Calibration method and non-transitory computer-readable storage medium storing a program of calibration

Patent metadata

Field	Value
Publication number	US-10987776-B2
Application number	US-201815989662-A
Country	US
Kind code	B2
Filing date	May 25, 2018
Priority date	May 30, 2017
Publication date	Apr 27, 2021
Grant date	Apr 27, 2021

Abstract

A method, which can accurately determine in a short time a relationship between a load of a dresser and a pressure of a gas supplied to an air cylinder, is disclosed. The method includes determining a first contact point where a load measurement device is brought into contact with a polishing table, calculating a relational expression composed to a quadratic function showing a relationship between a measured load and a measured pressure, determining a second contact point where the dresser is brought into contact with a polishing surface of a polishing pad, calculating an amount of correction from the pressure of the gas at the first contact point and the pressure of the gas at the second contact point, and correcting the relational expression based on the calculated amount of correction.

First claim

What is claimed is:

1. A method of determining a relationship between a load of a dresser applied by an air cylinder and a pressure of a gas supplied to the air cylinder, comprising:
lowering a load measurement device attached to a vertically-movable dresser drive shaft by the air cylinder when a polishing pad is not attached to a polishing table to bring the load measurement device into contact with the polishing table;
determining a first contact point where the load measurement device is brought into contact with the polishing table based on a relationship between a lowering distance of the load measurement device from a predetermined position and the pressure of the gas supplied to the air cylinder when lowering the load measurement device;
pressing the load measurement device at the first contact point against the polishing table, and measuring a load acting on the load measurement device and the pressure of the gas while changing the load acting on the load measurement device within a predetermined load range;
calculating a relational expression composed of a quadratic function showing a relationship between the measured load and the measured pressure; then
determining a second contact point where the dresser is brought into contact with a polishing surface of the polishing pad after attaching the dresser to the dresser drive shaft instead of the load measurement device and attaching the polishing pad to an upper surface of the polishing table;
pressing the dresser at the second contact point against the polishing pad, and measuring the pressure of the gas supplied to the air cylinder while pressing the dresser at the second contact point;
calculating an amount of correction, wherein the calculated amount of correction is determined from the pressure of the gas at the first contact point and the pressure of the gas at the second contact point; and
correcting the relational expression based on the calculated amount of correction.

2. The method according to claim 1 , wherein the determining the first contact point comprises:
measuring the lowering distance of the load measurement device from the predetermined position a plurality of times, while changing the pressure of the gas supplied to the air cylinder;
dividing a plurality of data points on a coordinate system specified from a measured lowering distance of the load measurement device and the corresponding pressure of the gas corresponding to the lowering distance into a non-contact-side group including a data point immediately after starting of the measurement and a contact-side group including a data point immediately before terminating of the measurement;
performing a regression analysis on the plural data points belonging to the non-contact-side group to determine a first regression line represented by a linear function;
performing the regression analysis on the plural data points belonging to the contact-side group to determine a second regression line represented by a linear function; and
finding an intersection point of the first regression line with the second regression line to determine the intersection point as the first contact point.

3. The method according to claim 1 , wherein the calculating the relational expression comprises performing a regression analysis on a plurality of data points on a coordinate system specified from the measured load and the measured pressure at the first contact point to calculate a regression expression represented by the quadratic function, and determining the regression expression as the relational expression.

4. The method according to claim 1 , wherein the correcting the relational expression comprises:
adding the calculated amount of correction to the measured pressure to determine a second pressure;
measuring the second pressure and a second load acting on the dresser when the gas having the second pressure is supplied to the air cylinder;
performing a regression analysis on a plurality of data points on a coordinate system specified from the second pressure and the measured second load corresponding to the second pressure to calculate a new relational expression composed of a second quadratic function; and
correcting the relational expression into the new relational expression.

5. A non-transitory computer-readable storage medium storing a program of determining a relationship between a load of a dresser applied by an air cylinder and a pressure of a gas supplied to the air cylinder, the program for causing a computer to perform steps comprising:
performing an operation of lowering a load measurement device attached to a vertically-movable dresser drive shaft by the air cylinder when a polishing pad is not attached to a polishing table to bring the load measurement device into contact with the polishing table;
determining a first contact point where the load measurement device is brought into contact with the polishing table based on a relationship between a lowering distance of the load measurement device from a predetermined position and the pressure of the gas supplied to the air cylinder when lowering the load measurement device;
calculating a relational expression composed of a quadratic function showing a relationship between a measured load and a measured pressure based on the measured load acting on the load measurement device and the pressure of the gas, while changing the load acting on the load measurement device within a predetermined load range by pressing the load measurement device at the first contact point against the polishing table;
determining a second contact point where the dresser attached to the dresser drive shaft instead of the load measurement device is brought into contact with a polishing surface of the polishing pad attached to an upper surface of the polishing table;
pressing the dresser at the second contact point against the polishing pad, and measuring the pressure of the gas supplied to the air cylinder while pressing the dresser at the second contact point;
calculating an amount of correction, wherein the amount of calculated correction is determined from the pressure of the gas at the first contact point and the pressure of the gas at the second contact point; and
correcting the relational expression based on the calculated amount of correction.

6. The storage medium according to claim 5 , wherein the determining the first contact point comprises:
dividing a plurality of data points on a coordinate system specified from a lowering distance of the load measurement device from the predetermined position measured a plurality of times and the corresponding pressure of the gas corresponding to the lowering distance into a non-contact-side group including a data point immediately after starting of the measurement and a contact-side group including a data point immediately before terminating of the measurement;
performing a regression analysis on the plural data points belonging to the non-contact-side group to determine a first regression line represented by a linear function;
performing the regression analysis on the plural data points belonging to the contact-side group to determine a second regression line represented by the linear function; and
finding an intersection point of the first regression line with the second regression line to determine the intersection point as the first contact point.

7. The storage medium according to claim 5 , wherein the calculating the relational expression comprises performing a regression analysis on a plurality of data points on a coordinate system specified from the measured load and the measured pressure at the first contact point to calculate a regression expression represented by the quadratic function, and determining the regression expression to the relational expressi

Assignees

• Ebara Corp

Inventors

• Chen Pohan
• Sone Tadakazu
• Suzuki Kenichi
• Sotozaki Hiroshi

Classifications

• B24B53/017

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B49/18 Primary

  taking regard of the presence of dressing tools · CPC title

• B24B49/16 Primary

  taking regard of the load · CPC title

• B24B37/005 Primary

  Control means for lapping machines or devices · CPC title

• B24B37/04

  designed for working plane surfaces · CPC title