Charged particle beam device

Patent metadata

Field	Value
Publication number	US-10973112-B2
Application number	US-201716631256-A
Country	US
Kind code	B2
Filing date	Jul 18, 2017
Priority date	Jul 18, 2017
Publication date	Apr 6, 2021
Grant date	Apr 6, 2021

Abstract

The present invention prevents breakage of a chip by using a simple configuration even when an extraction-electrode power source cannot apply voltage to an extraction electrode due to a malfunction, etc. This charged particle beam device is provided with: a charged particle source; an extraction electrode that extracts charged particles from the charged particle source; an extraction-electrode power source that applies voltage to the extraction electrode; an accelerating electrode for accelerating the charged particles; an accelerating power source that applies voltage to the accelerating electrode; and a diode and a resistor which are connected in series between a middle stage of the accelerating power source and the output side of the extraction-electrode power source.

First claim

The invention claimed is:

1. A charged particle beam device comprising:
a charged particle source;
an extraction electrode configured to extract a charged particle from the charged particle source;
an extraction-electrode power source configured to apply a voltage to the extraction electrode;
an acceleration electrode configured to accelerate the charged particle;
an acceleration power source configured to apply a voltage to the acceleration electrode;
a diode and a resistor connected in series between a middle stage of the acceleration power source and an output side of the extraction-electrode power source;
a power source control unit configured to control the acceleration power source and the extraction-electrode power source; and
an extraction-electrode power source node switch configured to disconnect the extraction-electrode power source from a circuit, wherein
the power source control unit turns off the extraction-electrode power source node switch when a generation of an abnormality in the extraction-electrode power source is detected,
the extraction-electrode power source voltage detection unit is configured to detect a voltage of the extraction-electrode power source, and
the power source control unit detects the generation of the abnormality in the extraction-electrode power source using the voltage detected by the extraction-electrode power source voltage detection unit.

2. The charged particle beam device according to claim 1 , wherein
the power source control unit turns off the extraction-electrode power source node switch and stops the extraction-electrode power source when the generation of the abnormality in the extraction-electrode power source is detected.

3. The charged particle beam device according to claim 1 , wherein
a cathode of the diode is connected to the output side of the extraction-electrode power source.

4. A charged particle beam device comprising:
a charged particle source;
an extraction electrode configured to extract a charged particle from the charged particle source;
an extraction-electrode power source configured to apply a voltage to the extraction electrode;
an acceleration electrode configured to accelerate the charged particle;
an acceleration power source configured to apply a voltage to the acceleration electrode;
a diode and a resistor connected in series between a middle stage of the acceleration power source and an output side of the extraction-electrode power source; and
a capacitor connected between the middle stage and output of the acceleration power source.

5. The charged particle beam device according to claim 4 , further comprising:
a power source control unit configured to control the acceleration power source and the extraction-electrode power source; and
an extraction-electrode power source node switch configured to disconnect the extraction-electrode power source from a circuit, wherein
the power source control unit turns off the extraction-electrode power source node switch and stops heating of the charged particle source when a generation of an abnormality in the extraction-electrode power source is detected.

6. A charged particle beam device comprising:
a charged particle source;
an extraction electrode configured to extract a charged particle from the charged particle source;
an extraction-electrode power source configured to apply a voltage to the extraction electrode;
an acceleration electrode configured to accelerate the charged particle;
an acceleration power source configured to apply a voltage to the acceleration electrode;
a diode and a resistor connected in series between a middle stage of the acceleration power source and an output side of the extraction-electrode power source; and
a power source control unit configured to control the acceleration power source and the extraction-electrode power source;
an extraction-electrode power source node switch configured to disconnect the extraction-electrode power source from a circuit; and
a falling detection unit configured to detect a falling of a voltage of the extraction-electrode power source, wherein
the falling detection unit turns off the extraction-electrode power source node switch when the falling of the voltage of the extraction-electrode power source is detected.

7. The charged particle beam device according to claim 6 , wherein
the falling detection unit turns off the extraction-electrode power source node switch and stops the extraction-electrode power source when the falling of the voltage of the extraction-electrode power source is detected.

8. A charged particle beam device comprising:
a charged particle source;
an extraction electrode configured to extract a charged particle from the charged particle source;
an extraction-electrode power source configured to apply a voltage to the extraction electrode;
an acceleration electrode configured to accelerate the charged particle;
an acceleration power source configured to apply a voltage to the acceleration electrode; and
a switch and a resistor connected in series between a middle stage of the acceleration power source and an output side of the extraction-electrode power source.

9. The charged particle beam device according to claim 8 , further comprising:
a power source control unit configured to control the acceleration power source and the extraction-electrode power source; and
an extraction-electrode power source node switch configured to disconnect the extraction-electrode power source from a circuit, wherein
the power source control unit turns off the extraction-electrode power source node switch when a generation of an abnormality in the extraction-electrode power source is detected.

10. The charged particle beam device according to claim 9 , wherein
the power source control unit turns off the extraction-electrode power source node switch and stops the extraction-electrode power source when the generation of the abnormality in the extraction-electrode power source is detected.

11. The charged particle beam device according to claim 9 , further comprising:
an extraction-electrode power source voltage detection unit configured to detect a voltage of the extraction-electrode power source, wherein
the power source control unit detects the generation of the abnormality in the extraction-electrode power source using the voltage detected by the extraction-electrode power source voltage detection unit.

12. The charged particle beam device according to claim 8 , further comprising:
a capacitor connected between the middle stage and output of the acceleration power source.

13. The charged particle beam device according to claim 8 , wherein the acceleration power source is a Cockcroft-Walton circuit.

14. The charged particle beam device according to claim 1 , wherein the acceleration power source is a Cockcroft-Walton circuit.

15. The charged particle beam device according to claim 4 , wherein the acceleration power source is a Cockcroft-Walton circuit.

16. The charged particle beam device according to claim 6 , wherein the acceleration power source is a Cockcroft-Walton circuit.

17. The charged particle beam device according to claim 1 , further comprising:
a capacitor connected between the middle stage and output of the acceleration power source.

18. The charged particle beam device according to claim 6 , further comprising:
a capacitor connected between the middle stage and output of the acceleration power source.

Assignees

• Hitachi High Tech Corp

Inventors

• Kadoi Ryo
• Li Wen
• Ishigaki Naoya

Classifications

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/06

  Electron sources; Electron guns · CPC title

• H01J2237/0473

  accelerating · CPC title

• H05H5/03 Primary

  Accelerating tubes · CPC title

• H01J37/241

  High voltage power supply or regulation circuits · CPC title