Antireflective film, method of producing antireflective film, and eyeglass type display

Patent metadata

Field	Value
Publication number	US-10996378-B2
Application number	US-201816223252-A
Country	US
Kind code	B2
Filing date	Dec 18, 2018
Priority date	Dec 21, 2017
Publication date	May 4, 2021
Grant date	May 4, 2021

Abstract

The present invention is an antireflective film, including: a support base, and a pattern composed of a photoresist material formed on the support base, the index at a point closer to the support base. The present invention provides an antireflective film that is able to give antireflection effect to decrease the reflection of light, a method of producing the same, and an eyeglass type display.

First claim

The invention claimed is:

1. An antireflective film, comprising:
a support base, and
a pattern composed of a photoresist material formed on the support base, the pattern having a larger size and a larger refractive index at a point closer to the support base,
wherein the photoresist material contains an aromatic group-containing polymer compound and a fluorine-containing polymer compound, and the fluorine-containing polymer compound is segregated at the distant side from the support base.

2. The antireflective film according to claim 1 , wherein the pattern has a pitch of 400 nm or less.

3. The antireflective film according to claim 2 , wherein the aromatic group-containing polymer compound has a refractive index of 1.6 or more with respect to visible light having a wavelength of 590 to 610 nm, and the fluorine-containing polymer compound has a refractive index of 1.5 or less with respect to visible light having a wavelength of 590 to 610 nm.

4. The antireflective film according to claim 2 , wherein the photoresist material contains a polymer compound that contains 85% or more of a repeating unit having at least one structure selected from the group consisting of naphthalene, fluorene, anthracene, and cyclopentadienyl complexes.

5. The antireflective film according to claim 1 , wherein the aromatic group-containing polymer compound has a refractive index of 1.6 or more with respect to visible light having a wavelength of 590 to 610 nm, and the fluorine-containing polymer compound has a refractive index of 1.5 or less with respect to visible light having a wavelength of 590 to 610 nm.

6. The antireflective film according to claim 1 , wherein the photoresist material contains a polymer compound that contains 85% or more of a repeating unit having at least one structure selected from the group consisting of naphthalene, fluorene, anthracene, and cyclopentadienyl complexes.

7. The antireflective film according to claim 1 , wherein the photoresist material contains a polymer compound that contains 50% or more of a repeating unit having any of styrene substituted with iodine or bromine, benzene (meth)acrylate substituted with iodine or bromine, and benzene (meth)acrylamide substituted with iodine or bromine.

8. The antireflective film according to claim 1 , wherein the pattern is covered with a low-refractive-index material having a refractive index of 1.45 or less with respect to visible light having a wavelength of 590 to 610 nm.

9. The antireflective film according to claim 1 , wherein the transmittance of visible light having a wavelength of 400 to 800 nm is 80% or more.

10. An eyeglass type display, comprising:
a self-emitting display selected from the group consisting of liquid crystal, organic EL, and micro LED installed on a substrate at the side of an eyeball of the eyeglass type display, and
a convex lens for focusing installed on the side of an eyeball of the self-emitting display,
wherein the antireflective film according to claim 1 is formed on a surface of the convex lens.

11. A method of producing an antireflective film, comprising:
coating a support base with a photoresist material that contains an aromatic group-containing polymer compound and a fluorine-containing polymer compound,
baking the photoresist material to segregate the fluorine-containing polymer compound at a film surface, and subsequently
exposing and developing the photoresist material to form a pattern having a larger size and a larger refractive index at a point closer to the support base.

12. The method of producing an antireflective film according to claim 11 , wherein the pattern has a pitch of 400 nm or less.

13. The method of producing an antireflective film according to claim 11 , wherein the aromatic group-containing polymer compound has a refractive index of 1.6 or more with respect to visible light having a wavelength of 590 to 610 nm, and the fluorine-containing polymer compound has a refractive index of 1.5 or less with respect to visible light having a wavelength of 590 to 610 nm.

14. The method of producing an antireflective film according to claim 11 , wherein the photoresist material contains a polymer compound that contains 85% or more of a repeating unit having at least one structure selected from the group consisting of naphthalene, fluorene, anthracene, and cyclopentadienyl complexes.

15. The method of producing an antireflective film according to claim 11 , wherein the photoresist material contains a polymer compound that contains 50% or more of a repeating unit having any of styrene substituted with iodine or bromine, benzene (meth)acrylate substituted with iodine or bromine, and benzene (meth)acrylamide substituted with iodine or bromine.

16. The method of producing an antireflective film according to claim 11 , further comprising, after forming the pattern, covering the pattern with a low-refractive-index material having a refractive index of 1.45 or less with respect to visible light having a wavelength of 590 to 610 nm.

Assignees

• Shinetsu Chemical Co

Inventors

• Hatakeyama Jun

Classifications

• G02B27/0172

  characterised by optical features · CPC title

• G02B1/11 Primary

  Anti-reflection coatings · CPC title

• G03F7/0042

  with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists (G03F7/075 takes precedence) · CPC title

• G03F7/0005

  Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor · CPC title

• C03C2218/328

  Partly or completely removing a coating · CPC title