Air data probe corrosion protection
US-12071684-B2 · Aug 27, 2024 · US
Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films
US11021793B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11021793-B2 |
| Application number | US-201815994961-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 31, 2018 |
| Priority date | May 31, 2018 |
| Publication date | Jun 1, 2021 |
| Grant date | Jun 1, 2021 |
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- Title
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Abstract
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Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.
First claim
Opening claim text (preview).
We claim: 1. A Group 6 transition metal-containing film forming composition comprising a precursor, wherein the precursor is MoO 2 Cl 2 .(methyl hexanoate) 2 or MoO 2 Cl 2 .(amyl acetate) 2 . 2. A Group 6 transition metal-containing film forming composition comprising a precursor, wherein the precursor is MoO 2 Cl 2 .( n Bu-O—CH 2 —CH 2 —O- n Bu).
Assignees
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Classifications
- C23C16/45553Primary
characterized by the use of precursors specially adapted for ALD · CPC title
- C07F11/00Primary
Compounds containing elements of Groups 6 or 16 of the Periodic Table · CPC title
compounds without a metal-carbon linkage · CPC title
by evaporation using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title
- C23C16/34Primary
Nitrides {(C23C16/303 takes precedence)} · CPC title
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- What does patent US11021793B2 cover?
- Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.
- Who is the assignee on this patent?
- Air Liquide
- What technology area does this patent fall under?
- Primary CPC classification C23C16/45553. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Jun 01 2021 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).