Electrically isolating vertical-emitting devices

Patent metadata

Field	Value
Publication number	US-10992109-B2
Application number	US-201916517405-A
Country	US
Kind code	B2
Filing date	Jul 19, 2019
Priority date	Apr 1, 2019
Publication date	Apr 27, 2021
Grant date	Apr 27, 2021

Abstract

A device includes a substrate, a first vertical cavity surface emitting laser (VCSEL) array on the substrate, a second VCSEL array on the substrate and adjacent to the first VCSEL array, and an isolation structure between the first VCSEL array and the second VCSEL array. The isolation structure provides electrical isolation between the first VCSEL array and the second VCSEL array.

First claim

What is claimed is:

1. A device, comprising:
a substrate;
a first vertical cavity surface emitting laser (VCSEL) array on the substrate;
a second VCSEL array on the substrate and adjacent to the first VCSEL array;
an isolation structure between the first VCSEL array and the second VCSEL array,
wherein the isolation structure provides electrical isolation between the first VCSEL array and the second VCSEL array; and

a backside via, etched from a bottom side of the substrate, to electrically connect a cathode of a first VCSEL included in the first VCSEL array with an anode of a second VCSEL included in the second VCSEL array,
wherein the cathode of the first VCSEL is on the bottom side of the substrate, and
wherein the anode of the second VCSEL is on a top side of the substrate.

2. The device of claim 1 , wherein the isolation structure comprises:
a trench that is at least partially filled with a non-conductive material.

3. The device of claim 2 , wherein the trench encircles the first VCSEL array.

4. The device of claim 2 , wherein the trench extends from a common first edge of the first VCSEL array and the second VCSEL array to a second common edge of the first VCSEL array and the second VCSEL array.

5. The device of claim 2 , wherein the trench includes a mechanical support structure to provide mechanical support to the first VCSEL array.

6. The device of claim 1 , wherein the isolation structure is etched from the bottom side of the substrate or from the top side of the substrate.

7. A device, comprising:
a substrate;
a plurality of vertical cavity surface emitting lasers (VCSELs) on the substrate;
a backside via, etched from a bottom side of the substrate, to electrically connect a cathode of a first VCSEL, of the plurality of VCSELs, with an anode of a second VCSEL of the plurality of VCSELs,
wherein the cathode of the first VCSEL is on the bottom side of the substrate, and
wherein the anode of the second VCSEL is on a top side of the substrate; and

an isolation structure,
wherein the isolation structure provides electrical isolation for the first VCSEL.

8. The device of claim 7 , wherein the isolation structure comprises a trench.

9. The device of claim 8 , wherein the backside via is included in a via array associated with the plurality of VCSELs; and
wherein the trench encircles the via array.

10. The device of claim 8 , wherein the trench extends from a first edge of the device to a second edge of the device.

11. The device of claim 10 , wherein the electrical isolation is completed when the device is separated from a wafer.

12. The device of claim 8 , wherein the trench is at least partially filled with a non-conductive material; and
wherein the non-conductive material comprises a polymer.

13. The device of claim 8 , wherein the trench is etched from the bottom side of the substrate or from the top side of the substrate.

14. A device, comprising:
a substrate;
a first vertical cavity surface emitting laser (VCSEL) array on the substrate;
a second VCSEL array on the substrate and adjacent to the first VCSEL array;
a backside via, etched from a bottom side of the substrate, to electrically connect a cathode of a first VCSEL of the first VCSEL array to an anode of a second VCSEL of the second VCSEL array,
wherein the cathode of the first VCSEL is on the bottom side of the substrate, and
wherein the anode of the second VCSEL is on a top side of the substrate; and

an isolation structure between the first VCSEL array and the second VCSEL array,
wherein the isolation structure provides electrical isolation between the first VCSEL and the second VCSEL.

15. The device of claim 14 , wherein the isolation structure comprises:
a trench that is at least partially filled with at least one of:
polyamide, or
a benzocyclobutene polymer.

16. The device of claim 14 ,
wherein the anode of the second VCSEL is above one or more epitaxial layers on the substrate.

17. The device of claim 14 , wherein the isolation structure comprises:
a trench that is at least partially filled with a non-conductive material,
wherein the trench encircles the first VCSEL array, and
wherein the trench is etched from the bottom side of the substrate or the top side of the substrate.

18. The device of claim 17 , wherein the trench includes a plurality of mechanical support structures to provide mechanical support to the first VCSEL array,
wherein each mechanical support structure, of the plurality of mechanical support structures, is located on a respective side of the first VCSEL array.

19. The device of claim 2 , wherein the backside via is included in a via array associated with the first VCSEL array; and
wherein the trench encircles the via array.

20. The device of claim 8 , wherein the trench provides the electrical isolation between the first VCSEL and the second VCSEL, and
wherein the trench is etched from the bottom side of the substrate or the top side of the substrate.

Assignees

• Lumentum Operations Llc

Inventors

• Yuen Albert

Classifications

• H01S5/18308

  having a special structure for lateral current or light confinement · CPC title

• H01S5/18311

  using selective oxidation · CPC title

• H01S5/2063

  obtained by particle bombardment · CPC title

• H01S5/183 Primary

  having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] · CPC title

• H01S5/18394

  Apertures, e.g. defined by the shape of the upper electrode · CPC title