Time-resolved photoemission electron microscopy and method for imaging carrier dynamics using the technique

Patent metadata

Field	Value
Publication number	US-10989679-B2
Application number	US-201816489522-A
Country	US
Kind code	B2
Filing date	Feb 9, 2018
Priority date	Feb 28, 2017
Publication date	Apr 27, 2021
Grant date	Apr 27, 2021

Abstract

A time-resolved photoemission electron microscopy including: a laser light source that outputs a pulse having less than or equal to a femtosecond level pulse width and variable repetition frequency; a pump light pulse generator configured to generate pump light pulse that excites photo-carriers of a sample by converting wavelength of light output from the laser light source; and a probe light pulse generator configured to generate probe light pulse that photo-emits photo-carriers excited by the pump light pulse from the sample by photoelectric effect by converting wavelength of light output from the laser light source. The energy of at least one of the pump light pulse and the probe light pulse is configured to continuously vary in a range not less than 0.1 eV and not more than 8 eV.

First claim

The invention claimed is:

1. A time-resolved photoemission electron microscopy comprising:
a laser light source that outputs a pulse having less than or equal to a femtosecond level pulse width and variable repetition frequency;
a pump light pulse generator configured to generate pump light pulse that excites photo-carriers of a sample by converting wavelength of light output from the laser light source; and
a probe light pulse generator configured to generate probe light pulse that photo-emits photo-carriers excited by the pump light pulse from the sample by photoelectric effect by converting wavelength of light output from the laser light source, wherein
energy of at least one of the pump light pulse and the probe light pulse is configured to continuously vary in a range not less than 0.1 eV and not more than 8 eV.

2. The time-resolved photoemission electron microscopy according to claim 1 , wherein the probe light pulse generator is configured to continuously vary energy of the probe light pulse.

3. The time-resolved photoemission electron microscopy according to claim 2 , wherein the probe light pulse generator has an optical parametric amplifier that converts wavelength of light output from the laser light source.

4. The time-resolved photoemission electron microscopy according to claim 2 , wherein the probe light pulse generator further has a high-order harmonic generation device that generates the probe light pulse from light whose wavelength is converted by an optical parametric amplifier.

5. The time-resolved photoemission electron microscopy according to claim 2 , wherein a range in which the probe light pulse generator is configured to vary energy is within ±3 eV with respect to an electron affinity, ionization energy, or work function of an observation-target sample.

6. The time-resolved photoemission electron microscopy according to claim 2 , further comprising:
a focus lens stage that keeps constant a focus position and a size of the probe light.

7. The time-resolved photoemission electron microscopy according to claim 6 , wherein the condensing lens stage has a focus lens and a drive element that moves a position of the focus lens.

8. The time-resolved photoemission electron microscopy according to claim 1 , wherein the pump light pulse generator is configured to continuously vary energy of the pump light pulse.

9. The time-resolved photoemission electron microscopy according to claim 2 , wherein the laser light source has a first laser light source that outputs light to the pump light pulse generator, a second laser light source that outputs light to the probe light pulse generator, and a timing control device that controls timing at which the first laser light source and the second laser light source output light.

10. A method of acquiring a photo-excited carrier dynamics image by using a time-resolved photoemission electron microscopy that observes photo-carriers emitted from a sample by irradiating the sample with pump light pulse to excite the photo-carriers of the sample and irradiating the sample with probe light pulse to photo-emit the photo-carriers excited by the pump light pulse from the sample by photoelectric effect, comprising steps of:
varying continuously energy of the probe light pulse in a range within ±3 eV with respect to an electron affinity or work function of the sample;
measuring photoelectron emission intensity;
finding the work function of a target area of the sample from a variation over time in the photoelectron emission intensity;
determining a value in accordance with the found work function as the energy of the probe light; and
acquiring the carrier dynamics image by the determined probe light energy.

11. A method of acquiring a photo-excited carrier dynamics image by using a time-resolved photoemission electron microscopy that observes photo-carriers emitted from a sample by irradiating the sample with pump light to excite the photo-carriers of the sample and irradiating the sample with probe light to photo-emit the photo-carriers excited by the pump light from the sample by photoelectric effect, comprising step of:
varying continuously energy of the probe light in a range within ±3 eV with respect to an electron affinity or work function of the sample; and
measuring photoelectron emission intensity.

Assignees

• Tokyo Inst Tech
• Inter Univ Research Institute Corporation High Energy Accelerator Research Organization

Inventors

• Koshihara Shinya
• Fukumoto Keiki

Classifications

• G01N23/227 Primary

  Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM] · CPC title

• H01J37/285

  Emission microscopes, e.g. field-emission microscopes · CPC title

• H01S3/0092

  Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity (nonlinear frequency conversion per se G02F1/35) · CPC title

• H01J2237/2855

  Photo-emission · CPC title

• G02F1/353

  Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams · CPC title