Magneto-resistance element in which I-III-VI2 compound semiconductor is used, method for manufacturing said magneto-resistance element, and magnetic storage device and spin transistor in which said magneto-resistance element is used

Patent metadata

Field	Value
Publication number	US-11004465-B2
Application number	US-201716311367-A
Country	US
Kind code	B2
Filing date	Jun 23, 2017
Priority date	Jun 24, 2016
Publication date	May 11, 2021
Grant date	May 11, 2021

Abstract

An object of the present invention is to provide a Magneto-Resistance (MR) element showing a high Magneto-Resistance (MR) ratio and having a suitable Resistance-Area (RA) for device applications. The MR element of the present invention has a laminated structure including a first ferromagnetic layer 16, a non-magnetic layer 18, and a second ferromagnetic layer 20 on a substrate 10, wherein the first ferromagnetic layer 16 includes a Heusler alloy, the second ferromagnetic layer 20 includes a Heusler alloy, the non-magnetic layer 18 includes a I-III-VI2 chalcopyrite-type compound semiconductor, and the non-magnetic layer 18 has a thickness of 0.5 to 3 nm, and wherein the MR element shows a Magneto-Resistance (MR) change of 40% or more, and has a resistance-area (RA) of 0.1 [Ωμm2] or more and 3 [Ωμm2] or less.

First claim

The invention claimed is:

1. A Magneto-Resistance (MR) element having a laminated structure comprising a first ferromagnetic layer, a non-magnetic layer, and a second ferromagnetic layer on a substrate, wherein
the first ferromagnetic layer comprises a Heusler alloy,
the second ferromagnetic layer comprises a Heusler alloy,
the non-magnetic layer comprises a I-III-VI 2 chalcopyrite-type compound semiconductor, and the non-magnetic layer has a thickness of 0.5 to 3 nm, and
the MR element shows a magnetoresistance (MR) change of 40% or more, and has a resistance-area (RA) of 0.1 [Ωμm 2 ] or more and 3 [Ωμm 2 ] or less.

2. The MR element according to claim 1 , wherein the I-III-VI 2 chalcopyrite-type compound semiconductor is one of the semiconductors selected from the group consisting of Cu(In 1-y Ga y )Se 2 (0≤y≤1), Cu(In 1-y Ga y )S 2 (0≤y≤1), Ag(In 1-y Ga y )Se 2 (0≤y≤1), and Ag(In 1-y Ga y )S 2 (0≤y≤1).

3. The MR element according to claim 1 , wherein the Heusler alloy is a Co-based Heusler alloy selected from the group consisting of Co 2 MnGa x Ge 1-x (0≤x≤1), Co 2 MnGa x Sn 1-x (0≤x≤1), Co 2 MnSi x Ge 1-x (0≤x≤1), Co 2 FeGa x Ge 1-x (0≤x≤1), Co 2 Cr y Fe 1-y Ga (0≤y≤1), Co 2 MnGe x Sn 1-x (0≤x≤1), Co 2 Mn y Fe 1-y Sn (0≤y≤1), Co 2-z Fe z MnGe (0≤z≤2), Co 2 Mn y Fe 1-y Ga (0≤y≤1), Co 2 Cr y Fe 1-y Si (0≤y≤1), Co 2 MnTi x Sn 1-x (0≤x≤1), Co 2 MnAl x Sn 1-x (0≤x≤1), Co 2 MnGa x Si 1-x (0≤x≤1), Co 2 Mn y Fe 1-y Si (0≤y≤1), Co 2 MnAl x Si 1-x (0≤x≤1), Co 2 FeGa x Si 1-x (0≤x≤1), Co 2 FeAl x Si 1-x (0≤x≤1), Co 2 CrAl, Co 2 CrGa, Co 2 MnSn, Co 2 MnAl, Co 2 MnGa, Co 2 FeSi, Co 2 FeAl, Co 2 MnGe, Co 2 FeGe, Co 2 FeGa, Co 2 TiSn, Co 2 MnSi, Fe 2 VAl, and Co 2 VAl 55 , the first ferromagnetic layer has B2 or L2 1 structure, and the second ferromagnetic layer has B2 structure.

