Microphone and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-11034579-B2
Application number	US-201916600909-A
Country	US
Kind code	B2
Filing date	Oct 14, 2019
Priority date	Jul 12, 2019
Publication date	Jun 15, 2021
Grant date	Jun 15, 2021

Abstract

A microphone includes a substrate having a first sound hole formed therein, a sound-sensing module mounted on the substrate so as to be aligned with the first sound hole, a signal-processing chip mounted on the substrate so as to be electrically connected to the sound-sensing module, a cover mounted on the substrate so as to accommodate the sound-sensing module therein and including a filter accommodation portion having a second sound hole formed therein, and a sound delay filter elastically accommodated in the filter accommodation portion so as to be aligned with the second sound hole. The microphone has a simplified structure, and can be manufactured to as to improve the stability and reliability thereof.

First claim

What is claimed is:

1. A microphone, comprising:
a substrate having a first sound hole formed therein;
a sound-sensing module mounted on the substrate, the sound-sensing module being aligned with the first sound hole;
a signal-processing chip mounted on the substrate, the signal-processing chip being electrically connected to the sound-sensing module;
a cover mounted on the substrate, the cover accommodating the sound-sensing module therein, the cover comprising a filter accommodation portion having a second sound hole formed therein; and
a sound delay filter elastically accommodated in the filter accommodation portion, the sound delay filter being aligned with the second sound hole,
wherein the sound delay filter comprises:
a filter substrate having a filter hole formed therein; and
an elastic pattern integrally formed with at least one end portion of the filter substrate, the elastic pattern being elastically disposed between an inner wall of the filter accommodation portion and the filter substrate.

2. The microphone according to claim 1 , wherein the elastic pattern comprises:
a contact pattern spaced apart from the end portion of the filter substrate, the contact pattern being in contact with the inner wall of the filter accommodation portion; and
a spring pattern elastically connecting the filter substrate to the contact pattern.

3. The microphone according to claim 2 , wherein the elastic pattern is provided symmetrically in a pair at opposite side end portions of the filter substrate in a direction in which the sound delay filter enters the filter accommodation portion.

4. The microphone according to claim 2 , wherein the spring pattern is formed in a closed loop shape between the filter substrate and the contact pattern.

5. The microphone according to claim 2 , wherein the spring pattern is formed in an open loop shape between the filter substrate and the contact pattern.

6. The microphone according to claim 2 , wherein the filter accommodation portion comprises an entry guide configured to guide entry of the sound delay filter thereinto.

7. The microphone according to claim 6 , wherein the entry guide comprises an inclined guide surface formed at one end of the filter accommodation portion to guide entry of the sound delay filter into the filter accommodation portion.

8. The microphone according to claim 1 , wherein the sound delay filter is formed of a polymer material.

9. The microphone according to claim 1 , wherein the filter accommodation portion is formed so as to be recessed in an outer surface of the cover, and
wherein the sound delay filter is disposed inside the cover.

10. The microphone according to claim 9 , wherein the filter accommodation portion comprises a latching protrusion configured to restrict movement of an outer surface of the sound delay filter.

11. A method of manufacturing a microphone, the method comprising:
mounting a sound-sensing module on a substrate, in which a first sound hole is formed, so as to be aligned with the first sound hole;
mounting a signal-processing chip on the substrate so as to be electrically connected to the sound-sensing module;
mounting a cover comprising a filter accommodation portion having a second sound hole formed therein on the substrate; and
elastically disposing a sound delay filter in the filter accommodation portion so as to be aligned with the second sound hole,
wherein the sound delay filter comprises:
a filter substrate having a filter hole formed therein; and
an elastic pattern integrally formed with at least one end portion of the filter substrate, the elastic pattern being elastically disposed between an inner wall of the filter accommodation portion and the filter substrate.

12. The method according to claim 11 , wherein the filter accommodation portion is formed so as to be recessed in an outer surface of the cover, and
wherein the sound delay filter is disposed inside the cover.

13. The method according to claim 11 , wherein the elastic pattern comprises:
a contact pattern spaced apart from the end portion of the filter substrate, the contact pattern being in contact with the inner wall of the filter accommodation portion; and
a spring pattern elastically connecting the filter substrate to the contact pattern.

14. The method according to claim 13 , wherein the sound delay filter is manufactured by:
forming a sacrificial layer on an upper surface of a base substrate;
forming a polymer layer on an upper surface of the sacrificial layer;
patterning the polymer layer to form the filter substrate and the elastic pattern; and
removing the sacrificial layer from the filter substrate and the elastic pattern.

15. The method according to claim 12 , wherein the sound delay filter is disposed in the filter accommodation portion after the cover is soldered to the substrate.

Assignees

• Hyundai Motor Co Ltd
• Kia Motors Corp

Inventors

• Yoo Il Seon

Classifications

• H04R2201/003

  Mems transducers or their use · CPC title

• H04R19/04 Primary

  Microphones (H04R19/01 takes precedence) · CPC title

• H04R19/005

  using semiconductor materials · CPC title

• H04R1/342

  for microphones · CPC title

• B81B2201/10

  Microfilters, e.g. for gas or fluids · CPC title