Control apparatus, exposure apparatus, and method of manufacturing article

Patent metadata

Field	Value
Publication number	US-10969698-B2
Application number	US-201916454500-A
Country	US
Kind code	B2
Filing date	Jun 27, 2019
Priority date	Jul 4, 2018
Publication date	Apr 6, 2021
Grant date	Apr 6, 2021

Abstract

The present invention provides a control apparatus for performing synchronous control to synchronize driving of a second moving member so as to follow driving of a first moving member, including a feedforward control system that includes a calculator configured to obtain an input/output response of the second moving member and position deviations of the first moving member and the second moving member while driving the first moving member and the second moving member in synchronism with each other, and calculate a feedforward manipulated variable based on the input/output response of the second moving member and the synchronous error between the first moving member and the second moving member obtained from the position deviations of the first moving member and the second moving member.

First claim

What is claimed is:

1. A control apparatus for performing synchronous control to synchronize driving of a second moving member to follow driving of a first moving member, the control apparatus comprising:
a feedback control system configured to perform, for each of the first moving member and the second moving member, feedback control to reduce a position deviation from a target position; and
a feedforward control system configured to perform feedforward control by providing the second moving member with a feedforward manipulated variable to reduce a synchronous error between the first moving member and the second moving member, in a state where the feedback control is being performed,
wherein the feedforward control system includes a calculator configured to:
obtain an input/output response of the second moving member, in a state where the second moving member is staying still and provided with the feedforward manipulated variable;
obtain position deviations of the first moving member and the second moving member while driving the first moving member and the second moving member in synchronism with each other;
calculate the feedforward manipulated variable based on the input/output response of the second moving member and the synchronous error between the first moving member and the second moving member obtained from the position deviations of the first moving member and the second moving member;
obtain first data by measuring a position deviation of the first moving member while driving the first moving member, in a state where the feedback control is being performed for the first moving member and the feedforward control is not being performed for the first moving member;
obtain second data by measuring the position deviations of the first moving member and the second moving member while driving the first moving member and the second moving member in synchronism with each other, in a state where the feedback control is being performed for each of the first moving member and the second moving member and the feedforward control is being performed by providing the first moving member with a manipulated variable calculated based on the obtained first data and an input/output response of the first moving member; and
calculate the synchronous error between the first moving member and the second moving member from the obtained second data.

2. The apparatus according to claim 1 , wherein the feedforward control system includes a storage unit configured to store the feedforward manipulated variable calculated by the calculator, and provides the second moving member with the feedforward manipulated variable stored in the storage unit when performing the synchronous control.

3. The apparatus according to claim 2 , wherein the feedforward control system includes a driving unit configured to drive the second moving member, and a driver for the driving unit, and that provides an input of the driver with the feedforward manipulated variable stored in the storage unit.

4. The apparatus according to claim 1 , wherein when performing the synchronous control, the feedforward control system provides the first moving member with the manipulated variable, and performs the feedforward control to reduce the position deviation of the first moving member.

5. The apparatus according to claim 1 , wherein the input/output response of the second moving member includes one of an impulse response or a step response.

6. The apparatus according to claim 1 , wherein:
the second moving member includes a substrate stage configured to hold a substrate, and
the first moving member includes a reticle stage configured to hold a reticle having a pattern to be transferred onto the substrate.

7. An exposure apparatus for exposing a substrate, the exposure apparatus comprising:
a substrate stage configured to hold the substrate;
a reticle stage configured to hold a reticle having a pattern to be transferred onto the substrate; and
a control apparatus configured to perform synchronous control to synchronize driving of the substrate stage to follow driving of the reticle stage, and comprising:
a feedback control system configured to perform, for each of the reticle stage and the substrate stage, feedback control to reduce a position deviation from a target position; and
a feedforward control system configured to perform feedforward control by providing the substrate stage with a feedforward manipulated variable to reduce a synchronous error between the reticle stage and the substrate stage, in a state where the feedback control is being performed,
wherein the feedforward control system includes a calculator configured to:
obtain an input/output response of the substrate stage, in a state where the second moving member is staying still and provided with the feedforward manipulated variable;
obtain position deviations of the reticle stage and the substrate stage while driving the reticle stage and the substrate stage in synchronism with each other;
calculate the feedforward manipulated variable based on the input/output response of the substrate stage and the synchronous error between the reticle stage and the substrate stage obtained from the position deviations of the reticle stage and the substrate stage; and
obtain first data by measuring a position deviation of the reticle stage while driving the reticle stage, in a state where the feedback control is being performed for the reticle stage and the feedforward control is not being performed for the reticle stage;
obtain second data by measuring the position deviations of the reticle stage and the substrate stage while driving the reticle stage and the substrate stage in synchronism with each other, in a state where the feedback control is being performed for each of the reticle stage and the substrate stage and the feedforward control is being performed by providing the reticle stage with a manipulated variable calculated based on the obtained first data and an input/output response of the reticle stage; and
calculate the synchronous error between the reticle stage and the substrate stage from the obtained second data.

8. A method of manufacturing an article, the method comprising:
exposing a substrate using an exposure apparatus;
developing the exposed substrate; and
manufacturing the article from the developed substrate,
wherein the exposure apparatus comprises:
a substrate stage configured to hold the substrate;
a reticle stage configured to hold a reticle having a pattern to be transferred onto the substrate; and
a control apparatus configured to perform synchronous control to synchronize driving of the substrate stage to follow driving of the reticle stage, and comprising:
a feedback control system configured to perform, for each of the reticle stage and the substrate stage, feedback control to reduce a position deviation from a target position; and
a feedforward control system configured to perform feedforward control by providing the substrate stage with a feedforward manipulated variable to reduce a synchronous error between the reticle stage and the substrate stage, in a state where the feedback control is being performed,
wherein the feedforward control system includes a calculator configured to:
obtain an input/output response of the substrate stage, in a state where the second moving member is staying still and provided with the feedforward manipulated variable;
obtain position deviations of the reticle stage and the substrate stage while driving the reticle stage and the substrate stage in synchronism with each other;
calculate the feedforward manipulated variable based on the input/output response of the substrate stage and the synchronous error between the reticle stage and the substrate stage obt

Assignees

• Canon Kk

Inventors

• Kurihara Takashi

Classifications

• G05B2219/41427

  Feedforward of position · CPC title

• G05B19/19 Primary

  characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path · CPC title

• G03F7/70766

  Reaction force control means, e.g. countermass · CPC title

• G03F7/70758

  Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving · CPC title

• G03F7/706

  Aberration measurement · CPC title