Methods of forming near field transducers and near field transducers formed thereby

Patent metadata

Field	Value
Publication number	US-10971180-B2
Application number	US-201715638453-A
Country	US
Kind code	B2
Filing date	Jun 30, 2017
Priority date	Dec 6, 2013
Publication date	Apr 6, 2021
Grant date	Apr 6, 2021

Abstract

A method of forming a near field transducer (NFT), the method including the steps of depositing a primary material; and implanting a secondary element, wherein both the primary material and the secondary element are chosen such that the primary material is densified via implantation of the secondary element.

First claim

What is claimed is:

1. A method of forming a near field transducer (NFT), the method comprising the steps of:
depositing a primary material;
implanting a secondary element into the primary material, wherein both the primary material and the secondary element are chosen such that the primary material is densified via implantation of the secondary element; and
depositing a second portion of the primary material onto the densified primary material,
wherein the primary material and the secondary element are the same and are selected from gold, copper, rhodium, and aluminum.

2. The method according to claim 1 , wherein the primary material is rhodium (Rh) and the secondary element is rhodium (Rh).

3. The method according to claim 1 , wherein the primary material is gold (Au) and the secondary element is gold.

4. The method according to claim 1 , wherein the primary material is copper (Cu) and the secondary element is copper (Cu).

5. The method according to claim 1 further comprising annealing after implanting the secondary element.

6. The method according to claim 1 , wherein implanting the secondary element comprises patterning steps.

7. The method according to claim 1 , wherein the secondary element is implanted at a fluence from about 1×10 11 to about 1×10 16 ions/cm 2 .

8. The method according to claim 1 , wherein the secondary element is implanted at an incident energy from about 1×10 12 to about 5×10 15 ions/cm 2 .

9. A method of forming a near field transducer (NFT), the method comprising the steps of:
depositing a primary material;
implanting a secondary element into the primary material;
depositing a second portion of the primary material on the implanted primary material and
forming at least part of a near field transducer (NFT) from the implanted primary material and the second portion of the primary material,
wherein the primary material and the secondary element are the same and are selected from gold, copper, rhodium, and aluminum.

10. The method according to claim 9 , wherein the primary material and the secondary element are rhodium (Rh).

11. A method according to claim 9 ,
wherein the primary material is densified via implantation of the secondary element.

12. The method according to claim 9 , wherein the primary material and the secondary element are gold (Au).

13. The method according to claim 9 , wherein the primary material and the secondary element are copper (Cu).

14. The method according to claim 9 , wherein the primary material and the secondary element are aluminum (Al).

15. The method according to claim 9 further comprising depositing an encapsulant material after implanting the secondary element.

16. The method according to claim 9 further comprising annealing the primary material after the secondary element is implanted.

17. The method according to claim 9 , wherein the secondary element is implanted at a fluence from about 1×10 11 to about 1×10 16 ions/cm 2 .

18. The method according to claim 9 , wherein the secondary element is implanted at an incident energy from about 1×10 12 to about 5×10 15 ions/cm 2 .

19. A method of forming a near field transducer (NFT), the method comprising the steps of:
depositing a primary material;
implanting a secondary element into the primary material, wherein both the primary material and the secondary element are chosen such that the primary material is densified via implantation of the secondary element; and
depositing a second portion of the primary material onto the densified primary material,
wherein the primary material is copper and the secondary element is xenon.

Assignees

• Seagate Technology Llc

Inventors

• Jayashankar Sethuraman
• Sahoo Sarbeswar

Classifications

• G11B2005/0021

  Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal · CPC title

• G11B5/6088 Primary

  Optical waveguide in or on flying head · CPC title

• G11B5/314

  where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers (G11B5/3196 takes precedence) · CPC title

• C23C14/48

  Ion implantation · CPC title