4. A Magneto-Resistance (MR) element having a laminated structure comprising a first ferromagnetic layer, a non-magnetic layer, and a second ferromagnetic layer on a substrate, wherein
the first ferromagnetic layer comprises one or more magnetic materials selected from the group consisting of:
(i) a CoCr magnetic layer having perpendicular magnetization orientation selected from the group consisting of CoCrPt, CoCrTa, CoCrTaPt, and CoCrTaNb;
(ii) an RE-TM amorphous alloy magnetic layer;
(iii) an artificial lattice magnetic layer selected from the group consisting of Co/Pd, Co/Pt, CoCrTa/Pd, FeCo/Pt, and FeCo/Ni;
(iv) a CoPt, FePt, or FePd alloy magnetic layer;
(v) a SmCo alloy magnetic layer;
(vi) a soft magnetic layer selected from the group consisting of CoFe, CoNiFe, NiFe, CoZrNb, FeN, FeSi, FeAlSi, CoFeB, and FeB; and
(vii) a CoCr magnetic alloy film having in-plane magnetization orientation,

the second ferromagnetic layer comprises one or more magnetic materials selected from the group consisting of:
(i) a CoCr magnetic layer having perpendicular magnetization orientation selected from the group consisting of CoCrPt, CoCrTa, CoCrTaPt, and CoCrTaNb;
(ii) an RE-TM amorphous alloy magnetic layer;
(iii) an artificial lattice magnetic layer selected from the group consisting of Co/Pd, Co/Pt, CoCrTa/Pd, FeCo/Pt, and FeCo/Ni;
(iv) a CoPt, FePt, or FePd alloy magnetic layer;
(v) a SmCo alloy magnetic layer;
(vi) a soft magnetic layer selected from the group consisting of CoFe, CoNiFe, NiFe, CoZrNb, FeN, FeSi, FeAlSi, CoFeB, and FeB; and
(vii) a CoCr magnetic alloy film having in-plane magnetization orientation,

the non-magnetic layer comprises a I-III-VI 2 chalcopyrite-type compound semiconductor, and the non-magnetic layer has a thickness of 0.5 to 3 nm, and
the MR element shows a magnetoresistance (MR) change of 40% or more, and has a resistance-area (RA) of 0.1 [Ωμm 2 ] or more and 3 [Ωμm 2 ] or less.

5. A magnetic storage device using the MR element according to claim 1 , wherein
spin orientation in one ferromagnetic Heusler alloy layer of the MR element is fixed and spin orientation in the other ferromagnetic Heusler alloy layer is allowed to be reversible, and electric current is passed through the MR element in the lamination direction to output a value corresponding to the spin orientation in each of the layers.

6. A spin transistor using the MR element according to claim 1 , wherein
a gate voltage is applied to the chalcopyrite-type compound semiconductor layer, one of the ferromagnetic Heusler alloy layer of the MR element is a source layer, and the other ferromagnetic Heusler alloy layer is a drain layer.

7. A method for producing a Magneto-Resistance (MR) element comprising the steps of:
forming an Ag layer on a MgO (001) single-crystal substrate and performing a heat treatment at 300° C. to 450° C. for 10 minutes to 2 hours;
forming a lower Co 2 FeGa 0.5 Ge 0.5 film on the Ag layer and performing heat treatment at 270° C. to 550° C. for 10 minutes to 2 hours to order the lower Co 2 FeGa 0.5 Ge 0.5 into B2 or L2 1 structure;
forming 0.5 to 3 nm of a Cu(In 0.8 Ga 0.2 )Se 2 film on the lower Co 2 FeGa 0.5 Ge 0.5 ; and
forming an upper Co 2 FeGa 0.5 Ge 0.5 film on the Cu(In 0.8 Ga 0.2 )Se 2 and performing heat treatment at 270° C. to 350° C. for 10 minutes to 2 hours to order the upper Co 2 FeGa 0.5 Ge 0.5 wherein the MR element shows a magnetoresistance (MR) change of 40% or more, and has a resistance-area (RA) of 0.1 [Ωμm 2 ] or more and 3 [Ωμm 2 ] or less.

Assignees

• Nat Inst Materials Science

Inventors

• Kasai Shinya
• Takahashi Yukiko
• CHENG Pohan
• Ikhtiar
• Mitani Seiji
• Ohkubo Tadakatsu
• Hono Kazuhiro

Classifications

• H10D48/40

  Devices controlled by magnetic fields · CPC title

• H10N50/85

  Materials of the active region · CPC title

• H01F10/13

  Amorphous metallic alloys, e.g. glassy metals {(H01F10/3204 takes precedence)} · CPC title

• G11B5/3909 Primary

  Arrangements using a magnetic tunnel junction · CPC title

• H01F10/1936

  Half-metallic, e.g. epitaxial CrO2 or NiMnSb films · CPC title