Integrated lithium deposition with protective layer tool

Patent metadata

Field	Value
Publication number	US-10978699-B2
Application number	US-201716067075-A
Country	US
Kind code	B2
Filing date	Jan 16, 2017
Priority date	Jan 28, 2016
Publication date	Apr 13, 2021
Grant date	Apr 13, 2021

Abstract

In one implementation, an integrated processing tool for the deposition and processing of lithium metal in energy storage devices. The integrated processing tool may be a web tool. The integrated processing tool may comprises a reel-to-reel system for transporting a continuous sheet of material through the following chambers: a chamber for depositing a thin film of lithium metal on the continuous sheet of material and a chamber for depositing a protective film on the surface of the thin film of lithium metal. The chamber for depositing a thin film of lithium metal may include a PVD system, such as an electron-beam evaporator, a thin film transfer system, or a slot-die deposition system. The chamber for depositing a protective film on the lithium metal film may include a chamber for depositing an interleaf film or a chamber for depositing a lithium-ion conducting polymer on the lithium metal film.

First claim

The invention claimed is:

1. A negative electrode, comprising:
a current collector comprising copper;
a silicon graphite anode formed on the current collector;
a film of lithium metal formed on the silicon graphite anode;
an interface film formed on the film of lithium metal, wherein the interface film is selected from the group consisting of ZrO 2 , Li 2 ZrO 3 , or a mixture thereof; and
a protective film formed on the interface film, wherein the protective film is a lithium-ion conducting material or an interleaf film.

2. The negative electrode of claim 1 , wherein the interface film has a thickness from about 0.1 microns to about 5 microns.

3. The negative electrode of claim 2 , wherein the interface film is ZrO 2 .

4. The negative electrode of claim 1 , wherein the film of lithium metal has a thickness from about 1 to about 20 microns thick.

5. The negative electrode of claim 1 , wherein the protective film is the lithium-ion conducting material and the lithium-ion conducting material is selected from the group consisting of: LiPON, crystalline or amorphous phases of garnet-type Li 7 La 3 Zr 2 O 12 , Li 2+2x Zn 1-x GeO 4 wherein 0<x<1, Na 1+x Zr 2 Si x P 3-x O 12 wherein 0<x<3, lithium borohydride (LiBH 4 ), doped anti-perovskite compositions, and LiPS 5 X wherein x is Cl, Br or I.

6. The negative electrode of claim 1 , wherein the protective film is the interleaf film and the interleaf film is selected from the group consisting of: polyethylene, polypropylene, poly(ethylene terephthalate), poly(butylene terephthalate), polyester, polyamide, polyaramid, polyacrylate, polycarbonate, poly(ester carbonate), polybenzimidazole, a polyimide, a polyether imide, a polyamide imide, and combinations thereof.

7. The negative electrode of claim 6 , wherein the interleaf film is polypropylene.

8. A lithium-ion battery incorporating the negative electrode of claim 1 .

9. The negative electrode of claim 1 , wherein the current collector is in the form of a continuous sheet of material.

10. A negative electrode, comprising:
a current collector comprising copper;
a graphite containing anode formed on the current collector;
a film of lithium metal formed on the graphite containing anode;
an interface film formed on the film of lithium metal, wherein the interface film is selected from the group consisting of ZrO 2 , Li 2 ZrO 3 , or a mixture thereof; and
a protective film formed on the interface film, wherein the protective film is a lithium-ion conducting material or an interleaf film.

11. The negative electrode of claim 10 , wherein the interface film has a thickness from about 0.1 microns to about 5 microns.

12. The negative electrode of claim 10 , wherein the interface film is Li 2 ZrO 3 .

13. The negative electrode of claim 10 , wherein the protective film is the lithium-ion conducting material and the lithium-ion conducting material is selected from the group consisting of: LiPON, crystalline or amorphous phases of garnet-type Li 7 La 3 Zr 2 O 12 , Li 2+2x Zn 1-x GeO 4 wherein 0<x<1, Na 1-x Zr 2 Si x P 3-x O 12 wherein 0<x<3, lithium borohydride (LiBH 4 ), doped anti-perovskite compositions, and LiPS 5 X wherein x is Cl, Br or I.

14. The negative electrode of claim 13 , wherein the protective film is LiPON.

15. The negative electrode of claim 10 , wherein the protective film is the interleaf film and the interleaf film is selected from the group consisting of: polyethylene, polypropylene, poly(ethylene terephthalate), poly(butylene terephthalate), polyester, polyamide, polyaramid, polyacrylate, polycarbonate, poly(ester carbonate), polybenzimidazole, a polyimide, a polyether imide, a polyamide imide, or a combination thereof.

16. The negative electrode of claim 15 , wherein the interleaf film is polypropylene.

17. The negative electrode of claim 10 , wherein the film of lithium metal has a thickness from about 1 to about 20 microns thick.

18. A lithium-ion battery incorporating the negative electrode of claim 10 .

19. The lithium-ion battery of claim 18 , further comprising:
a cathode structure, comprising:
a cathode current collector; and
a cathode film comprising a lithium iron phosphate formed on the cathode current collector.

Assignees

• Applied Materials Inc

Inventors

• Herle Subramanya P
• Haas Dieter

Classifications

• H01M2004/027

  Negative electrodes · CPC title

• H01M10/4235

  Safety or regulating additives or arrangements in electrodes, separators or electrolyte (H01M10/4242 takes precedence) · CPC title

• H01M10/0525

  Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries · CPC title

• H01M4/139

  Processes of manufacture · CPC title

• H01M4/13 Primary

  Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof · CPC title