Piezoelectric vibration device

Patent metadata

Field	Value
Publication number	US-11011695-B2
Application number	US-201816196998-A
Country	US
Kind code	B2
Filing date	Nov 20, 2018
Priority date	Nov 27, 2017
Publication date	May 18, 2021
Grant date	May 18, 2021

Abstract

A piezoelectric vibration device includes an element mounting member provided with a recessed part, a vibration element held in the recessed part, and a lid closing the recessed part. The element mounting member includes an insulating base body including an inner bottom surface of the recessed part and an inner circumferential surface of the recessed part surrounding the inner bottom surface, a pair of signal terminals which are located on an outer surface of the base body and are electrically connected to the vibration element, a GND terminal which is located on the outer surface of the base body, and a shield film which is superposed on the inner circumferential surface of the recessed part and is electrically connected to the GND terminal.

First claim

The invention claimed is:

1. A piezoelectric vibration device comprising
an element mounting member comprising a recessed part,
a piezoelectric vibration element held in the recessed part, and
a lid closing the recessed part, wherein
the element mounting member comprises
an insulating base body comprising an inner bottom surface of the recessed part and an inner circumferential surface of the recessed part surrounding the inner bottom surface,
a pair of signal terminals which are located on an outer surface of the base body and are electrically connected to the piezoelectric vibration element,
a reference potential terminal located on the outer surface of the base body, and
a shield film which is superposed on the inner circumferential surface and is electrically connected to the reference potential terminal.

2. The piezoelectric vibration device according to claim 1 , further comprising, on the inner bottom surface, a pair of pads which are electrically connected to the pair of signal terminals and on which the piezoelectric vibration element is mounted, wherein
the inner circumferential surface, in a planar view of the inner bottom surface, comprises
a first area separated from both of the pair of pads by a predetermined distance or more and
a second area having a shorter distance than the predetermined distance relative to at least one of the pair of pads, and

the shield film is superposed only on the first area between the first area and the second area.

3. The piezoelectric vibration device according to claim 2 , wherein:
the inner circumferential surface, in a planar view of the inner bottom surface, comprises
a first inner wall surface and a second inner wall surface which face each other in a predetermined first direction and
a third inner wall surface and a fourth inner wall surface which face each other in a second direction perpendicular to the first direction,

the piezoelectric vibration element comprises
a piezoelectric body, in a planar view of the inner bottom surface, comprising
a base part,
a pair of vibration arms extending from the base part to the fourth inner wall surface side alongside each other, and
a support arm which projects from the base part to the first inner wall surface side and then bends to the fourth inner wall surface side and extends alongside the pair of vibration arms,

a plurality of excitation electrodes located on the pair of vibration arms, and
a pair of element terminals which are electrically connected to the plurality of excitation electrodes and are bonded to the pair of pads,

at least one of the pair of element terminals is located on the support arm,
the first area comprises a portion on the outer side of the pair of vibration arms in the second inner wall surface and a portion on
the second wall surface side in the fourth inner wall surface, and the second area comprises a portion on the outer side of the pad connected to the element terminal on the support arm in the first inner wall surface.

4. The piezoelectric vibration device according to claim 2 , wherein:
the inner circumferential surface, in a planar view of the inner bottom surface, comprises
a first inner wall surface and a second inner wall surface which face each other in the predetermined first direction and
a third inner wall surface and a fourth inner wall surface which face each other in the second direction perpendicular to the first direction,

the piezoelectric vibration element comprises
a plate shaped piezoelectric body facing the inner bottom surface,
a pair of excitation electrodes located on the two major surfaces of the piezoelectric body, and
a pair of element terminals which are electrically connected to the pair of excitation electrodes and are bonded to the pair of pads and are arranged at an end part on the third inner wall surface side in the piezoelectric body along the third inner wall surface,

the first area comprises the entirety of the fourth inner wall surface, a portion on the fourth inner wall surface side in the first inner wall surface, and a portion on the fourth inner wall surface side in the second inner wall surface, and
the second area comprises a portion on the outer side of the pair of pads in the third inner wall surface.

5. The piezoelectric vibration device according to claim 1 , wherein the shield film covers the entire circumference of the inner circumferential surface when viewed on a plane.

6. The piezoelectric vibration device according to claim 5 , further comprises, on the inner bottom surface, a pair of pads which are electrically connected to the pair of signal terminals and on which the piezoelectric vibration element is mounted, wherein
the piezoelectric vibration element comprises
a piezoelectric body, in a planar view of the inner bottom surface, comprising
a base part,
a pair of vibration arms extending from the base body alongside each other, and
a support part between the pair of vibration arms which projects from the base part alongside the pair of vibration arms,

a plurality of excitation electrodes located on the pair of vibration arms, and
a pair of element terminals which are located on the support part, are electrically connected to the plurality of excitation electrodes, and are bonded to the pair of pads.

7. The piezoelectric vibration device according to claim 1 , wherein:
the lid is configured by metal, and
the shield film spreads from the inner circumferential surface to an upper surface of the base body and comprises, on the upper surface of the base body, a portion bonded to the lid.

8. The piezoelectric vibration device according to claim 1 , wherein the shield film spreads from the inner circumferential surface to the inner bottom surface.

9. The piezoelectric vibration device according to claim 1 , further comprising an insulation film covering over the shield film.

10. The piezoelectric vibration device according to claim 1 , wherein the base body, on the inner bottom surface, comprises a pair of projection parts which project to the lid side and on an upper surfaces of which the pair of pads are located.

Assignees

• Kyocera Corp

Inventors

• Kimura Eiji

Classifications

• H03H9/21

  Crystal tuning forks · CPC title

• G01C19/5628 Primary

  Manufacturing; Trimming; Mounting; Housings · CPC title

• H03H9/0519

  for cantilever (H03H9/1021 takes precedence) · CPC title

• H03H9/1021

  the BAW device being of the cantilever type · CPC title

• H01L41/047

  Electricity · mapped topic