Method of manufacturing a dielectric device

Patent metadata

Field	Value
Publication number	US-10964879-B2
Application number	US-201715800873-A
Country	US
Kind code	B2
Filing date	Nov 1, 2017
Priority date	Jun 4, 2012
Publication date	Mar 30, 2021
Grant date	Mar 30, 2021

Abstract

A method of manufacturing a dielectric device includes epitaxially growing a metal film on a substrate, forming a dielectric film on the metal film such that the dielectric film has a preferentially oriented structure, forming a first electrode film having a non-oriented or amorphous structure on the dielectric film, removing the substrate and the metal film from the dielectric film or removing the substrate from the metal film, and forming a second electrode film having a non-oriented or amorphous structure on the dielectric film or the metal film.

First claim

What is claimed is:

1. A method of manufacturing a dielectric device comprising:
epitaxially growing a metal film on a substrate;
forming a dielectric film on the metal film such that the dielectric film has a preferentially oriented structure;
forming a first electrode film having a non-oriented or amorphous structure on the dielectric film;
removing the substrate and the metal film from the dielectric film; and
forming a second electrode film having a non-oriented or amorphous structure on the dielectric film;
wherein the dielectric device comprises the first electrode film, the dielectric film provided on the first electrode film, and the second electrode film provided on the dielectric film.

2. The method according to claim 1 , wherein the dielectric film is (001), (101), or (110) preferentially oriented.

3. The method according to claim 1 , wherein the dielectric film is a piezoelectric material.

4. The method according to claim 1 , wherein an oxidation-reduction potential of every metal element forming the first electrode film and the second electrode film is higher than an oxidation-reduction potential of every metal element forming the dielectric film.

5. The method according to claim 1 , wherein the first electrode film and the second electrode film independently comprise an element selected from the group consisting of Al, Ti, Zr, Ta, Cr, Co, and Ni.

6. The method according to claim 1 , wherein the first electrode film and the second electrode film independently comprise an alloy containing at least one element selected from the group consisting of Al, Ti, Zr, Ta, Cr, Co, and Ni.

7. The method according to claim 1 , wherein one principal surface of the dielectric film is in contact with the first electrode film and the other principal surface of the dielectric film is in contact with the second electrode film.

8. The method according to claim 1 , further comprising forming an intermediate film comprising an element selected from the group consisting of Al, Ti, Zr, Ta, Cr, Co, and Ni on the dielectric film before forming at least one of the first electrode film and the second electrode film such that the intermediate film is disposed between the dielectric film and the at least one of the first electrode film and the second electrode film.

9. The method according to claim 8 , wherein the intermediate film is in contact with the dielectric film and the at least one of the first electrode film and the second electrode film.

10. The method according to claim 8 , further comprising forming an electroconductive oxide film on the dielectric film such that the electroconductive oxide film is disposed between the dielectric film and the at least one of the first electrode film and the second electrode film.

11. The method according to claim 10 , wherein the intermediate film or the electroconductive oxide film is in contact with the dielectric film.

12. The method according to claim 1 , wherein the first electrode film and the second electrode film have a thickness within a range of from 100 nm to 200 nm.

13. The method according to claim 1 , wherein the dielectric film is a film such that in X-ray diffraction measurement, an intensity of a peak ascribed to a certain crystal lattice plane is not less than 50% of a total of intensities of all peaks.

14. The method according to claim 1 , wherein the dielectric film is a film such that in X-ray diffraction measurement, an intensity of a peak ascribed to a certain crystal lattice plane is not less than 80% of a total of intensities of all peaks.

15. The method according to claim 1 , wherein the first electrode film and the second electrode film are films such that in X-ray diffraction measurement, an intensity of a peak ascribed to any crystal lattice plane is less than 50% of a total of intensities of all peaks.

16. The method according to claim 1 , wherein the first electrode film and the second electrode film are films such that in X-ray diffraction measurement, an intensity of a peak ascribed to any crystal lattice plane is not more than 10% of a total of intensities of all peaks.

17. The method according to claim 1 , wherein the second electrode film is formed on the dielectric film after the substrate and metal film have been removed from the dielectric film.

18. A method of manufacturing a dielectric device comprising:
epitaxially growing a metal film having a preferentially oriented structure on a substrate;
forming a dielectric film on the metal film such that the dielectric film has a preferentially oriented structure;
forming a first electrode film having a non-oriented or amorphous structure on the dielectric film;
removing the substrate from the metal film; and
forming a second electrode film having a non-oriented or amorphous structure on the metal film;
wherein the dielectric device comprises the first electrode film, the dielectric film provided on the first electrode film, the second electrode film provided on the dielectric film, and the metal film between the second electrode film and the dielectric film.

19. The method according to claim 18 , wherein the dielectric film is (001), (101), or (110) preferentially oriented.

Assignees

• Tdk Corp

Inventors

• Kurachi Katsuyuki
• Sakuma Hitoshi
• Aida Yasuhiro
• Maejima Kazuhiko
• Nakajima Mayumi

Classifications

• H10D1/682

  having dielectrics comprising perovskite structures · CPC title

• H01L28/55

  Electricity · mapped topic

• H01L41/0815 Primary

  Electricity · mapped topic

• Y10T29/42

  Piezoelectric device making · CPC title

• H01L41/29

  Electricity · mapped topic