Nanostraw devices and methods of fabricating and using the same

Patent metadata

Field	Value
Publication number	US-11020345-B2
Application number	US-201716083758-A
Country	US
Kind code	B2
Filing date	Mar 14, 2017
Priority date	Mar 14, 2016
Publication date	Jun 1, 2021
Grant date	Jun 1, 2021

Abstract

Microdevices containing a chamber bound on one side by a nanoporous membrane are provided. The nanoporous membrane may contain hollow nanotubes that extend through the nanoporous membrane, from one surface to the other, and extend beyond the surface of the nanoporous membrane opposite the surface interfacing with the chamber. The nanotubes may provide a fluidic conduit between an environment external to the microdevice and the chamber, which is otherwise substantially fluid-tight. Also provided are methods of making a microdevice and methods of using the microdevices.

First claim

What is claimed is:

1. A microdevice comprising a chamber defining a plurality of sides, wherein the chamber is bound on a first side by a nanoporous membrane comprising:
a first surface comprising a first region interfacing with the chamber;
a second surface opposite the first surface; and
a plurality of hollow nanotubes that extend through the nanoporous membrane from the first surface to a distance above the second surface,
wherein at least some of the nanotubes extend from within the first region and provide a fluidic conduit between an environment external to the microdevice and the chamber, which is otherwise substantially fluid-tight,
wherein a layer of a first polymeric material forms one or more second sides bounding the chamber,
wherein the first polymeric material is selected from poly(methyl methacrylate) (PMMA), polydimethylsiloxane (PDMS), polycarbonate (PC), polyethylene terephthalate (PET), chitosan, poly(lactic-co-glycolic acid) (PLGA), poly-2-hydroxyethyl methacrylate (polyHEMA), polystyrene (PS), polyethylene glycol diacrylate-based hydrogels (PEGDA), co-polymers, mixtures, adducts, or combinations thereof, and
wherein the nanoporous membrane is bonded to components of the microdevice via one or more second regions of only the first surface.

2. The microdevice of claim 1 , wherein the microdevice is a planar device defining a plane, wherein the nanoporous membrane is substantially parallel to the plane.

3. The microdevice of claim 2 , wherein the microdevice has a ratio between an average lateral dimension and a thickness of 2:1 or greater.

4. The microdevice of claim 2 , wherein the microdevice has a thickness of 1,000 μm or less.

5. The microdevice of claim 2 , wherein the microdevice is a substantially circular disc.

6. The microdevice of claim 1 , wherein the chamber has a volume in the range of 10 2 to 10 6 μm 3 .

7. The microdevice of claim 1 , wherein the nanotubes have an inner diameter in the range of 5 to 1,000 nm.

8. The microdevice of claim 1 , wherein the distance above the second surface is in the range of 10 nm to 100 μm.

9. The microdevice of claim 1 , wherein the nanoporous membrane comprises the plurality of nanotubes at a density in the range of 10 6 to 10 9 cm −2 .

10. The microdevice of claim 1 , wherein the nanoporous membrane is bonded to the first polymeric material of the one or more second sides via a heat-activated, pressure-sensitive adhesive.

11. The microdevice of claim 10 , wherein the heat-activated, pressure-sensitive adhesive is selected from polycaprolactone (PCL), poly-L-lactide (PLLA), poly-DL-lactic acid (DL-PLA), polyglycolic acid (PGA), gelatin, agarose, poly(anhydrides), or co-polymers, mixtures, adducts, or combinations thereof.

12. The microdevice of claim 1 , wherein the nanoporous membrane comprises a second polymeric material.

13. The microdevice of claim 12 , wherein the second polymeric material is selected from polycarbonate (PC), polyethylene terephthalate (PET), polylactic acid (PLA), polyglycolic acid (PGA), PLGA, layer-by-layer polyethylene imine/polyacrylic acid, N-isopropylacrylamide (NiPAAM), poly(methyl methacrylate) (PMMA), chitosan, protein hydrogels, or a combination thereof.

14. A kit comprising:
a microdevice of claim 1 ; and
a packaging configured to hold the microdevice.

15. A method of preparing a microdevice, comprising:
i) fabricating on a substrate a first layer comprising an open chamber comprising a bottom surface and one or more lateral partitions that extend away from the substrate, wherein one or more exposed ends of the one or more lateral partitions distal to the bottom surface define a top surface of the first layer and circumscribe an opening at the top of the chamber;
ii) bonding a nanoporous membrane to the top surface, thereby forming a fluid-tight seal between the top surface and the nanoporous membrane, wherein the bonding comprises:
depositing a second layer of a heat-activated, pressure-sensitive adhesive on the top surface; and
heat bonding the nanoporous membrane to the top surface, wherein the nanoporous membrane comprises:
a first surface comprising a first region interfacing with the chamber; and
a second surface opposite the first surface; and
a plurality of hollow nanotubes that extend through the nanoporous membrane from the first surface to the second surface;
iii) patterning the first layer and the nanoporous membrane bonded to the top surface; and
iv) removing a sublayer of the patterned nanoporous membrane, thereby forming a third surface of the nanoporous membrane opposite the first surface, wherein the nanotubes extend through the nanoporous membrane from the first surface to a distance above the third surface,
wherein at least some of the nanotubes extend from within the first region and provide a fluidic conduit between an environment external to the microdevice and the chamber, which is otherwise substantially fluid-tight.

16. The method of claim 15 , wherein the heat-activated, pressure-sensitive adhesive is polycaprolactone (PCL), poly-L-lactide (PLLA), poly-DL-lactic acid (DL-PLA), polyglycolic acid (PGA), gelatin, agarose, poly(anhydrides), or co-polymers, mixtures, adducts, or combinations thereof.

Assignees

• Univ California
• Univ Leland Stanford Junior
• The Regents Of The Univ Of California The Board Of Trustees Of The Leland Stanford Junior Univ Stanf

Inventors

• Fox Cade B
• Dinakar Hariharasudhan Chirra
• Melosh Nicholas A
• Desai Tejal A

Classifications

• B81B2203/0361

  Tips, pillars · CPC title

• B81C1/00047

  Cavities · CPC title

• B81B2203/0315

  Cavities · CPC title

• B31D3/00

  Making articles of cellular structure, e.g. insulating board · CPC title

• A61K9/0097 Primary

  Medicinal compositions released by microdevices, e.g. microelectromechanical systems [MEMS], microdevices comprising chips or microdevices on silicon · CPC title