Sensor with servo noise reduction

Patent metadata

Field	Value
Publication number	US-11035876-B2
Application number	US-201916458903-A
Country	US
Kind code	B2
Filing date	Jul 1, 2019
Priority date	Sep 14, 2018
Publication date	Jun 15, 2021
Grant date	Jun 15, 2021

Abstract

Provided is a sensor that is highly accurate while ensuring reduced power consumption. A sensor is an electronic circuit that includes a sensor element, an analog filter, an A/D converter, and first and second electronic circuit. The analog filter filters a waveform that includes a sensor signal from the sensor element and noise based on a servo signal. The A/D converter converts the waveform filtered by the analog filter into a first digital signal. The first electronic circuit includes a digital filter and acquires a second digital signal by performing signal processing including at least a filtering process on the servo signal by using the digital filter. The second electronic circuit acquires a third digital signal by subtracting the second digital signal from the first digital signal. A setting for the signal processing for acquiring the second digital signal is changed on the basis of the third digital signal.

First claim

What is claimed is:

1. A sensor comprising:
a sensor element;
an analog filter adapted to filter a waveform including a sensor signal from the sensor element and a noise based on a servo signal for controlling the sensor element;
an A/D convertor adapted to convert a waveform filtered by the analog filter into a first digital signal;
a first electronic circuit including a digital filter and adapted to acquire a second digital signal by performing a signal processing including at least a filtering process using the digital filter on the servo signal; and
a second electronic circuit adapted to acquire a third digital signal by subtracting the second digital signal from the first digital signal, wherein
the first electronic circuit changes a setting for the signal processing for acquiring the second digital signal at least on the basis of the third digital signal to change the second digital signal.

2. The sensor of claim 1 further comprising:
a control circuit adapted to control the sensor element by using the servo signal;
a first wire adapted to connect the control circuit and the sensor element; and
a second wire adapted to connect the sensor element and the analog filter, wherein
the noise based on the servo signal includes at least noise associated with the servo signal transferred by a parasitic capacitance between the first and second wires.

3. The sensor of claim 1 , wherein
the noise based on the servo signal changes in response to a change in the servo signal.

4. The sensor of claim 1 , wherein
the sensor element is an acceleration sensor element that converts an acceleration change into a capacitance change and generates the sensor signal on the basis of a carrier signal that supplies a voltage to said sensor element which varies with said capacitance change and that is a signal different from the servo signal, and of the capacitance change.

5. The sensor of claim 1 , wherein
the second digital signal is a signal that simulates the waveform acquired by filtering the noise based on the servo signal with the analog filter.

6. The sensor of claim 2 , wherein
the servo signal is a digital signal based on the third digital signal, and
the servo signal is output via a low-pass filter as a sensor output.

7. The sensor of claim 4 , wherein
the carrier signal is a signal at a given frequency and generated as the sensor signal by superimposing the capacitance change on the carrier signal.

8. The sensor of claim 7 , wherein
the sensor element includes:
a first detection movable electrode whose position changes with change in acceleration; and
first detection fixed electrodes opposed to the first detection movable electrode and to which a signal based on the carrier signal is supplied, and wherein

a change of distances between the first detection movable electrode and the first detection fixed electrodes turns into the capacitance change.

9. The sensor of claim 8 , wherein
the sensor element further includes:
a servo control movable electrode coupled to the first detection movable electrode;
springs coupled to the servo control movable electrode; and
servo control fixed electrodes to which a signal based on the servo signal is supplied, and

elastic forces of the springs and an electrostatic force that occurs between the servo control fixed electrodes and the servo control movable electrode are exerted on the servo control movable electrodes.

10. The sensor of claim 1 , wherein
the first electronic circuit further includes:
an up-sampler;
a down-sampler;
an operator; and
a search unit adapted to search for a noise amount on the basis of the third digital signal and a digital signal based on the servo signal,

the servo signal is up-sampled by the up-sampler, and the digital signal up-sampled by the up-sampler is supplied to the digital filter, and an output of the digital filter is down-sampled by the down-sampler, and
the operator generates the second digital signal on the basis of the digital signal down-sampled by the down-sampler and an output of the search unit.

11. The sensor of claim 10 , wherein
the search unit searches for the noise amount on the basis of the digital signal acquired by the down-sampler and the third digital signal.

12. The sensor of claim 9 , wherein
the sensor element includes:
a second detection movable electrode coupled to the servo control movable electrode; and
second detection fixed electrodes opposed to the second detection movable electrode and to which a second carrier signal inverted in phase from the carrier signal is supplied, and

a sensor signal from the first detection movable electrode and a sensor signal from the second detection movable electrode are supplied to the analog filter.

13. The sensor of claim 1 , wherein
a characteristic of the digital filter is set by a tap coefficient, and
the tap coefficient is changed on the basis of the third digital signal.

14. The sensor of claim 13 , wherein
the digital filter is an FIR filter.

Assignees

• Hitachi Ltd

Inventors

• Oshima Takashi
• Furubayashi Yuki
• Mori Keijiro
• Mori Naoki
• Matsumoto Akira

Classifications

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• G01P15/13

  by measuring the force required to restore a proofmass subjected to inertial forces to a null position · CPC title

• G01P2015/0865

  using integrated signal processing circuitry · CPC title

• G01P15/131

  with electrostatic counterbalancing means · CPC title