Antireflection film, optical element, optical system, method of producing antireflection film

Patent metadata

Field	Value
Publication number	US-11029449-B2
Application number	US-201916269271-A
Country	US
Kind code	B2
Filing date	Feb 6, 2019
Priority date	Aug 31, 2016
Publication date	Jun 8, 2021
Grant date	Jun 8, 2021

Abstract

An antireflection film is formed by laminating an interlayer, a silver-containing metal layer containing silver, and a dielectric layer in this order from the substrate, an anchor region including an oxide of an anchor metal is provided between the silver-containing metal layer and the interlayer, a cap region including an oxide of the anchor metal included in the anchor region is provided between the silver-containing metal layer and the dielectric layer, a crystal grain size obtained by X-ray diffraction measurement in the silver-containing metal layer is less than 6.8 nm, and the anchor metal has a surface energy less than a surface energy of silver and greater than a surface energy of a layer of the interlayer closest to the silver-containing metal layer.

First claim

What is claimed is:

1. An antireflection film that is provided on a substrate and is formed by laminating an interlayer, a silver-containing metal layer containing silver, and a dielectric layer in this order from the substrate, comprising:
an anchor region including an oxide of an anchor metal provided between the silver-containing metal layer and the interlayer; and
a cap region including an oxide of the anchor metal provided between the silver-containing metal layer and the dielectric layer,
wherein a crystal grain size obtained by X-ray diffraction measurement in the silver-containing metal layer is less than 6.8 nm, and
the anchor metal is Ge.

2. The antireflection film according to claim 1 ,
wherein a total film thickness including the anchor region, the silver-containing metal layer, and the cap region is 10 nm or less.

3. The antireflection film according to claim 1 ,
wherein the anchor region includes the anchor metal which is not oxidized, and a content ratio of the oxide of the anchor metal is larger than a content ratio of the anchor metal which is not oxidized.

4. The antireflection film according to claim 1 ,
wherein the surface energy of the anchor metal is 500 mN/m or more and 900 mN/m or less.

5. An optical element comprising:
the antireflection film according to claim 1 .

Assignees

• Fujifilm Corp

Inventors

• Umeda Kenichi
• Nakamura Seigo
• Itai Yuichiro
• Yasuda Hideki

Classifications

• G02B15/167

  having an additional fixed front lens or group of lenses · CPC title

• G02B1/115 Primary

  Multilayers · CPC title

• G02B15/145

  having five groups only · CPC title

• B32B15/04

  comprising metal as the main or only constituent of a layer, {which is} next to another layer of {the same or of} a {different material (next to a bituminous or tarry layer B32B11/08; next to a water-setting substance layer B32B13/06; next to a glass layer B32B17/061; next to a cellulosic plastic layer B32B23/042)} · CPC title

• C23C14/14

  Metallic material, boron or silicon · CPC title