Airborne molecular contamination filter cartridge system with combustible filter cartridge and reusable frame

Patent metadata

Field	Value
Publication number	US-10987612-B2
Application number	US-201716097037-A
Country	US
Kind code	B2
Filing date	Apr 28, 2017
Priority date	Apr 28, 2016
Publication date	Apr 27, 2021
Grant date	Apr 27, 2021

Abstract

Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.

First claim

What is claimed is:

1. A filter cartridge system for control of airborne molecular contamination, the filter cartridge system comprising:
a filter cartridge comprising a non-woven fiber and at least one adsorbent, the filter cartridge comprising substantially combustible materials, wherein the filter cartridge comprises a filter pleat pack potted at opposite ends in a single-component hot melt material and at least one plastic pleat separator embedded in the hot melt material; and
a reusable case for the filter cartridge, the filter cartridge being readily separable from the reusable case for disposal.

2. The filter cartridge system of claim 1 , wherein the filter cartridge comprises only combustible materials.

3. The filter cartridge system of claim 1 , wherein the filter pleat pack comprises the non-woven fiber, the filter pleat pack having an edge seal along pleat edges of the filter pleat pack.

4. The filter cartridge system of claim 1 , wherein the filter pleat pack has a four-sided seal formed by solidification of the single-component hot melt material.

5. The filter cartridge system of claim 1 , wherein the filter cartridge comprises a mixed adsorbent media.

6. The filter cartridge system of claim 1 , wherein the plastic pleat separator comprises a grip feature, and wherein the grip feature is embedded in the hot melt material.

7. The filter cartridge system of claim 1 , wherein the filter cartridge further comprises a plastic side panel.

8. The filter cartridge system of claim 1 , wherein the filter cartridge further comprises at least one of a carbon filter medium and an ion exchange filter medium.

9. The filter cartridge system of claim 1 , wherein the case is metal and optionally comprises an anodized aluminum case.

10. The filter cartridge system of claim 1 , wherein the filter cartridge system comprises a particle discharge according to the International Organization for Standardization (ISO) 14644-1 Cleanroom Standards of one of Class 5, Class 4, Class 3, Class 2 or Class 1.

11. The filter cartridge system of claim 1 , wherein the filter cartridge system reduces total airborne molecular contaminant concentrations from about 10 to about 50 ppb upstream of the filter cartridge system to less than about 1 ppb to about 5 ppb downstream of the filter cartridge system.

12. The filter cartridge system of claim 1 , wherein the filter cartridge system achieves a removal efficiency of at least about 90% or greater at inlet contaminant concentrations of up to about 50 ppb.

Assignees

• Entegris Inc

Inventors

• Leblanc Tom
• Wildgoose Joe
• Venet Marc
• Warniers Evan
• Gaudreau John

Classifications

• B01D46/645

  Protecting screens at filter inlet or outlet · CPC title

• B01D46/52

  Particle separators, e.g. dust precipitators, using filters embodying folded {corrugated or wound sheet} material · CPC title

• B01D46/0036 Primary

  by adsorption or absorption · CPC title

• B01D2279/51

  in clean rooms, e.g. production facilities for electronic devices, laboratories · CPC title

• B01D27/08

  Construction of the casing · CPC title