Protection layers for polymer modulators/waveguides

Patent metadata

Field	Value
Publication number	US-10989871-B2
Application number	US-201916690491-A
Country	US
Kind code	B2
Filing date	Nov 21, 2019
Priority date	Dec 28, 2017
Publication date	Apr 27, 2021
Grant date	Apr 27, 2021

Abstract

A polymer waveguide/modulator including a lower cladding layer, a polymer core, an upper cladding layer, a first protection/barrier layer sandwiched between the lower cladding layer and the core, and a second protection/barrier layer sandwiched between the core and the upper cladding layer. The protection/barrier layers designed to protect the cladding layers and the core from solvents and gases and to prevent current leakage between the cladding layers and the core. The first protection/barrier layer is optically transparent and designed with a refractive index less than, greater than, or the same as the refractive index of the core and approximately equal to the refractive index of the lower cladding layer. The second protection/barrier layer is optically transparent and designed with a refractive index less than, greater than, or the same as the refractive index of the core and approximately equal to the refractive index of the upper cladding layer.

First claim

Having fully described the invention in such clear and concise terms as to enable those skilled in the art to understand and practice the same, the invention claimed is:

1. A method of fabricating a polymer waveguide/modulator comprising the steps of:
providing a platform;
depositing a lower cladding layer having a refractive index on the platform;
depositing a first protection/barrier layer on the lower cladding layer using a deposition technique including one of PVD, CVD, evaporation, sputtering, or MOCVD/MBE, the first protection/barrier layer including one of metal material, dielectric material or semiconductor based material;
depositing a polymer core on the first protection/barrier layer, the polymer core having a refractive index, the first protection/barrier layer being designed to protect the lower cladding layer and the core from solvents and gases and to prevent current leakage between the lower cladding layer and the core, and the first protection/barrier layer being optically transparent to light wavelengths in a range of 0.8 μm to 2 μm and designed with a refractive index less than, greater than, or the same as the refractive index of the core;
depositing a second protection/barrier layer on the polymer core using a deposition technique including one of PVD, CVD, evaporation, sputtering, or MOCVD/MBE, and the second protection/barrier layer being optically transparent to light wavelengths in a range of 0.8 μm to 2 μm and designed with a refractive index less than, greater than, or the same as the refractive index of the core, the second protection/barrier layer including one of metal material, dielectric material or semiconductor based material; and
depositing an upper cladding layer having a refractive index on the second protection/barrier layer, the second protection/barrier layer being designed to protect the upper cladding layer and the core from solvents and gases and to prevent current leakage between the upper cladding layer and the core, and the refractive index of the upper cladding layer being approximately equal to the refractive index of the second protection/barrier layer.

2. The method as claimed in claim 1 wherein the lower cladding layer includes one of polymer material, dielectric material or semiconductor based material.

3. The method as claimed in claim 1 wherein the upper cladding layer includes one of polymer material, dielectric material and/or semiconductor based material.

4. The method as claimed in claim 1 wherein the first and second protection/barrier layers each have a thickness in a range of 50 Å to 50,000 Å.

5. The method as claimed in claim 1 wherein the first protection/barrier layer reduces current leakage between the lower cladding layer and the core to less than 1 nA and the second protection/barrier layer reduces current leakage between the upper cladding layer and the core to less than 1 nA.

6. The method as claimed in claim 1 wherein the polymer core includes ultem polymer material with a refractive index in a range of 1.65 to 1.75 and the lower and upper cladding layers each have a refractive index in a range of +/−0.07 to 0.01 the refractive index of the ultem polymer material.

7. The method as claimed in claim 1 wherein the polymer core includes ultem polymer material with a refractive index of 1.7 and the lower and upper cladding layers each have a refractive index of 1.68 and the first and second protection/barrier layers each have a refractive index of 1.7+/−0.02.

8. The method as claimed in claim 1 wherein the steps of depositing the first and the second protection/barrier layers each include depositing multiple sub-layers.

9. The method as claimed in claim 1 wherein the polymer core includes ultem polymer material with a refractive index of 1.7 and the first and second protection/barrier layers each include two sub-layers, with a sub-layer adjacent the core having a 1.69 refractive index and a sub-layer adjacent the lower cladding layer and the upper cladding layer, respectively, having a 1.68 refractive index.

10. The method as claimed in claim 1 wherein the first and second protection/barrier layers each include multiple pairs of sub-layers, each pair of sub-layers including a first sub-layer positioned closest to the core having a refractive index higher than a refractive index of a second sub-layer positioned farther from the core.

11. The method as claimed in claim 1 wherein the lower cladding layer and the upper cladding layer both include polymer material and the lower cladding layer, the core, and the upper cladding layer are all deposited in liquid form.

Assignees

• Lightwave Logic Inc

Inventors

• Becker Richard
• Lebby Michael
• Yi Youngwoo

Classifications

• G02B2006/12121

  Laser · CPC title

• G02B2006/12176

  Etching · CPC title

• G02B6/132

  by deposition of thin films · CPC title

• G02B6/1228

  Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305) · CPC title

• G02B2006/12097

  Ridge, rib or the like · CPC title