Spiral gas adsorption apparatus and method of using the same

Patent metadata

Field	Value
Publication number	US-10994239-B2
Application number	US-201815915252-A
Country	US
Kind code	B2
Filing date	Mar 8, 2018
Priority date	Mar 8, 2018
Publication date	May 4, 2021
Grant date	May 4, 2021

Abstract

A gas scrubber includes a canister having a rotatable spiral separator which provides a non-linear path configured to be filled with modular adsorbent material portions between a gas inlet and a gas outlet.

First claim

What is claimed is:

1. A method of scrubbing halogen gas from an etching or deposition chamber comprising passing a halogen containing exhaust gas from the etching or deposition chamber through a canister containing a plurality of modular sorbent material portions each shaped in a block and at least one partition comprising a series of interdigitated walls between the respective modular sorbent material portions, such that the at least one partition in the canister forces the halogen containing exhaust gas through the sorbent material in at least two directions.

2. The method of claim 1 , wherein:
the plurality of modular adsorbent material portions comprise activated carbon, calcium hydroxide, calcium carbonate, calcium oxide, calcium aluminate, aluminium hydroxide, aluminium oxide, nickel oxide, nickel carbonate, nickel hydroxide, boehmite, diatomaceous earth, attapulgite or mixtures thereof; and
the modular adsorbent material portions are selected to adsorb a halogen containing gas which comprises SiF 4 , SiCl 4 , CF 4 , Cl 2 , Bra, HBr, HI, HCl, NF 3 , SiH 2 Cl 2 , CH 3 CCl 3 or mixtures thereof.

3. The method of claim 1 , wherein the series of interdigitated walls comprises a series of vertically oriented walls.

4. The method of claim 1 , wherein the series of interdigitated walls comprises a series of horizontally oriented walls.

5. A method of scrubbing halogen gas from an etching or deposition chamber comprising passing a halogen containing exhaust gas from the etching or deposition chamber through a canister containing at least one modular sorbent material portion shaped in a block and at least one partition comprising a series of interdigitated walls, such that the at least one partition in the canister forces the halogen containing exhaust gas through the sorbent material in at least two directions, wherein the series of interdigitated walls comprises at least three horizontally oriented walls which are provided only in a top portion of the canister.

6. The method of claim 5 , wherein:
the at least one modular adsorbent material portion comprise activated carbon, calcium hydroxide, calcium carbonate, calcium oxide, calcium aluminate, aluminium hydroxide, aluminium oxide, nickel oxide, nickel carbonate, nickel hydroxide, boehmite, diatomaceous earth, attapulgite or mixtures thereof; and
the modular adsorbent material portions are selected to adsorb a halogen containing gas which comprises SiF 4 , SiCl 4 , CF 4 , Cl 2 , Bra, HBr, HI, HCl, NF 3 , SiH 2 Cl 2 , CH 3 CCl 3 or mixtures thereof.

Assignees

• Sandisk Technologies Llc

Inventors

• Sano Michiaki
• Sato Jo

Classifications

• B01J20/06 Primary

  comprising oxides or hydroxides of metals not provided for in group B01J20/04 · CPC title

• B01D53/0407

  Constructional details of adsorbing systems · CPC title

• B01J20/08

  comprising aluminium oxide or hydroxide; comprising bauxite · CPC title

• B01J20/12

  Naturally occurring clays or bleaching earth · CPC title

• B01J20/20

  comprising free carbon; comprising carbon obtained by carbonising processes · CPC title