Gas Analysis with an Inverted Magnetron Source
US-2019368959-A1 · Dec 5, 2019 · US
US11022515B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11022515-B2 |
| Application number | US-201716330902-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 28, 2017 |
| Priority date | Oct 6, 2016 |
| Publication date | Jun 1, 2021 |
| Grant date | Jun 1, 2021 |
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Official abstract text for this publication.
A sniffer leak detector is provided herein, including a sniffer probe and a vacuum pump which are connected to each other by a gas flow path, a gas analyzer arranged along the gas flow path and analyzes the gas taken in by the vacuum pump through the sniffer probe. The sniffer leak detector further includes a distance sensor that detects the distance between the sniffer probe and the test object, and a control is linked to the distance sensor. The control is designed to vary the carrier gas flow transported along the gas flow path, depending on the measured distance.
Opening claim text (preview).
The invention claimed is: 1. A sniffer leak detector comprising a sniffer probe and a vacuum pump connected to each other via a gas flow path, and a gas analyzer is arranged along the gas flow path for analyzing the gas drawn in by the vacuum pump via the sniffer probe, a distance sensor configured to detect the distance between the sniffer probe and a test object, and a control is connected to the distance sensor, and is configured to vary a carrier gas flow conveyed along the gas flow path depending on the distance measured; wherein the control influences a flow rate of the vacuum pump by adjusting a speed of the vacuum pump and/or influences a flow resistance of a throttle arranged in the gas flow path. 2. The sniffer leak detector of claim 1 , wherein the control influences the flow rate of the vacuum pump. 3. The sniffer leak detector of claim 1 , wherein the control influences the flow resistance of a throttle arranged in the gas flow path. 4. The sniffer leak detector of claim 1 , wherein the gas analyzer is arranged along the gas flow path between the sniffer probe and the vacuum pump. 5. The sniffer leak detector of claim 1 , wherein the gas analyzer is arranged in a second gas flow path connected to the sniffer probe, and the gas flow of the second gas flow path is not influenced by the control. 6. The sniffer leak detector of claim 1 , wherein a speed sensor is configured to measure a relative speed of the sniffer probe with respect to the test object, the control is further configured to control the gas flow depending on the speed measured. 7. A method for sniffer leak detection with a sniffer leak detector according to claim 1 , comprising: measuring the distance between the distance sensor and a test object to be checked for a leak; guiding the carrier gas flow along the gas flow path to be drawn in by the sniffer probe; and adjusting the carrier gas flow by the control depending on the distance measured. 8. The method of claim 7 , further comprising monitoring the distance measured for a predefined period, and increasing the carrier gas flow if the distance increases and/or decreasing the carrier gas flow if the distance decreases. 9. The method of claim 7 , displaying the amount of test gas detected, taking into account the measured distance and/or taking into account the adjusted carrier gas flow.
Accessories or associated equipment; Pump constructions · CPC title
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