Laser dicing glass wafers using advanced laser sources
US-2024409449-A1 · Dec 12, 2024 · US
US11028002B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11028002-B2 |
| Application number | US-201514801876-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 17, 2015 |
| Priority date | Jul 18, 2014 |
| Publication date | Jun 8, 2021 |
| Grant date | Jun 8, 2021 |
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A method for thermally treating an annular region of an inner surface of a glass container produced from a borosilicate glass tube is provided. The annular region is disposed at a tubular portion of the glass container and is disposed adjacent to a glass container bottom. The method includes: forming the glass container bottom from the glass tube; heating the annular region of the inner surface of the tubular portion to a treatment temperature TBeh above the transformation temperature TG, wherein the annular region is adjacent to the glass container bottom; maintaining the treatment temperature TBeh for a certain time period; and cooling the glass container to room temperature.
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What is claimed is: 1. A method for thermally treating an annular region of an inner surface of a borosilicate glass container, wherein the annular region is at a tubular portion of the glass container, the method comprising the steps of: forming a glass container bottom from a glass tube and thermally processing the glass container bottom to obtain a shape of the glass container bottom, wherein during the thermally processing of the glass container bottom a diffusion zone is formed that extends at least partially over the annular region, wherein during the thermally processing of the glass container bottom, boron accumulates in the diffusion zone, while boron simultaneously depletes in the glass container bottom; heating only the annular region of the inner surface to a treatment temperature between 700 and 1000° C.; maintaining the treatment temperature for a period of time so that boron diffuses out of the diffusion zone; and cooling the glass container to room temperature; wherein the annular region has an end facing to the glass container bottom and an end facing away from the glass container bottom, wherein the end facing to the glass container bottom has a distance L B from the inside of the glass container bottom along an axis of the glass container of 0 and 20 mm and a distance L A between the end facing to the bottom and the end facing away from the bottom is between 1 and 10 mm. 2. The method according to claim 1 , wherein the period of time is between 1 and 20 seconds. 3. The method according to claim 1 , wherein the heating step comprises heating with a laser from inside the glass container. 4. The method according to claim 1 , wherein the heating step comprises heating by a gas burner or a laser from outside the glass container. 5. The method according to claim 1 , further comprising preheating the glass container, prior to the heating step, to a preheating temperature of 400 to 660° C. 6. The method according to claim 1 , further comprising preheating the glass container, prior to the heating step, so that the glass container has a viscosity of 10 12.4 dPa sec or less. 7. The method according to claim 1 , further comprising the step of relieving stress from the glass container in a stress relief furnace at a stress relief temperature at which a viscosity of the glass container is 10 13.3 dPa sec or less. 8. The method according to claim 1 , further comprising the step of blowing out vaporous boron from the glass container with a gas stream, after the forming step and before the heating step. 9. A method for thermally treating an annular region of an inner surface of a borosilicate glass container, wherein the glass container comprises a glass tube having a longitudinal axis, a first end of the glass tube, and a second end of the glass tube, the method comprising the steps of: forming a bottom of the glass container on the glass tube at the first end, wherein the bottom is a closed container bottom, wherein the container further comprises an annular region; heating only the annular region of the glass container to a treatment temperature between 700 and 1000° C., wherein the heating is done from inside the glass tube; maintaining the treatment temperature for a period of time; and cooling the glass container to room temperature after the period of time has elapsed; wherein the annular region has an end facing to the glass container bottom and an end facing away from the glass container bottom, the end facing to the glass container bottom has a distance L B from the inside of the glass container bottom along a container axis of 0 and 20 mm and the distance L A between the end facing to the bottom and the end facing away from the bottom is between 1 and 10 mm. 10. The method of claim 9 , wherein the heating only the annular region of the glass container step is conducted with a laser. 11. A method for thermally treating an annular region of an inner surface of a borosilicate glass container, wherein the glass container comprises a glass tube having a longitudinal axis, a first end of the glass tube, and a second end of the glass tube, the method comprising the steps of: forming a bottom of the glass container on the glass tube at the first end, wherein the bottom is a closed container bottom, wherein the container further comprises an annular region; heating only the annular region of the glass container to a treatment temperature between 700 and 1000° C., wherein the heating is done from outside the glass tube; maintaining the treatment temperature for a period of time; and cooling the glass container to room temperature after the period of time has elapsed; wherein the annular region has an end facing to the glass container bottom and an end facing away from the glass container bottom, the end facing to the glass container bottom has a distance L B from the inside of the glass container bottom along a container axis of 0 and 20 mm and the distance L A between the end facing to the bottom and the end facing away from the bottom is between 1 and 10 mm.
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