Measuring the vibration amplitude of a scanner mirror
US-2017329130-A1 · Nov 16, 2017 · US
US11028988B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11028988-B2 |
| Application number | US-201816184125-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 8, 2018 |
| Priority date | May 13, 2016 |
| Publication date | Jun 8, 2021 |
| Grant date | Jun 8, 2021 |
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A light source device includes a semiconductor light-emitting device which emits coherent excitation light, and a wavelength conversion element which is spaced from the semiconductor light-emitting device, generates fluorescence by converting the wavelength of the excitation light emitted from semiconductor light-emitting device, and generates scattered light by scattering the excitation light. The wavelength conversion element includes a support member, and a wavelength converter disposed on the support member. The wavelength converter includes a first wavelength converter, and a second wavelength converter which is disposed around the first wavelength converter to surround the first wavelength converter in a top view of the surface of the support member on which the wavelength converter is disposed. The ratio of the intensity of fluorescence to that of scattered light is lower in the second wavelength converter than in the first wavelength converter.
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What is claimed is: 1. A light source device, comprising: a semiconductor light-emitting device which emits excitation light that is coherent; and a wavelength conversion element which is spaced from the semiconductor light-emitting device, generates fluorescence by converting a wavelength of the excitation light emitted from the semiconductor light-emitting device, and generates scattered light by scattering the excitation light, wherein the wavelength conversion element includes a support member, and a wavelength converter disposed on the support member, the wavelength converter includes a first wavelength converter, and a second wavelength converter which is disposed around the first wavelength converter to surround the first wavelength converter in a top view of a surface of the support member on which the wavelength converter is disposed, the first wavelength converter has a first surface, a second surface and a lateral surface, the second surface faces the support member, the first surface is opposite to the second surface, and the lateral surface connects the first surface to the second surface, the wavelength conversion element includes a reflective member which covers part of at least part of the lateral surface, and the second wavelength converter is in direct contact with part of the lateral surface. 2. The light source device according to claim 1 , wherein the first wavelength converter contains fluorescent particles and a transparent bonding material. 3. The light source device according to claim 2 , wherein the first wavelength converter is a ceramic YAG fluorescent substance. 4. The light source device according to claim 2 , wherein fluorescent particles contained in the second wavelength converter have an average particle diameter different from an average particle diameter of fluorescent particles contained in the first wavelength converter. 5. The light source device according to claim 2 , wherein the fluorescent particles contained in the first wavelength converter have a volume proportion different from a volume proportion of the fluorescent particles contained in the second wavelength converter. 6. The light source device according to claim 1 , wherein the second wavelength converter contains a fluorescent material different from a fluorescent material contained in the first wavelength converter. 7. The light source device according to claim 1 , wherein the wavelength converter includes two or more first wavelength converters, and the second wavelength converter is disposed around the two or more first wavelength converters. 8. The light source device according to claim 7 , wherein the two or more first wavelength converters are scanned with the excitation light. 9. A light source device, comprising: a semiconductor light-emitting device which emits excitation light that is coherent; and a wavelength conversion element which is spaced from the semiconductor light-emitting device, generates fluorescence by converting a wavelength of the excitation light emitted from the semiconductor light-emitting device, and generates scattered light by scattering the excitation light, wherein the wavelength conversion element includes a support member, and a wavelength converter disposed on the support member, the wavelength converter includes two or more first wavelength converters disposed on the support member to be spaced from each other, and a second wavelength converter disposed around the two or more first wavelength converters to be in direct contact with each of the two or more first wavelength converters, each of the two or more first wavelength converters includes a first emitting region which emits a first emission light, the second wavelength converter includes a second emitting region which emits a second emission light, a chromaticity coordinate x of the first emission light of the first emitting region and chromaticity coordinate x of the second emission light of the second emitting region are each distributed between 0.2 and 0.4, and the two or more first wavelength converters are scanned with the excitation light. 10. The light source device according to claim 9 , wherein the second wavelength converter has an average refractive index smaller than an average refractive index of the two or more first wavelength converters. 11. The light source device according to claim 7 , wherein the two or more first wavelength converters are arranged in a matrix. 12. The light source device according to claim 7 , wherein a projected pattern is formed corresponding to a pattern of the excitation light which scans the two or more first wavelength converters. 13. The light source device according to claim 9 , wherein the two or more first wavelength converters are a ceramic YAG fluorescent substance. 14. The light source device according to claim 1 , wherein the first wavelength converter contains a plurality of air voids. 15. The light source device according to claim 9 , wherein the wavelength conversion element includes a reflective member disposed between the wavelength converter and the support member, and the reflective member covers at least part of each of lateral surfaces of the two or more first wavelength converters. 16. A lighting device, comprising: the light source device according to claim 1 . 17. The light source device according to claim 1 , wherein a ratio of an intensity of the fluorescence to an intensity of the scattered light is lower in the second wavelength converter than in the first wavelength converter. 18. The light source device according to claim 1 , wherein the first wavelength converter includes a first emitting region into which part of the excitation light enters, and which emits a first emission light, the second wavelength converter includes a second emitting region into which another part of the excitation light enters, and which emits a second emission light, a chromaticity coordinate x of the first emission light of the first emitting region and chromaticity coordinate x of the second emission light of the second emitting region are each distributed between 0.2 and 0.4. 19. The light source device according to claim 9 , wherein part of the excitation light enters the first emitting region, and another part of the excitation light enters the second emitting region. 20. A light source device, comprising: a semiconductor light-emitting device which emits excitation light that is coherent; and a wavelength conversion element which is spaced from the semiconductor light-emitting device, generates fluorescence by converting a wavelength of the excitation light emitted from the semiconductor light-emitting device, and generates scattered light by scattering the excitation light, wherein the wavelength conversion element includes a support member, and a wavelength converter disposed on the support member, the wavelength converter includes a first wavelength converter, and a second wavelength converter which is disposed around the first wavelength converter to surround the first wavelength converter in a top view of a surface of the support member on which the wavelength converter is disposed, the first wavelength converter has a first surface, a second surface and a lateral surface, the second surface faces the support member, the first surface is opposite to the second surface, and the lateral surface connects the first surface to the second surface, the wavelength conversion element includes a reflective member which covers at least part of
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