Semiconductor device and method for manufacturing semiconductor device

Patent metadata

Field	Value
Publication number	US-10978563-B2
Application number	US-201916698476-A
Country	US
Kind code	B2
Filing date	Nov 27, 2019
Priority date	Dec 21, 2018
Publication date	Apr 13, 2021
Grant date	Apr 13, 2021

Abstract

A semiconductor device having favorable electrical characteristics is provided. The semiconductor device includes a first insulator; a first conductor over the first insulator; a second insulator over the first conductor; a first oxide over the second insulator; second and third conductors over the first oxide; a third insulator over the second and third conductors; a second oxide over the first oxide and between the second and third conductors; a fourth insulator over the second oxide; a fourth conductor over the fourth insulator; a fifth insulator in contact with the third insulator and the second oxide; a sixth insulator in contact with the first, second, third, and fifth insulators, and the second oxide; and a seventh insulator in contact with the fourth and sixth insulators, the second oxide, and the fourth conductor. The first, sixth, and seventh insulators each contain a silicon nitride. The fifth insulator contains an aluminum oxide.

First claim

What is claimed is:

1. A semiconductor device comprising:
a first insulator;
a first conductor over the first insulator;
a second insulator over the first conductor;
a first oxide over the second insulator;
a second conductor and a third conductor over the first oxide;
a third insulator over the second conductor and the third conductor;
a second oxide over the first oxide and between the second conductor and the third conductor;
a fourth insulator over the second oxide;
a fourth conductor over the fourth insulator;
a fifth insulator in contact with a top surface of the third insulator, and having a side surface in contact with the second oxide;
a sixth insulator in contact with top and side surfaces of the fifth insulator, side surfaces of the third insulator and the second insulator, and a top surface of the first insulator, and having a side surface in contact with the second oxide; and
a seventh insulator in contact with top surfaces of the sixth insulator, the second oxide, the fourth insulator, and the fourth conductor,
wherein the first insulator, the sixth insulator, and the seventh insulator are each a nitride containing silicon, and
wherein the fifth insulator is an oxide containing aluminum.

2. The semiconductor device according to claim 1 ,
wherein the first insulator comprises a first layer and a second layer over the first layer, and
wherein the second layer has a lower hydrogen concentration than the first layer.

3. The semiconductor device according to claim 1 , further comprising an eighth insulator,
wherein the eighth insulator is between the first insulator and the first conductor, and
wherein the eighth insulator is an oxide containing aluminum.

4. The semiconductor device according to claim 1 , further comprising a ninth insulator and a tenth insulator,
wherein the ninth insulator is between the third insulator and the second insulator, the first oxide, the second conductor, and the third conductor,
wherein the tenth insulator is between the ninth insulator and the third insulator,
wherein the ninth insulator is an oxide containing aluminum, and
wherein the tenth insulator is a nitride containing silicon.

5. The semiconductor device according to claim 1 , wherein the first oxide and the second oxide comprise indium, an element M (M is one or more of gallium, aluminum, yttrium, and tin), and zinc.

6. A method for manufacturing a semiconductor device comprising first to fourth conductors, first to seventh insulators, and first and second oxides, comprising the steps of:
forming the first insulator over a substrate, the first conductor over the first insulator, the second insulator over the first conductor, the first oxide over the second insulator, and a conductive layer over the first oxide;
forming the third insulator over the conductive layer;
forming the fifth insulator over the third insulator;
processing part of the fifth insulator, part of the third insulator, and part of the second insulator to form an opening reaching the first insulator;
forming the sixth insulator;
forming an opening in the sixth insulator, the fifth insulator, and the third insulator;
removing a region of the conductive layer overlapping with the opening to form the second conductor and the third conductor;
forming an oxide film between the second conductor and the third conductor to be in contact with the first oxide;
forming an insulating film over the oxide film;
performing microwave processing in an oxygen-containing atmosphere;
forming a conductive film over the insulating film;
removing part of the oxide film, part of the insulating film, and part of the conductive film until a top surface of the sixth insulator is exposed to form the second oxide, the fourth insulator, and the fourth conductor; and
forming the seventh insulator over the sixth insulator, the second oxide, the fourth insulator, and the fourth conductor,
wherein the first insulator, the sixth insulator, and the seventh insulator are each a nitride containing silicon, and
wherein the fifth insulator is an oxide containing aluminum.

7. The method for manufacturing a semiconductor device according to claim 6 ,
wherein the first insulator comprises a first layer and a second layer over the first layer,
wherein the first layer is formed by a PECVD method, and
wherein the second layer is formed by a sputtering method.

8. The method for manufacturing a semiconductor device according to claim 6 , wherein the fifth insulator is formed by a sputtering method.

Assignees

• Semiconductor Energy Lab

Inventors

• Tochibayashi Katsuaki
• Hodo Ryota
• Yamazaki Shunpei

Classifications

• H10B12/31 Primary

  having a storage electrode stacked over the transistor · CPC title

• H10D30/6755

  Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate · CPC title

• H10D62/80 Primary

  characterised by the materials · CPC title

• H01L27/10873

  Electricity · mapped topic

• H01L27/10808

  Electricity · mapped topic