Valve system

Patent metadata

Field	Value
Publication number	US-11015735-B2
Application number	US-201816217523-A
Country	US
Kind code	B2
Filing date	Dec 12, 2018
Priority date	Jan 18, 2018
Publication date	May 25, 2021
Grant date	May 25, 2021

Abstract

A first flow path is connected to an inlet for introducing gas into a microvalve. A second flow path is connected to an outlet for allowing gas to flow out of the microvalve. A third flow path is for introducing a pneumatic fluid into the microvalve. A negative pressure generation mechanism (a pump) is for generating a negative pressure on the second flow path to suck gas from the first flow path forward the second flow path via the microvalve. A pressure adjustment mechanism (a connection flow path and a valve) is for reducing a pressure difference between the second flow path and the third flow path to prevent the inlet and the outlet from being blocked by a diaphragm layer in response to the negative pressure generated on the second flow path side.

First claim

What is claimed is:

1. A valve system comprising:
a microvalve having a laminated structure including a base layer on which an inlet and an outlet for gas are formed, a cover layer facing the base layer, and a diaphragm layer that is provided between the base layer and the cover layer and is elastically deformable in response to a flow of a pneumatic fluid, to block the inlet and the outlet, the diaphragm layer having first and second sides;
a first flow path that is connected to the inlet for introducing gas into the microvalve, the first flow path being connected to the first side of the diaphragm layer;
a second flow path that is connected to the outlet for allowing gas to flow out of the microvalve, the second flow path being connected to the first side of the diaphragm layer, the second flow path being fluidly connectable to the first flow path;
a third flow path for introducing the pneumatic fluid into the microvalve, the third flow path being connected to the second side of the diaphragm layer;
a connection flow path connecting the second flow path and the third flow path;
a negative pressure generation mechanism for generating a negative pressure on the second flow path and the connection flow path;
a first valve configured to open and close the third flow path;
a second valve that is operable to open and close the connection flow path; and
a controller configured to cause the first valve to be closed and second valve to be opened in a state where the negative pressure generation mechanism is activated to generate negative pressures on both of the connection flow path and the second flow path to reduce a pressure difference between the first and second sides of the diaphragm laver.

2. The valve system according to claim 1 , wherein the controller is configured to cause the pneumatic fluid to be supplied into the microvalve with the connection flow path being closed with the second valve, and causes supply of the pneumatic fluid into the microvalve to be stopped with the connection flow path being opened with the second valve.

3. The valve system according to claim 1 , wherein the diaphragm layer is formed of a glass film having a thickness of 5 to 20 μm and is elastically deformable at a pressure of 5 to 600 kPa received from the pneumatic fluid to block the inlet and the outlet.

4. The valve system according to claim 1 , wherein the diaphragm layer is formed of a silicon film having a thickness of 10 to 150 μm and is elastically deformable at a pressure of 20 to 1000 kPa received from the pneumatic fluid to block the inlet and the outlet.

5. The valve system according to claim 1 , wherein the third flow path is provided separately from the first flow path, and the pneumatic fluid in the third flow path does not flow into the first flow path.

6. A valve system comprising:
a microvalve having a laminated structure including a base layer on which an inlet and an outlet for gas are formed, a cover layer facing the base layer, and a diaphragm layer that is provided between the base layer and the cover layer and is elastically deformable in response to a flow of a pneumatic fluid, to block the inlet and the outlet;
a first flow path that is connected to the inlet for introducing gas into the microvalve;
a second flow path that is connected to the outlet for allowing gas to flow out of the microvalve;
a third flow path for introducing the pneumatic fluid into the microvalve;
a negative pressure generation mechanism for generating a negative pressure on a second flow path side to suck gas from the first flow path forward the second flow path via the microvalve; and
a pressure adjustment mechanism for reducing a pressure difference between the second flow path and the third flow path to prevent the inlet and the outlet from being blocked by the diaphragm layer in response to the negative pressure generated on the second flow path side,
wherein the diaphragm layer is formed of a glass film having a thickness of 5 to 20 μm and is elastically deformable at a pressure of 5 to 600 kPa received from the pneumatic fluid to block the inlet and the outlet.

Assignees

• Shimadzu Corp

Inventors

• Lu Wenjian
• Shibamoto Shigeaki
• Yanagibayashi Jun

Classifications

• F16K99/0059

  actuated by a pilot fluid · CPC title

• F16K99/0015 Primary

  Diaphragm or membrane valves · CPC title

• F16K7/17

  the diaphragm being actuated by fluid pressure · CPC title

• F16K31/128

  servo actuated · CPC title

• G01N30/20

  using a sampling valve · CPC title