Film thickness measuring method and film thickness measuring apparatus

Patent metadata

Field	Value
Publication number	US-11009340-B2
Application number	US-201815924508-A
Country	US
Kind code	B2
Filing date	Mar 19, 2018
Priority date	Mar 22, 2017
Publication date	May 18, 2021
Grant date	May 18, 2021

Abstract

A film thickness measuring apparatus includes a displacement sensor, and a film thickness calculator that includes a first processor, a second processor, and a third processor. The displacement sensor detects displacement of a sheet in its thickness direction at a location opposite to a portion of a terahertz scanner from which a terahertz wave is applied to a conveyance path. In accordance with a detection signal provided by the displacement sensor, the first processor determines the speed of displacement of the sheet in its thickness direction while the sheet is conveyed along the conveyance path. In accordance with the speed of displacement, the second processor corrects a scan waveform acquired by the terahertz scanner. In accordance with the peaks of the intensity of the terahertz wave that appear in the scan waveform corrected by the second processor, the third processor calculates the thickness of a film formed on the sheet.

First claim

What is claimed is:

1. A film thickness measuring method comprising:
a) conveying, along a predetermined conveyance path, a sheet on which a film serving as a target for measurement is formed;
b) applying a terahertz wave to a single side of the sheet in its thickness direction while the sheet is conveyed along the conveyance path;
c) receiving the terahertz wave reflected off of the single side of the sheet, and recording an intensity of the received terahertz wave over time so as to acquire a scan waveform;
d) measuring, concurrently with step b), a speed of displacement of the sheet in its thickness direction while the sheet is conveyed along the conveyance path;
e) correcting the scan waveform in accordance with the speed of displacement of the sheet in its thickness direction; and
f) calculating a thickness of the film of the sheet in accordance with peaks of the intensity of the terahertz wave that appear in the scan waveform corrected.

2. The film thickness measuring method according to claim 1 , wherein
step e) involves correcting the scan waveform in accordance with a correction map including a relationship between the speed of displacement of the sheet in its thickness direction and a variation in time axis of the scan waveform.

3. A film thickness measuring apparatus comprising:
a conveyor;
a terahertz scanner;
a displacement sensor; and
a film thickness calculator, wherein
the conveyor is configured to convey a sheet along a predetermined conveyance path,
the terahertz scanner includes
an applicator configured to apply a terahertz wave to a single side of the sheet in its thickness direction while the sheet is conveyed along the conveyance path,
a receiver configured to receive the terahertz wave reflected off of the single side of the sheet on the conveyance path, and
a scan waveform acquirer configured to record, over time, an intensity of the terahertz wave received by the receiver, so as to acquire a scan waveform,

the displacement sensor is configured to detect displacement of the sheet in its thickness direction at a location opposite to a portion of the terahertz scanner from which the terahertz wave is applied to the conveyance path, and
the film thickness calculator includes
a first processor configured to determine, in accordance with a detection signal provided by the displacement sensor, a speed of displacement of the sheet in its thickness direction while the sheet is conveyed along the conveyance path,
a second processor configured to correct, in accordance with the speed of displacement, the scan waveform acquired by the terahertz scanner, and
a third processor configured to calculate, in accordance with peaks of the intensity of the terahertz wave that appear in the scan waveform corrected by the second processor, a thickness of a film formed on the sheet.

4. The film thickness measuring apparatus according to claim 3 , wherein
the film thickness calculator includes a recorder recording a correction map including a relationship between the speed of displacement of the sheet in its thickness direction and a variation in time axis of the scan waveform, and
the second processor is configured to correct the scan waveform in accordance with the correction map recorded in the recorder.

Assignees

• Toyota Motor Co Ltd

Inventors

• Miura Masanori
• Takayanagi Jun

Classifications

• G01B11/0625 Primary

  with measurement of absorption or reflection · CPC title

• G01N21/3586

  by Terahertz time domain spectroscopy [THz-TDS] · CPC title

• G01B11/0691

  of objects while moving (G01B11/0616 takes precedence) · CPC title

• G01B11/0633 Primary

  using one or more discrete wavelengths · CPC title

• G01B15/02

  for measuring thickness · CPC title