CMOS thermal fluid flow sensing device employing a flow sensor and a pressure sensor on a single membrane

Patent metadata

Field	Value
Publication number	US-11035709-B2
Application number	US-201716478559-A
Country	US
Kind code	B2
Filing date	Dec 19, 2017
Priority date	Jan 17, 2017
Publication date	Jun 15, 2021
Grant date	Jun 15, 2021

Abstract

A CMOS-based sensing device includes a substrate including an etched portion and a first region located on the substrate. The first region includes a membrane region formed over an area of the etched portion of the substrate, a flow sensor formed within the membrane region and a pressure sensor formed within the membrane region.

First claim

The invention claimed is:

1. A CMOS-based sensing device comprising:
a substrate comprising an etched portion;
a first region located on the substrate, wherein the first region comprises a first membrane region formed over an area of the etched portion of the substrate;
a flow sensor formed within the first membrane region, the flow sensor being a temperature sensing device; and
a pressure sensor formed within said first membrane region,
wherein the flow sensor and the pressure sensor are located completely within the first membrane region.

2. The sensing device according to claim 1 , wherein the first membrane region is an area located directly above the etched portion of the substrate and wherein the first membrane region is supported along its entire perimeter by the substrate.

3. The sensing device according to claim 1 , wherein the flow sensor comprises a first p-n junction type device operating as the temperature sensing device.

4. The sensing device according to claim 3 , wherein the first p-n junction type device comprises at least one diode or an array of diodes; or
wherein the first p-n junction type device comprises a transistor or an array of transistors, and wherein the transistor or the array of transistors each comprises a diode.

5. The sensing device according to claim 3 , comprising a second p-n junction type device located outside the first membrane region, wherein the second p-n junction type device is configured to measure a substrate temperature of the sensor;
wherein the first p-n junction type device is operationally connected to a temperature sensing circuit, and wherein the temperature sensing circuit comprises any one of a voltage proportional to absolute temperature (VPTAT) and a current proportional to absolute temperature (IPTAT).

6. The sensing device according to claim 3 , either:
wherein the first p-n junction type device is configured to operate as a heating element; or
further comprising a heating element within the first membrane region, wherein the first p-n junction type device is located underneath the heating element within the first membrane region having a relatively high increase in temperature.

7. The sensing device according to claim 6 , wherein:
the heating element comprises a material comprising any one of:
n or p type single crystal silicon;
n or p type polysilicon;
tungsten, aluminium, titanium, silicides or any other metal or semi-conductive material available in a CMOS process; or
wherein the heating element comprises amperometric and voltammetric connections; or
comprising a further heating element which is configured to recalibrate the heating element within the first membrane region.

8. The sensing device according to claim 6 , wherein the first p-n junction type device and the heating element are configured to operate in any one of a pulse mode and a continuous mode.

9. The sensing device according to claim 6 , wherein the first p-n junction type device and/or the heating element is configured to increase temperature within the first membrane region, and
wherein the first p-n junction type device is configured to measure heat exchange between the first p-n junction type device and a fluid, and the p-n junction is configured to correlate the heat exchange to at least one property of the fluid so as to differentiate between forms of the fluid, and
wherein the property of the fluid comprises any one of velocity, flow rate, exerted wall shear stress, pressure, temperature, direction, thermal conductivity, diffusion coefficient, density, specific heat, and kinematic viscosity.

10. The sensing device according to claim 3 , wherein either:
the first p-n junction type device is configured to operate in a forward bias mode in which a forward voltage across the first p-n junction type device decreases linearly with a temperature when operated at a constant forward current; or
wherein the first p-n junction type device is configured to operate in a reverse bias mode where a leakage current is exponentially dependent on a temperature.

11. The sensing device according to claim 3 , further comprising one or more temperature sensing elements, and wherein said one or more temperature sensing elements comprise one or more thermopiles each comprising one or more thermocouples connected in series, and
wherein each thermocouple comprises two dissimilar materials which form a junction at a first region of the first membrane region, and the other ends of the materials form a junction at a second region of the first membrane region or in the heat sink region where they are electrically connected, wherein
the thermocouple comprises a material selected from any one of aluminium, tungsten, titanium, and a combination of these materials, and any other metal available in a CMOS process.

12. The sensing device according to claim 11 , wherein:
one temperature sensing element is configured to use for flow sensing and another temperature sensing element is configured to recalibrate said one temperature sensing element; or
wherein when one temperature sensing element is configured to fail, another temperature sensing element is configured to replace said one temperature sensing element.

13. The sensing device according to claim 1 , wherein the flow sensor comprises a resistor, and wherein the resistor is configured to operate as a heating element.

14. The sensing device according to claim 1 , wherein the pressure sensor is a mechanical pressure sensor comprising at least one piezo-element formed within the first membrane region, wherein:
the piezo-element comprises a piezo-resistor, a piezo-diode, a piezo-transistor, and wherein the piezo-element is configured such that an electrical output is correlated to a mechanical displacement of the first membrane region under an applied pressure; and
the piezo-element is located in a region within the first membrane region having an increased sensitivity to stress; and
the piezo-element comprises a material comprising:
n-type doped, p-type doped or un-doped single crystal silicon,
n-type doped, p-type doped or un-doped polysilicon, or
a combination of silicon and polysilicon.

15. The sensing device according to claim 14 , wherein:
the piezo-element is formed in a plurality of segments or arranged in an array form; or
further comprising a pressure sensing circuit comprising at least one said piezo-element; or
comprising further piezo-elements located outside the first membrane region, and wherein said further piezo-elements are configured to operate as temperature compensation devices, comprising:
a temperature compensation circuit comprising said further piezo-elements outside the first membrane region, and
wherein the temperature compensation circuit comprising any one of:
wheatstone bridge sensing circuit;
a voltage proportional to absolute temperature (VPTAT);
a current proportional to absolute temperature (IPTAT); and
a differential amplifier.

16. The sensing device according to claim 1 , wherein:
the flow sensor and the pressure sensor are configured to be operated in parallel so that both sensors operate simultaneously; or
wherein the flow sensor and the pressure sensor are configured to be operated in series so that one of the flow sensor and pressure sensor operates at a time,
wherein when the pressure sensor is not active, the piezo-elements of the pressure sensor are configured to operate as additional temperature sensing elements for the flow sensor, and
wherein the piezo-elements operating as additional temperature sensing elements provide information on

Assignees

• Cambridge Entpr Ltd

Inventors

• De Luca Andrea
• Udrea Florin

Classifications

• H10D84/80

  characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs (H10D84/40 takes precedence) · CPC title

• H10P50/642

  Chemical etching · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H10W40/10

  Arrangements for heating · CPC title

• H10W20/20

  Interconnections within wafers or substrates, e.g. through-silicon vias [TSV] · CPC title