Probe card board, probe card, and inspection apparatus

Patent metadata

Field	Value
Publication number	US-10996241-B2
Application number	US-201716345965-A
Country	US
Kind code	B2
Filing date	Oct 30, 2017
Priority date	Oct 31, 2016
Publication date	May 4, 2021
Grant date	May 4, 2021

Abstract

A probe card board in the present disclosure includes a plurality of through holes designed to receive a probe brought into contact with a measurement object. The probe card board is composed of silicon nitride based ceramics. The probe card board includes a first surface opposed to the measurement object and a second surface located opposite to the first surface. The probe card board contains a plurality of crystal phases of metal silicide. Metal constituting the metal silicide is at least one kind selected from among molybdenum, chrome, iron, nickel, manganese, vanadium, niobium, tantalum, cobalt and tungsten.

First claim

The invention claimed is:

1. A probe card board, comprising:
a plurality of through holes designed to receive a probe brought into contact with a measurement object, wherein
the probe card board further comprises ceramics with a silicon nitride content, and
a first surface opposed to the measurement object and a second surface located opposite to the first surface; and
the probe card board contains a plurality of crystal phases of metal silicide, and
a metal constituting the metal silicide is at least one kind selected from among molybdenum, chrome, iron, nickel, manganese, vanadium, niobium, tantalum, cobalt and tungsten,
wherein a profile section height difference (Roc) between a loading length rate of 25% and a loading length rate of 75% in a roughness curve on the first surface is 0.4 μm to 0.8 μm.

2. The probe card board according to claim 1 , wherein a granular body composed of only metal constituting the metal silicide is not exposed onto the first surface.

3. The probe card board according to claim 1 , wherein the first surface contains melilite whose content is 5 mass % or less.

4. The probe card board according to claim 1 , wherein the first surface comprises void holes having a maximum length of 94 μm or less.

5. The probe card board according to claim 1 , wherein the silicon nitride based ceramics contains at least 50 mass % or more of silicon nitride relative to 100 mass % of all ingredients constituting ceramics.

6. The probe card board according to claim 1 , wherein kurtosis (Rku) of the first surface obtainable from a roughness curve is 2 to 16.

7. The probe card board according to claim 1 , wherein skewness (Rsk) of the first surface obtainable from a roughness curve is −0.9 to 0.8.

8. The probe card board according to claim 1 , wherein a crystal phase of the metal silicide is exposed onto a surface of the first surface.

9. A probe card, comprising:
the probe card board according to claim 1 ; and
the probe located at one of the plurality of through holes.

10. An inspection apparatus comprising the probe card according to claim 9 .

11. The probe card board according to claim 2 , wherein the first surface contains melilite whose content is 5 mass % or less.

12. The probe card board according to claim 11 , wherein the first surface comprises void holes having a maximum length of 94 μm or less.

13. The probe card board according to claim 12 , wherein the silicon nitride based ceramics contains at least 50 mass % or more of silicon nitride relative to 100 mass % of all ingredients constituting ceramics.

14. The probe card board according to claim 13 , wherein kurtosis (Rku) of the first surface obtainable from a roughness curve is 2 to 16 and skewness (Rsk) of the first surface obtainable from a roughness curve is −0.9 to 0.8.

15. The probe card board according to claim 2 , wherein the first surface comprises void holes having a maximum length of 94 μm or less.

16. The probe card board according to claim 15 , wherein the silicon nitride based ceramics contains at least 50 mass % or more of silicon nitride relative to 100 mass % of all ingredients constituting ceramics.

17. The probe card board according to claim 16 , wherein kurtosis (Rku) of the first surface obtainable from a roughness curve is 2 to 16 and skewness (Rsk) of the first surface obtainable from a roughness curve is −0.9 to 0.8.

18. The probe card board according to claim 2 , wherein the silicon nitride based ceramics contains at least 50 mass % or more of silicon nitride relative to 100 mass % of all ingredients constituting ceramics.

19. The probe card board according to claim 18 , wherein kurtosis (Rku) of the first surface obtainable from a roughness curve is 2 to 16 and skewness (Rsk) of the first surface obtainable from a roughness curve is −0.9 to 0.8.

Assignees

• Kyocera Corp

Inventors

• Imai Tomohiro

Classifications

• C04B2235/3272

  Iron oxides or oxide forming salts thereof, e.g. hematite, magnetite · CPC title

• G01R1/07314 Primary

  the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support (on an elastic support, e.g. a film, G01R1/0735) · CPC title

• C04B35/591 Primary

  obtained by reaction sintering · CPC title

• C04B35/62655

  Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying · CPC title

• G01R1/07371

  using an intermediate card or back card with apertures through which the probes pass · CPC title