Adaptive control for a power generator

Patent metadata

Field	Value
Publication number	US-11042140-B2
Application number	US-201916297799-A
Country	US
Kind code	B2
Filing date	Mar 11, 2019
Priority date	Jun 26, 2018
Publication date	Jun 22, 2021
Grant date	Jun 22, 2021

Abstract

A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.

First claim

The invention claimed is:

1. A power generator, comprising:
an adaptive controller, the adaptive controller configured to generate a control signal based on an input setpoint for the power generator to generate a power signal, a measured representation of the power signal, and a modeled representation of the power signal, wherein the control signal includes a feedback component and a feedforward component; and
a power amplifier, the power amplifier configured to generate the power signal communicated to a non-linear load in accordance with the control signal.

2. The power generator of claim 1 , wherein the adaptive controller comprises:
a feedforward circuit, the feedforward circuit configured to generate the feedforward component based on the input setpoint and a difference between the measured representation of the power signal and the modeled representation of the power signal; and
a feedback circuit, the feedback circuit configured to generate the feedback component based the difference between the measured representation of the power signal and the modeled representation of the power signal.

3. The power generator of claim 1 , further comprising an adaptive rate controller, the adaptive rate controller configured to determine the measured representation of the power signal based on the input setpoint, the measured representation of the power signal, and the control signal.

4. The power generator of claim 1 , further comprising an adaptive rate controller, the adaptive rate controller configured to generate an output to adaptively scale the measured representation of the power signal based on at least one of the input setpoint, the measured representation of the power signal, and the control signal, the adaptive controller further configured to generate the control signal based on the adaptively scaled measured representation of the power signal.

5. The power generator of claim 1 , further comprising an adaptive rate controller, the adaptive rate controller configured to generate an output to adaptively scale the measured representation of the power signal based on commutating by at least one of phase, frequency, or both phase and frequency.

6. A system comprising the power generator of claim 1 , and further comprising an adaptive rate controller, the adaptive rate controller comprising: a direct digital synthesizer, the direct digital synthesizer configured to generate a sinusoidal signal and a cosine signal based on a second control signal; a first mixer, the first mixer configured to mix the sinusoidal signal and a digital representation of the power signal, and to generate a real component of the digital representation of the power signal; a second mixer, the second mixer configured to mix the cosine signal and the digital representation of the power signal, and to generate an imaginary component of the digital representation of the power signal; and
a subsystem controller, the subsystem controller configured to generate the second control signal based on the real and imaginary components, the input setpoint for the power generator, and a parameter used to control the power signal.

7. The system of claim 6 , wherein the subsystem controller configured to generate an output to adaptively scale the measured representation of the power signal, and wherein the parameter that controls the power signal varies in accordance with the adaptively scaled measured representation of the power signal.

8. The system of claim 6 , further comprising a scaling circuit, the scaling circuit configured to adaptively scale the measured representation of the power signal, wherein the parameter that is used to control the power signal varies in accordance with the adaptively scaled measured representation of the power signal.

9. The system of claim 6 , wherein the subsystem controller configured to generate an output signal to adaptively scale the measured representation of the power signal, the system further comprising:
a processor, the processor configured to process the digital representation of the power signal, and to generate a plurality of real and imaginary components; and
a commutator, the commutator configured to selectively switch between the plurality of real and imaginary components based on the output signal to output a scaling factor to adaptively scale the measured representation of the power signal.

10. The system of claim 6 , wherein the subsystem controller configured to generate an output signal to adaptively scale the measured representation of the power signal, the system further comprising:
a processor, the processor configured to process the digital representation of the power signal, to generate a plurality of real and imaginary components, and to generate a composite value by combining a pair of the real and imaginary components and a complex value; and
a commutator, the commutator configured to selectively switch between the composite value and the plurality of real and imaginary components based on the output signal to output a scaling factor to adaptively scale the measured representation of the power signal.

11. The power generator of claim 1 , further comprising:
a feedforward circuit, the feedforward circuit configured to generate a feedforward signal based on the input setpoint and based on a difference between the measured representation of the power signal and a modeled representation of the power signal;
a feedback circuit, the feedback circuit configured to generate a feedback signal based on the difference between the measured representation of the power signal and the modeled representation of the power signal; and
a combiner, the combiner configured to generate a second control signal by combining the feedforward signal and the feedback signal, wherein the second control signal enables the power generator to generate the power signal communicated to a non-linear load.

12. An adaptive controller, comprising:
a feedforward circuit, the feedforward circuit configured to generate a feedforward signal based on an input setpoint for a power generator to generate a power signal and based on a difference between a measured representation of the power signal and a modeled representation of the power signal;
a feedback circuit, the feedback circuit configured to generate a feedback signal based on the difference between the measured representation of the power signal and the modeled representation of the power signal; and
a combiner, the combiner configured to generate a control signal by combining the feedforward signal and the feedback signal, wherein the control signal enables the power generator to generate the power signal communicated to a non-linear load.

13. A system comprising the adaptive controller of claim 12 , and further comprising an adaptive rate controller, the adaptive rate controller configured to determine the measured representation of the power signal based on the input setpoint, the measured representation of the power signal, and the control signal.

14. The system of claim 13 , further comprising a power amplifier, the power amplifier configured to generate the power signal in accordance with the control signal.

15. A system comprising the adaptive controller of claim 12 , and further comprising an adaptive rate controller, the adaptive rate controller configured to generate an output to adaptively scale the measured representation of the power signal based on at least one of the input setpoint, the measured representation of the power signal, and the control signal, the adaptive controller further configured to generate the control signal based on the adaptively scaled me

Assignees

• Mks Instr Inc

Inventors

• Coumou David J
• Elner Yuriy
• Toe Aung
• Gill Daniel M
• Mount Iv Eldridge M
• Smith Shaun

Classifications

• H10P72/0421

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• H01J37/32174 Primary

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• H01J37/32146

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• H01J37/32082

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title