Apparatus for manufacturing display device and method for manufacturing display device

Patent metadata

Field	Value
Publication number	US-10978680-B2
Application number	US-201916552536-A
Country	US
Kind code	B2
Filing date	Aug 27, 2019
Priority date	Aug 28, 2018
Publication date	Apr 13, 2021
Grant date	Apr 13, 2021

Abstract

A method for manufacturing a display device includes preparing a target panel including a first substrate and a second substrate disposed on one surface of the first substrate, the target panel including a sealing area between the first substrate and the second substrate, making sealing light be incident in the sealing area and receiving at least a part of the sealing light reflected from the sealing area, generating first data including at least one parameter of intensity, energy, current, and voltage, and determining whether sealing is defective by comparing the first data and prestored second data.

First claim

What is claimed is:

1. An apparatus for manufacturing a display device, comprising:
a sealing module including a light source unit which emits sealing light; and
a sealing inspection module including a detector which receives at least a part of the sealing light, a data transforming unit which generates measurement light data based on the sealing light, and a comparison unit which determines whether sealing is defective by comparing the measurement light data with reference data,
wherein the measurement light data includes at least one parameter of intensity, energy, voltage, and current of the sealing light.

2. The apparatus of claim 1 ,
wherein the sealing module further includes a lens unit which is disposed on an optical path of the emitted sealing light and adjusts a focus distance of a femtosecond laser and the light receiving unit of the detector is disposed to face a focus of the femtosecond laser which passes through the lens unit.

3. The apparatus of claim 1 ,
wherein the reference data includes at least one parameter of intensity, energy, voltage, and current.

4. The apparatus of claim 1 , further comprising a data generating unit which includes a first data generating unit and a second data generating unit,
wherein the first data generating unit generates intermediate data including at least one of intensity, energy, voltage, and current of the received sealing light and the second data generating unit generates the measurement light data by performing Fourier transformation based on the intermediate data.

5. The apparatus of claim 1 ,
wherein the sealing light includes a femtosecond laser, and
the sealing module irradiates the femtosecond laser to a target panel including a first substrate and a second substrate facing each other to bond the first substrate and the second substrate and the sealing module receives the femtosecond laser reflected from the target panel.

6. The apparatus of claim 1 ,
wherein the emitted sealing light is reflected from the sealing area of which at least a part is melted and the detector receives at least a part of the sealing light.

7. The apparatus of claim 6 , further comprising a data generating unit which generates the measurement light data based on the sealing light reflected from the sealing area of which at least a part is melted.

8. An apparatus for manufacturing a display device, comprising:
a sealing module including a first light source unit which emits sealing light; and
a sealing inspection module including a second light source which emits inspection light to a subject, a detector which receives at least a part of reflected light reflected from the subject, a data generating unit which generates measurement light data based on the inspection light and the reflected light, a data transforming unit which converts the measurement light data into conversion data, an image generating unit which generates a first image of the subject based on the measurement light data, and a comparison unit which compares the first image with a prestored second image to determine whether sealing is defective.

9. A method for manufacturing a display device, the method comprising:
preparing a target panel including a first substrate and a second substrate disposed on one surface of the first substrate, the target panel including a sealing area between the first substrate and the second substrate;
making sealing light be incident in the sealing area and receiving at least a part of the sealing light reflected from the sealing area;
generating first data including at least one parameter of intensity, energy, current, and voltage; and
determining whether sealing is defective by comparing the first data and prestored second data.

10. The method of claim 9 ,
wherein the sealing light includes a femtosecond laser and the first substrate and the second substrate are partially melted and solidified and bonded to each other in the sealing area in which the femtosecond laser is incident.

11. The method of claim 9 ,
wherein in the receiving the sealing light reflected from the sealing area, the sealing light is reflected from the sealing area which is at least partially melted.

12. The method of claim 9 ,
wherein the making the sealing light be incident in the sealing area includes bonding the first substrate and the second substrate.

13. The method of claim 12 ,
wherein the sealing light includes a femtosecond laser.

14. The method of claim 13 ,
wherein the prestored second data includes at least one parameter of intensity, energy, current, and voltage.

15. The method of claim 14 ,
wherein the determining whether sealing the target panel is defective includes determining that the sealing area in which at least any one of the intensity and the energy of the first data is reduced by about 5 percent or more as compared with the prestored second data in at least one wavelength in a wavelength band in a range of about 400 nanometers to about 1000 nanometers is a defective sealing area.

16. The method of claim 14 ,
wherein the determining whether sealing the target panel is defective includes determining that the sealing area in which at least any one of the voltage and the current energy of the first data is reduced by about 20 percent or more as compared with the prestored second data in at least one wavelength in a wavelength band in a range of about 400 nanometers to about 1000 nanometers is a defective sealing area.

17. The method of claim 14 ,
wherein the determining whether sealing the target panel is defective includes detecting that a corresponding area is a fluctuating area when a voltage amplitude or an energy amplitude of the first data is larger than a reference value stored in the prestored second data and distinguishing a detected area as a defective sealing area.

18. The method of claim 14 ,
wherein the determining whether sealing the target panel is defective includes data-transforming the first data into third data by Fourier transformation.

19. A method for manufacturing a display device, the method comprising:
preparing a manufacturing apparatus including a sealing module including a light source unit emitting sealing light and a sealing inspection module including a detector receiving at least a part of the sealing light, a data transforming unit generating measurement light data based on the sealing light, and a comparison unit determining whether sealing is defective by comparing the measurement light data with reference data; and
irradiating, by the light source unit, the sealing light to a target panel and partially melting the target panel to be bonded and making a part of the sealing light reflected therefrom be incident in the detector,
wherein the measurement light data includes at least one parameter of intensity, energy, current, and voltage.

20. The method of claim 19 ,
wherein the reference data includes at least one parameter of intensity, energy, voltage, and current.

21. The method of claim 19 ,
wherein the sealing light includes a femtosecond laser and a first substrate and a second substrate are partially melted and solidified and bonded to each other in a sealing area in which the femtosecond laser is incident.

22. A method for manufacturing a display device, the method comprising:
preparing a target panel including a first substrate and a second substrate disposed on one surface of the first substrate, the target panel including a sealing area between the first substrate a

Assignees

• Samsung Display Co Ltd

Inventors

• Seo Jin
• Seo Woo Suk
• Yang Sung Hoon
• Oh Se Yoon

Classifications

• H10K71/421

  using coherent electromagnetic radiation, e.g. laser annealing · CPC title

• H10K59/8722

  Peripheral sealing arrangements, e.g. adhesives, sealants · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• B23K26/206 Primary

  Laser sealing · CPC title

• B23K26/032

  using optical means · CPC title