Actuation mechanism for accurately controlling distance in OVJP printing

Patent metadata

Field	Value
Publication number	US-11014386-B2
Application number	US-201715483251-A
Country	US
Kind code	B2
Filing date	Apr 10, 2017
Priority date	Apr 11, 2016
Publication date	May 25, 2021
Grant date	May 25, 2021

Abstract

A device for use in organic vapor jet printing (OVJP) and similar arrangements includes a print head movable in more than one degree of freedom with sufficient thermal insulation that there is little to no movement in the Z direction. One or more sensors may be used to monitor and adjust the distance between the substrate and the print head.

First claim

We claim:

1. A device comprising:
an organic vapor jet printing (OVJP) print head configured to eject an organic material toward a substrate;
at least one elastic member connecting the print head to a motion frame such that the print head is adjustable in at least one rotational degree of freedom and at least one other degree of freedom;
at least one sensor connected to the print head via a thermal barrier, the at least one sensor arranged and configured to measure a distance to the substrate, the thermal barrier comprising: one or more leaf springs, stainless steel, Inconel, or a combination thereof; and
a first actuator that provides control of the print head in a direction essentially perpendicular to the substrate during operation of the print head to eject organic material toward the substrate.

2. The device of claim 1 , wherein the at least one elastic member comprises a leaf spring.

3. The device of claim 1 , wherein the first actuator is configured to adjust the distance to the substrate based on a measurement obtained by the at least one sensor.

4. The device of claim 1 , wherein the at least one sensor comprises two sensors arranged on opposite sides of the print head.

5. The device of claim 1 , wherein, the thermal barrier is arranged and configured such that, during operation of the device to deposit material on the substrate, the thermal barrier causes a thermal gradient in a direction essentially parallel to the substrate.

6. The device of claim 1 , further comprising:
an injection block in fluid communication with the print head and rigidly connected to the print head; and
the motion frame, wherein the motion frame is rigidly connected to the injection block.

7. The device of claim 6 , wherein the injection block is rigidly connected to a motion frame of the print head at a support position, such that movement of the support position causes a movement comprising at least one selected from the group consisting of: movement of the print head in a direction essentially perpendicular to the substrate, and change of the angle between the print head and the substrate.

8. The device of claim 1 , further comprising a second actuator which, when actuated in conjunction with the first actuator, adjusts a position of the print head along an axis essentially perpendicular to the substrate.

9. The device of claim 8 , wherein each of the first actuator and the second actuator adjust the position of the print head via rotation of the print head relative to different points.

10. The device of claim 1 , further comprising a second actuator that provides rotational control of an orientation of the print head.

11. A device comprising:
an organic vapor jet printing (OVJP) print head configured to eject an organic material toward a substrate;
at least one elastic member connecting the print head to a motion frame such that the print head is adjustable in at least one rotational degree of freedom and at least one other degree of freedom;
a first actuator that provides control of the print head in a direction essentially perpendicular to the substrate during operation of the print head to eject organic material toward the substrate; and
a second actuator which, when actuated in conjunction with the first actuator, adjusts a position of the print head along an axis essentially perpendicular to the substrate;
wherein each of the first actuator and the second actuator adjust the position of the print head via rotation of the print head relative to different points.

12. The device of claim 11 , wherein the at least one elastic member comprises a leaf spring.

13. The device of claim 11 , further comprising at least one sensor connected to the print head via a thermal barrier, the at least one sensor arranged and configured to measure a distance to the substrate.

14. The device of claim 13 , wherein the first actuator is configured to adjust the distance to the substrate based on a measurement obtained by the at least one sensor.

15. The device of claim 13 , wherein the at least one sensor comprises two sensors arranged on opposite sides of the print head.

16. The device of claim 13 , wherein the thermal barrier comprises one or more leaf springs.

17. The device of claim 13 , wherein the thermal barrier comprises stainless steel, Inconel, or a combination thereof.

18. The device of claim 13 , wherein the thermal barrier is arranged and configured such that, during operation of the device to deposit material on the substrate, the thermal barrier causes a thermal gradient in a direction essentially parallel to the substrate.

19. The device of claim 11 , further comprising:
an injection block in fluid communication with the print head and rigidly connected to the print head; and
the motion frame, wherein the motion frame is rigidly connected to the injection block.

20. The device of claim 19 , wherein the injection block is rigidly connected to a motion frame of the print head at a support position, such that movement of the support position causes a movement comprising at least one selected from the group consisting of: movement of the print head in a direction essentially perpendicular to the substrate, and change of the angle between the print head and the substrate.

Assignees

• Universal Display Corp

Inventors

• Van Putten Peter
• Pekelder Sven
• Meuwese Mark
• Willenbroek Maurits
• Van Rens Piet

Classifications

• B41J25/001 Primary

  Mechanisms for bodily moving print heads or carriages parallel to the paper surface · CPC title

• C23C14/54

  Controlling or regulating the coating process · CPC title

• C23C14/228

  Gas flow assisted PVD deposition · CPC title

• C23C14/12

  Organic material · CPC title

• C23C14/04

  Coating on selected surface areas, e.g. using masks · CPC title