Measurement apparatus for micro- and nano-scale material and measurement method thereof

Patent metadata

Field	Value
Publication number	US-10976238-B2
Application number	US-201916262603-A
Country	US
Kind code	B2
Filing date	Jan 30, 2019
Priority date	Jan 30, 2019
Publication date	Apr 13, 2021
Grant date	Apr 13, 2021

Abstract

A measurement apparatus for micro- and nano-scale materials and a measurement method thereof are provided. The measurement apparatus for the micro- and nano-scale material includes a transmission electron microscope to generate a magnetic field, and a conductive flat punch and a sample which are arranged in the magnetic field. The sample includes the micro- and nano-scale materials. When the current passes through the sample and the conductive flat punch, the conductive flat punch deflects laterally relative to the sample with controllable displacement driven by the electromagnetic force. The required lateral displacement of the present invention is controllable, so that the utilization rate of equipment is greatly increased, and the cost is reduced. In addition, the whole test is performed in the transmission electron microscope, so that a measurement process can be observed in real time.

First claim

The invention claimed is:

1. A measurement apparatus for a micro- and nano-scale material, comprising:
a transmission electron microscope, used for generating a magnetic field in a first direction;
a conductive flat punch, arranged on the magnetic field;
a sample, arranged on the magnetic field, the sample comprising a micro- and nano-scale material, wherein the sample is electrically connected with the conductive flat punch to form an electric circuit, wherein the conductive flat punch has a first length at millimeter scale, and the sample has a second length and the second length of the sample is at micron-meter scale;
a mechanical controller providing a load to the conductive flat punch to control a contact force between the conductive flat punch and the sample, wherein the load lasts 60 seconds at each time, and a value of the load is between 50 μN and 200 μN; and
a current controller outputting a current which is increased at first and then decreased, wherein when a frictional property of the sample is tested, the current with a sine-wave is selected; and when a plastic deformation of the sample is tested, the current with an electric pulse is selected,
wherein when the current passes through the sample and the conductive flat punch in a second direction, perpendicular to the first direction of the magnetic field;
wherein the current has a peak value that is between 4 mA and 18 mA, and the current is increased at the interval of 2 mA, and the conductive flat punch deflects in a third direction perpendicular to the first and the second directions laterally in an amount from 0 nm to 440 nm relative to the sample with controllable displacement driven by an electromagnetic force that is in proportion to an intensity of the magnetic field and the current, thereby achieving measurements of static friction performance and kinetic friction performance of the sample; and
wherein the conductive flat punch, the sample, the current controller and a current source meter are connected to each other in sequence.

2. The measurement apparatus for the micro- and nano-scale material of claim 1 , wherein, the conductive flat punch is of a cantilever structure, and a free end of the cantilever structure is in contact with the sample.

3. The measurement apparatus for the micro- and nano-scale material of claim 1 , wherein, the sample and the conductive flat punch is also connected in series with the current source meter and the current controller.

4. The measurement apparatus for the micro- and nano-scale material of claim 1 , wherein, magnitude and/or frequency of the electromagnetic force is adjusted through current.

5. The measurement method using the measurement apparatus for the micro- and nano-scale material of claim 1 , comprising
first step (S 1 ), installing the conductive flat punch and the sample in the magnetic field, wherein the sample is in contact with the conductive flat punch;
second step (S 2 ), electrically connecting the sample with the conductive flat punch to form the electric circuit; and
third step (S 3 ), passing the current to enable the conductive flat punch to move transversely under an action of an ampere force.

6. The measurement method of claim 5 , wherein, in the first step (S 1 ), the sample processed using a focused ion beam is installed on an electromechanical coupling holder, and the electromechanical coupling holder is inserted into a transmission electron microscope which generates the magnetic field.

7. The measurement method of claim 5 , wherein, in the first step (S 1 ), when the sample is insulated, the sample is coated with a conductive layer.

8. The measurement method using the measurement apparatus for the micro- and nano-scale material of claim 2 , comprising:
first step (S 1 ), installing the conductive flat punch and the sample in the magnetic field, wherein the sample is in contact with the conductive flat punch;
second step (S 2 ), electrically connecting the sample with the conductive flat punch to form the electric circuit; and
third step (S 3 ), passing the current to enable the conductive flat punch to move transversely under an action of an ampere force.

9. The measurement method using the measurement apparatus for the micro- and nano-scale material of claim 3 , comprising:
first step (S 1 ), installing the conductive flat punch and the sample in the magnetic field, wherein the sample is in contact with the conductive flat punch;
second step (S 2 ), electrically connecting the sample with the conductive flat punch to form the electric circuit; and
third step (S 3 ), passing the current to enable the conductive flat punch to move transversely under an action of an ampere force.

10. The measurement method using the measurement apparatus for the micro- and nano-scale material of claim 4 , comprising:
first step (S 1 ), installing the conductive flat punch and the sample in the magnetic field, wherein the sample is in contact with the conductive flat punch;
second step (S 2 ), electrically connecting the sample with the conductive flat punch to form the electric circuit; and
third step (S 3 ), passing the current to enable the conductive flat punch to move transversely under an action of an ampere force.

Assignees

• Univ Xi An Jiaotong

Inventors

• Shan Zhiwei
• Lu Huanhuan
• Li Ju

Classifications

• G01N3/066

  with electrical indicating or recording means · CPC title

• G01N19/02 Primary

  Measuring coefficient of friction between materials {(testing of tyres G01M17/02; determinations of friction coefficient used in vehicle braking or traction control systems B60T8/172)} · CPC title

• G01N2203/005

  Electromagnetic means · CPC title

• G01N2203/0635

  using magnetic properties · CPC title