Micromechanical component and method for producing a micromechanical component

Patent metadata

Field	Value
Publication number	US-10989913-B2
Application number	US-201716337014-A
Country	US
Kind code	B2
Filing date	Sep 25, 2017
Priority date	Oct 19, 2016
Publication date	Apr 27, 2021
Grant date	Apr 27, 2021

Abstract

A micromechanical component having a mounting support, at least one coil winding held by at least one coil brace and comprising conductor tracks made from at least one electrically conductive material, at least one first subsection of the at least one coil winding being anchored on the associated coil brace, and an adjustable part, the at least one coil brace and the adjustable part being connected to each other and via at least one spring element to the mounting support in such a way that the adjustable part is adjustable about at least one axis of rotation in relation to the mounting support, and, while the at least one first subsection of the at least one coil winding is anchored on the associated coil brace, at least one second subsection of the same coil winding spans at least one gap formed in the associated coil brace as a cantilever subsection.

First claim

What is claimed is:

1. A micromechanical component, comprising:
a mounting support;
at least one coil winding held by at least one coil brace, the at least one coil winding including conductor tracks made of at least one electrically conductive material, at least one first subsection of the at least one coil winding being anchored on the at least one coil brace; and
an adjustable part, the at least one coil brace and the adjustable part being connected to one another and via at least one spring element to the mounting support in such a way that the adjustable part is adjustable in relation to the mounting support about at least one axis of rotation;
wherein, while the at least one first subsection of the at least one coil winding is anchored on the associated coil brace, at least one second subsection of the same coil winding spans as cantilever subsection at least one gap formed in the at least one coil brace.

2. The micromechanical component as recited in claim 1 , wherein the at least one cantilever subsection of the at least one coil winding includes at least one coil winding subsection, in which conductor track subsections of conductor tracks have a maximum distance from axis of rotation in comparison to additional conductor track subsections of the same coil winding.

3. The micromechanical component as recited in claim 1 , wherein the conductor tracks of the at least one coil winding running perpendicularly across at least one edge, which is formed between at least one brace surface of the at least one coil brace, which is fitted with the at least one first subsection of the at least one coil winding, and an outer surface of the same coil brace bounding a respective adjacent gap of the coil brace.

4. The micromechanical component as recited in claim 1 , wherein interstitial volumes between two neighboring conductor tracks of the same coil winding are filled with at least one electrically insulating material.

5. The micromechanical component as recited in claim 1 , wherein on a side of the at least one coil winding facing the at least one coil brace an electrically insulating buffer layer is developed at least between the at least one first subsection of the at least one coil winding and the at least one coil brace.

6. The micromechanical component as recited in claim 5 , wherein at least one cantilever subsection of the electrically insulating buffer layer also spans the at least one gap on the at least one cantilever subsection of the at least one coil winding.

7. The micromechanical component as recited in claim 1 , wherein the at least one coil brace includes at least one first brace bar extending along or parallel to the axis of rotation and a second brace bar extending along or parallel to the axis of rotation, the adjustable part or an anchoring area of the adjustable part being situated between the first brace bar and the second brace bar.

8. The micromechanical component as recited in claim 7 , wherein the coil winding of the micromechanical component is anchored exclusively on the first brace bar and the second brace bar.

9. The micromechanical component as recited in claim 7 , wherein the micromechanical component has exactly two coil windings, and a first coil winding of the two coil windings is anchored exclusively on the first brace bar and a second coil winding of the two coil windings is anchored exclusively on the second brace bar.

10. The micromechanical component as recited in claim 7 , wherein the at least one coil brace also includes at least one crossbar extending perpendicularly to the axis of rotation.

11. The micromechanical component as recited in claim 10 , wherein the coil winding of the micromechanical component is anchored exclusively on the first brace bar, the second brace bar and the at least one crossbar.

12. The micromechanical component as recited in claim 10 , wherein the micromechanical component has exactly two coil windings, and a first coil winding of the two coil windings is anchored exclusively on the first brace bar and the at least one situated crossbar, and a second coil winding of the two coil windings is anchored exclusively on the second brace bar and the at least one crossbar.

13. The micromechanical component as recited in claim 7 , wherein the micromechanical component has exactly two coil windings, in each case a first support bar is situated on respectively a first end of the first and second brace bars and in each case a second support bar is situated respectively on a second end of the first and second brace bars, and a first coil winding of the two coil windings is anchored exclusively on the first brace bar, the situated first support bar and the situated second support bar and a second coil winding of the two coil windings is anchored exclusively on the second brace bar, the situated first support bar and the situated second support bar.

14. The micromechanical component as recited in claim 1 , wherein the micromechanical component is a micromirror having an adjustable mirror disk as the adjustable part.

15. A method for producing a micromechanical component, comprising:
disposing at least one coil winding held by at least one coil brace and including conductor tracks made of at least one electrically conductive material and at least one adjustable part on a mounting support, at least one first subsection of the at least one coil winding being anchored on the coil brace, and the coil brace and the adjustable part being connected to each other and via at least one spring element to the mounting support in such a way that the adjustable part is attached to the mounting support so as to be adjustable about at least one axis of rotation in relation to the mounting support;
wherein while the at least one first subsection of the at least one coil winding is anchored on the coil brace, at least one gap formed in the associated coil brace is spanned by at least one second subsection of the coil winding as a cantilever subsection.

Assignees

• Bosch Gmbh Robert

Inventors

• Finn Andreas
• Njimonzie Frederic Njikam
• Grutzeck Helmut
• Muchow Joerg
• Straub Rainer

Classifications

• B81B3/0045 Primary

  Improve properties related to angular swinging, e.g. control resonance frequency · CPC title

• B81B2203/0118

  Cantilevers · CPC title

• G02B26/085 Primary

  the reflecting means being moved or deformed by electromagnetic means · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• B81B2203/0307

  Anchors · CPC title