Organic vapor jet print head with orthogonal delivery and exhaust channels

Patent metadata

Field	Value
Publication number	US-11033924-B2
Application number	US-201916254998-A
Country	US
Kind code	B2
Filing date	Jan 23, 2019
Priority date	Jan 31, 2018
Publication date	Jun 15, 2021
Grant date	Jun 15, 2021

Abstract

Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.

First claim

We claim:

1. A device comprising:
a first depositor comprising:
one or more delivery apertures surrounded by one or more exhaust apertures,
wherein the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures,
wherein delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures are routed orthogonally to each other,
wherein the one or more delivery apertures are configured to permit jets of delivery gas pass through a lower surface of the first depositor, and
wherein the lower surface of the first depositor includes the one or more exhaust apertures to remove surplus vapor from a delivery zone.

2. The device of claim 1 , wherein the one or more exhaust apertures is a single oval exhaust aperture.

3. The device of claim 1 , further comprising a second depositor, wherein each of the first and second depositors is enclosed within its own boss or is arranged on a common boss.

4. The device of claim 3 , wherein the first depositor and the second depositor are arranged in different ranks, and a printing pitch is defined by the shortest distance orthogonal to a print direction between centers of the first and second depositors.

5. The device of claim 1 , wherein the exhaust channels are in a plane of the one or more delivery apertures, and the delivery channels are enclosed within pillars normal to the plane of the one or more delivery apertures that extend through the exhaust channel layer.

6. The device of claim 1 , wherein the delivery channels receive delivery gas to provide to the one or more delivery apertures, and wherein the delivery channel includes a plurality of sub-channels through a lower surface of the first depositor that each feed a different delivery aperture of the one or more delivery apertures.

7. The device of claim 6 , further comprising:
at least one delivery via disposed at an opposite end of the delivery channels from the one or more delivery apertures, wherein the at least one delivery via receives delivery gas for the first depositor.

8. The device of claim 1 , wherein process gas is drawn through the one or more exhaust apertures and exits through the exhaust channels.

9. The device of claim 1 , wherein confinement gas is distributed via a recess disposed adjacent to the boss of the first depositor.

10. The device of claim 1 , wherein the exhaust channels form continuous cavities that are separated by walls.

11. The device of claim 1 , wherein an arrangement of the exhaust channels are parallel to a print direction.

12. The device of claim 1 , wherein a shape of the one or more delivery apertures is selected from the group consisting of: circular apertures, and slit apertures.

13. The device of claim 12 , wherein jets from the circular apertures diverge in all directions in a substrate plane when impinged on a substrate or diverge in orthonormal directions, and the jets from the slit apertures diverge in directions orthonormal to a substrate normal and a major axis of a slit of the slit apertures.

14. The device of claim 1 , further comprising:
confinement apertures with planes parallel to a substrate plane, wherein the confinement apertures are positioned on the deposition bosses.

15. The device of claim 1 , wherein the confinement channels are interdigitated with the exhaust channels.

16. The device of claim 1 , wherein the first depositor and other depositors are arranged in banks, wherein each bank deposits a different emissive layer composition to produce a different color of an organic light emitting device.

17. The device of claim 16 , wherein the banks are offset from each other along a print direction by a subpixel separation for each color.

Assignees

• Universal Display Corp

Inventors

• Mcgraw Gregory
• Quinn William E
• King Matthew

Classifications

• B41J2202/20

  Modules · CPC title

• B41J2/145

  Arrangement thereof · CPC title

• B41J2/16

  Production of nozzles · CPC title

• B41J2/14 Primary

  Structure thereof {only for on-demand ink jet heads} · CPC title

• Y10T29/49401

  Fluid pattern dispersing device making, e.g., ink jet · CPC title