the conical shield surrounds a lower portion of the rotatable shield, and wherein a bottom section of the conical shield surrounds the substrate support.

15. The multi-cathode processing chamber of claim 14 , wherein the process kit further comprises:
the cover ring disposed atop the bottom section of the conical shield.

16. The multi-cathode processing chamber of claim 9 , wherein a first inner diameter of the inner deposition ring is about 11.5 inches.

17. The multi-cathode processing chamber of claim 9 , wherein a first outer diameter of the inner deposition ring is about 12.8 inches.

18. The multi-cathode processing chamber of claim 9 , wherein a second inner diameter of the outer deposition ring is about 12.2 inches.

19. The multi-cathode processing chamber of claim 9 , wherein a second outer diameter of the outer deposition ring is between about 13.7 inches and about 14.6 inches.

20. A process kit for use in a multi-cathode processing chamber, comprising:
a rotatable shield having a base, a conical portion extend downward and radially outward from the base, and a collar portion extending radially outward from a bottom of the conical portion, wherein an egg-shaped hole is formed through the conical portion;
an inner deposition ring having a leg portion, a flat portion extending radially inward from the leg portion, a first recessed portion extend

Assignees

• Applied Materials Inc

Inventors

• Wu Hanbing
• Subramani Anantha K
• Goel Ashish
• Jadhav Deepak
• Wang Rongjun
• Ching Chi Hong

Classifications

• H01J37/32477

  characterised by the means for protecting vessels or internal parts, e.g. coatings · CPC title

• C23C14/3464

  using more than one target (C23C14/56 takes precedence) · CPC title

• C23C14/3407

  Cathode assembly for sputtering apparatus, e.g. Target · CPC title

• H01J37/32642

  Focus rings · CPC title

• H01J37/32651

  Shields, e.g. dark space shields, Faraday shields · CPC title