System and method for beam position visualization

Patent metadata

Field	Value
Publication number	US-10998166-B2
Application number	US-201916712553-A
Country	US
Kind code	B2
Filing date	Dec 12, 2019
Priority date	Jul 29, 2019
Publication date	May 4, 2021
Grant date	May 4, 2021

Abstract

A charged-particle beam (CPB) is aligned to a primary axis of a CPB microscope by determining a first beam deflection drive to a beam deflector for directing the CPB passing a reference location displaced from the primary axis. The beam deflector is provided with a second beam deflection drive during the working mode of the CPB microscope to propagate the beam along the primary axis. The second beam deflection drive is determined based on the first beam deflection drive.

First claim

We claim:

1. A method for operating a charged-particle beam (CPB) microscope, comprising:
providing a first beam deflection drive to a beam deflector to direct a CPB passing a reference location displaced from a primary axis, wherein the reference location is associated with a CPB detector and the first beam deflection drive directs at least a portion of the CPB onto the detector; and
providing a second beam deflection drive to the beam deflector to propagate the CPB along the primary beam axis, wherein the second beam deflection drive is determined based on the first beam deflection drive.

2. The method of claim 1 , wherein directing the CPB passing a reference location includes directing a central axis of the CPB passing a reference location.

3. The method of claim 1 , further comprising scanning the CPB relative to the reference location; and determining the first beam deflection drive based on the scanned CPB received by the detector.

4. The method of claim 3 , wherein the detector is displaced from the primary axis.

5. The method of claim 3 , wherein the first beam deflection drive is determined based on a beam current received by the detector.

6. The method of claim 3 , wherein the first beam deflection drive is determined based on an image of at least a portion of the scanning CPB beam detected by the detector.

7. A method for operating a charged-particle beam (CPB) microscope, comprising:
isolating a first portion of a vacuum enclosure of the CPB microscope from a second portion of the vacuum enclosure of the CPB microscope with at least one valve, wherein a sample holder is situated in the second portion;
with the first portion of the vacuum enclosure of the CPB microscope isolated from the second portion, operating the CPB microscope in an alignment mode and determining a first beam deflection drive to a beam deflector to direct a CPB passing a reference location displaced from a primary axis; wherein the reference location is associated with a CPB detector and the first beam deflection drive directs at least a portion of the CPB onto the detector;
with the at least one valve, coupling the first portion of the vacuum enclosure to the second portion of the vacuum enclosure; and
with the first portion of the vacuum enclosure coupled to the second portion of the vacuum enclosure, operating the CPB microscope in a working mode and providing a second beam deflection drive to the beam deflector to propagate the CPB along the primary beam axis, the second beam deflection drive determined based on a first beam deflection drive value.

8. The method of claim 7 , wherein the second beam deflection drive is constant during the working mode.

9. The method of claim 7 , further comprising after operating the CPB microscope in the working mode, operating the CPB microscope in the alignment mode and updating the first beam deflection drive.

10. The method of claim 9 , further comprising determining a correction deflection based on a change in the first beam deflection drive; updating the second beam deflection drive based on the correction deflection; and providing the updated second beam deflection drive to the beam deflector when operating the CPB microscope during the working mode.

11. A charged-particle beam (CPB) microscope, comprising:
a source for generating a CPB;
a beam deflector for deflecting the CPB with respect to a primary axis;
a detector displaced from the primary axis for CPB alignment; and
a controller with a processor and computer readable instructions stored in a non-transitory memory, the controller is configured to:
providing a first beam deflection drive to the beam deflector to direct the CPB passing a reference location displaced from a primary axis, wherein the reference location is defined by the detector, wherein the first beam deflection drive directs at least a portion of the CPB onto the detector; and
applying a second beam deflection drive to the beam deflector to propagate the CPB along the primary beam axis and irradiate a sample, the second beam deflection drive determined based on a first beam deflection drive value.

12. The CPB microscope of claim 11 , wherein the controller is further configured to: determine the first beam deflection drive by scanning the CPB relative to the detector with the beam deflector.

13. The CPB microscope of claim 11 , wherein the detector is a Faraday cup.

14. The CPB microscope of claim 11 , further includes a sample holder, and a second beam deflector positioned downstream of the beam deflector for scanning the CPB propagated along the primary axis relative to the sample holder.

15. The CPB microscope of claim 11 , wherein the controller is further configured to: maintain the first beam deflection drive value provided to the beam deflector during a working mode; and provide an oscillating beam deflection drive to the beam deflector during a microscope alignment mode.

16. The CPB microscope of claim 11 , further comprising a second detector for detecting flux emitted from the sample responsive to the irradiation of the CPB.

17. The CPB microscope of claim 11 , wherein the second beam deflection drive is determined without a sample held by the sample holder.

18. The CPB microscope of claim 11 , further comprising an objective lens positioned downstream of the beam deflector to direct the CPB towards a sample.

19. The CPB microscope of claim 11 , further comprising a vacuum isolation valve that defines a first portion and a second portion of a vacuum enclosure, wherein the CPB source and the beam deflector are situated in the first portion and a sample holder is situated in the second portion.

Assignees

• Fei Co

Inventors

• Straka Branislav
• Smolka Radek
• Kral Lukas
• Skalicky Jan

Classifications

• H01J2237/31745

  for preparing specimen to be viewed in microscopes or analyzed in microanalysers · CPC title

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/147 Primary

  Arrangements for directing or deflecting the discharge along a desired path ({H01J37/045 take precedence;} lenses H01J37/10) · CPC title

• H01J37/06

  Electron sources; Electron guns · CPC title