Nanohole array based sensors with various coating and temperature control

Patent metadata

Field	Value
Publication number	US-11035792-B2
Application number	US-201916294686-A
Country	US
Kind code	B2
Filing date	Mar 6, 2019
Priority date	Mar 6, 2018
Publication date	Jun 15, 2021
Grant date	Jun 15, 2021

Abstract

A nanohole array (NHA)-based plasmonic sensor (e.g., gas/condensed phase sensor), their preparation, and their use to detect and analyze samples, especially mixtures of chemicals/bio-chemicals.

First claim

What is claimed is:

1. A nanohole-array based plasmonic sensor comprising:
i) a substrate at least partially covered with a deposit;
ii) a plasmonic layer on the deposit; and
iii) one or more functional layers on the plasmonic layer;
wherein the sensor comprises a plurality of nanoholes, and
wherein the one or more functional layers have a thickness of between about 5 nm and about 20 nm.

2. The sensor according to claim 1 , wherein the substrate is an etchable substrate.

3. The sensor according to claim 1 , wherein the substrate is silicon.

4. The sensor according to claim 1 , wherein the substrate is covered with a deposit selected from Si 3 N 4 , SiO 2 , and a combination thereof.

5. The sensor according to claim 1 , wherein the deposit is Si 3 N 4 .

6. The sensor according to claim 1 , wherein the deposit has a thickness of between about 20 nm and about 600 nm.

7. The sensor according to claim 1 , wherein the plasmonic layer comprises gold, silver, copper, aluminum, platinum, or any combination thereof.

8. The sensor according to claim 1 , wherein the plasmonic layer comprises gold.

9. The sensor according to claim 1 , wherein the plasmonic layer has a thickness of between about 5 nm and about 300 nm.

10. The sensor according to claim 1 , wherein the one or more functional layers comprise a metal organic framework, DNA, a protein, an aptamer, or any combination thereof.

11. The sensor according to claim 1 , wherein the sensor comprises between 1 and about 20 layers of the functional layer.

12. The sensor according to claim 1 , wherein the sensor comprises about 15 layers of the functional layer.

13. The sensor according to claim 1 , wherein the functional layer comprises a biological layer that interacts with one or more target bio-molecules.

14. The sensor according to claim 13 , wherein the one or more biomolecules comprise DNA, a protein, an aptamer, or any combination thereof.

15. The sensor according to claim 1 , wherein the functional layer comprises copper 1,3,5 benzenetricarboxylate.

16. The sensor according to claim 1 , wherein the sensor comprises circular nanoholes.

17. The sensor according to claim 1 , wherein the nanoholes have a diameter ranging between about 10 and about 500 nm, between about 50 and about 350 nm, between about 100 and about 350 nm, between about 150 and about 350 nm, or between about 200 and about 350 nm.

18. The sensor according to claim 1 , wherein the nanoholes have a diameter of about 25 nm, about 50 nm, about 75 nm, about 100 nm, about 125 nm, about 150 nm, about 175 nm, about 200 nm, about 225 nm, about 250 nm, about 275 nm, about 300 nm, about 325 nm, or about 350 nm.

19. The sensor according to claim 1 , wherein the period of the nanoholes is between about 50 nm and about 1000 nm, between about 300 nm and about 600 nm or between about 400 nm and about 500 nm.

20. The sensor according to claim 1 , wherein the plasmonic nanohole arrays are further coated with nanoparticles.

21. The sensor according to claim 1 , wherein the sensor further comprises an integrated heater.

22. A method of making a sensor comprising:
(i) depositing a covering on a substrate;
(ii) patterning a nanohole array on the covered substrate;
(iii) depositing an insulation layer on the covered substrate while leaving the nanohole array area uncovered
(iv) patterning a heater on the covered substrate;
(v) patterning a membrane window on the backside of the covered substrate;
(vi) etching the substrate to create a membrane,
(vii) depositing a plasmonic layer on top of the substrate, wherein the plasmonic layer is deposited at the central area with respect to the heater; and
(viii) coating the plasmonic layer with one or more functional layers, wherein the one or more functional layers have a thickness of between about 5 nm and about 20 nm.

23. A method of detecting/analyzing one or more gases present in a gas sample or analyzing a condensed/liquid phase sample, the method comprising:
(i) providing a nanohole sensor according to claim 1 ;
(ii) contacting the nanohole sensor with a gas sample or a condensed/liquid phase sample; and
(iii) optically analyzing the gas or condensed/liquid phase sample at one or more temperatures.

24. The method of claim 23 , wherein the analysis is performed under step-wise changes in temperature.

25. The method of claim 23 , wherein the analysis is performed by measuring the intensity change at the peak wavelength of the gas sample.

26. The method of claim 23 , wherein the analysis is performed by measuring the intensity change at multiple wavelengths of the gas sample.

27. The method of claim 23 , wherein the analysis is performed by measuring the value change in color channels of the sensor exposed to the gas sample or condensed liquid phase sample.

28. An array comprising a plurality of sensors according to claim 1 .

29. A condensed/liquid phase sensor comprising a sensor according to claim 1 .

30. The sensor according to claim 1 , wherein the one or more functional layers comprise a metal organic framework.

31. The sensor according to claim 1 , wherein the sensor is adapted for detecting/analyzing one or more gases present in a gas sample and/or analyzing a condensed/liquid phase sample.

32. The method according to claim 22 , wherein the sensor is adapted for detecting/analyzing one or more gases present in a gas sample and/or analyzing a condensed/liquid phase sample.

33. The method according to claim 23 , wherein the analysis is performed using a spectrometer.

34. The method according to claim 23 , wherein the analysis is performed using a camera.

35. The nanohole-array based plasmonic sensor according to claim 1 , wherein the sensor is a gas-phase sensor.

36. The nanohole-array based plasmonic sensor according to claim 1 , wherein the sensor is a condensed/liquid phase sensor.

37. The nanohole-array based plasmonic sensor according to claim 1 , wherein the one or more functional layers have a thickness of between about 10 nm and about 20 nm.

38. The nanohole-array based plasmonic sensor according to claim 1 , wherein the one or more functional layers have a thickness of about 15 nm.

39. A nanohole-array based plasmonic gas-phase sensor comprising:
i) a substrate at least partially covered with a deposit;
ii) a plasmonic layer on the deposit; and
iii) one or more functional layers on the plasmonic layer;
wherein the sensor comprises a plurality of nanoholes,
wherein the one or more functional layers comprise a metal organic framework (MOF); and
wherein the one or more functional layers have a thickness of between about 5 nm and about 20 nm.

40. The nanohole-array based plasmonic gas-phase sensor according to claim 39 , wherein the plasmonic layer has a thickness between about 50 and about 100 nm.

41. The nanohole-array based plasmonic gas-phase sensor according to claim 39 , wherein the plasmonic layer has a thickness of about 80 nm.

42. The nanohole-array based plasmonic gas-phase sensor according to claim 39 , wherein the nanoholes have a diameter of about 200 nm.

43. The nanohole-a

Assignees

• Univ George Washington
• Government Of The Us Secretary Of Commerce National Institute Of Standards And Technology

Inventors

• Zhao Yangyang
• Zaghloul Mona
• Semancik Stephen
• Benkstein Kurt D

Classifications

• G01N21/0332

  with temperature control (control of temperature G05D23/00; cryostats F17C3/08) · CPC title

• G01N33/54373

  involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings · CPC title

• G01N2021/1731

  Temperature modulation · CPC title

• G01N21/1717

  with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance · CPC title

• G01N21/554 Primary

  detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance · CPC title