Methods and apparatus for measuring height on a semiconductor wafer
US-2016377412-A1 · Dec 29, 2016 · US
US11042016B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11042016-B2 |
| Application number | US-201816217791-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 12, 2018 |
| Priority date | Dec 12, 2017 |
| Publication date | Jun 22, 2021 |
| Grant date | Jun 22, 2021 |
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A Multi-Z confocal microscopy system can simultaneously record from multiple Z-sections, and thus performs high speed volumetric imaging. An illumination line can be formed by under-filling the illumination beam in the aperture of the microscope objective. The illumination line extends in the Z dimension into the target sample to be imaged and an X-Y scanning mechanism can be used to scan the illumination line over the sample. The detection signal emanating from the scanned sample can be collected through the full numerical aperture of the microscope objective and directed to a detector subsystem. The detector subsystem includes an array of reflecting pinhole detectors and each reflecting pinhole detector is configured to image a volume at a different depth in the sample. This configuration enables reflecting pinhole detector array to image more than one depth volume at the same time.
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What is claimed is: 1. A multi-Z confocal imaging system comprising: a LASER illumination source configured to direct a single monochromatic illumination beam through a microscope objective along a Z axis at a sample, and wherein the single monochromatic illumination beam under fills an aperture of the microscope objective and the microscope objective focuses the single monochromatic illumination beam into a monochromatic illumination line extending along the Z axis into a predefined target area of the sample; and a scanning mechanism including at least one mirror configured to scan the monochromatic illumination line over the sample whereby a detection signal emanates from the sample through the microscope objective and the detection signal is formed into a detection beam directed toward a detection subsystem; wherein the detection subsystem includes a first reflecting pinhole positioned at a predefined location with respect to the detection beam such that a first portion of the detection beam is captured by the first reflecting pinhole and is detected by a first optical detector and any remaining portion of the detection beam passes to a second reflecting pinhole positioned at a predefined location with respect to the first reflecting pinhole and a second portion of the detection beam is captured by the second reflecting pinhole and is detected by a second optical detector; and wherein the first optical detector outputs a first signal representative of an image from a first depth along the Z axis in the sample at the predefined target area at substantially the same time as the second optical detector outputs a second signal representative of an image from a second depth along the Z axis in the sample at the predefined target area that is different from the first depth along the Z axis in the sample. 2. The imaging system according to claim 1 wherein the scanning mechanism is configured to scan the single monochromatic illumination line along an X axis and along a Y axis, wherein each of the X axis and the Y axis is substantially perpendicular to the Z axis. 3. The imaging system according to claim 1 wherein the second reflecting pinhole is configured such that any remaining portion of the detection beam not captured by the second reflecting pinhole passes to a third reflecting pinhole positioned at a predefined location with respect to the second reflecting pinhole and the third reflecting pinhole is positioned such that a third portion of the detection beam is captured by the third reflecting pinhole and is detected by a third optical detector; and wherein the third optical detector outputs a third signal representative of an image from a third depth along the Z axis in the sample that is different from the first depth and the second depth along the Z axis in the sample. 4. The imaging system according to claim 3 further comprising one or more reflecting pinholes, each reflecting pinhole positioned at a predefined location with respect to the third reflecting pinhole to receive a portion of the detection beam not captured by the third reflecting pinhole whereby a portion of the detection beam is captured by each reflecting pinhole and detected by an associated optical detector; and wherein the associated optical detector outputs a signal representative of an image from a depth along the Z axis in the sample according to the predefined location of each reflecting pinhole with respect to the third reflecting pinhole. 5. The imaging system according to claim 1 further comprising at least one focusing lens configured and arranged in a path followed by the detection beam between the scanning mechanism and the detection subsystem to change a magnification of the detection beam focused on the first reflecting pinhole. 6. The imaging system according to claim 1 wherein at least one of the first optical detector and the second optical detector includes at least one of a photo multiplier tube, a silicon photo multiplier, an avalanche photo diode or a photo diode based detector. 7. The imaging system according to claim 1 wherein the single monochromatic illumination beam under fills the aperture of the microscope objective by an amount in a range from 0.5% to 65%. 8. The imaging system according to claim 1 wherein the first reflecting pinhole sends the remaining portion of the detection beam directly to the second reflecting pinhole. 9. The imaging system according to claim 1 wherein the first reflecting pinhole sends the remaining portion of the detection beam toward a mirror which reflects the remaining portion of the detection beam to the second reflecting pinhole. 10. The imaging system according to claim 1 wherein at least one of the first reflecting pinhole and the second reflecting pinhole is a negative reflecting pinhole. 11. The imaging system according to claim 1 wherein at least one of the first reflecting pinhole and the second reflecting pinhole is a positive reflecting pinhole. 12. A multi-Z line-scanning confocal imaging system comprising: a LASER illumination source configured to direct a single monochromatic illumination beam through a microscope objective along a Z axis at a sample, and wherein the single monochromatic illumination beam is expanded extending along a first axis relative to the Z axis and wherein the illumination beam under fills an aperture of the microscope objective and the microscope objective focuses the single monochromatic illumination beam into a monochromatic illumination sheet extending along the Z axis and the first axis into a predefined target area of the sample; and a scanning mechanism including at least one mirror configured to scan the monochromatic illumination sheet over the sample along a second axis relative to the Z axis whereby a detection signal emanates from the sample through the microscope objective and the detection signal is formed into a detection beam directed toward a detection subsystem; wherein the detection subsystem includes a first reflecting slit positioned at a predefined location with respect to the detection beam such that a first portion of the detection beam is captured by the first reflecting slit and is detected by a first optical detector and any remaining portion of the detection beam passes to a second reflecting slit positioned at a predefined location with respect to the first reflecting slit and a second portion of the detection beam is captured by the second reflecting slit and is detected by a second optical detector; and wherein the first optical detector outputs a first signal representative of an image from a first depth along the Z axis in the sample at the predefined target area at substantially the same time as the second optical detector outputs a second signal representative of an image from a second depth along the Z axis in the sample at the predefined target area that is different from the first depth along the Z axis in the sample at the predefined target area. 13. The imaging system according to claim 12 wherein the first axis corresponds to an X axis relative to the Z axis and the second axis corresponds to a Y axis relative to the Z axis; and wherein each of the X axis and the Y axis is substantially perpendicular to the Z axis. 14. The imaging system according to claim 12 wherein the first axis corresponds to an Y axis relative to the Z axis and the second axis corresponds to a X axis relative to the Z axis; and wherein each of the X axis and the Y axis is substantially perpendicular to the Z axis. 15. The imaging system according to claim 12 wherein the second reflecting slit is configured such that any remaining portion of the
Reflective elements · CPC title
Mirrors {(vehicle mirrors involving special optical features B60R1/08)} · CPC title
Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06) · CPC title
Optical details of the image generation · CPC title
having sequential partially reflecting surfaces · CPC title
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