System for automatic sending cassette pod

Patent metadata

Field	Value
Publication number	US-10964574-B2
Application number	US-202016888987-A
Country	US
Kind code	B2
Filing date	Jun 1, 2020
Priority date	Dec 7, 2016
Publication date	Mar 30, 2021
Grant date	Mar 30, 2021

Abstract

A system for sending a cassette pod is provided. The system includes a processing machine having a load port for receiving the cassette pod. The system further includes a manipulating apparatus positioned above the processing machine. The manipulating apparatus includes an intermediate module having a stage and a driving mechanism connected to the stage to change the position of the stage. The manipulating apparatus further includes a conveyor module having a gripper assembly for grasping the cassette pod.

First claim

What is claimed is:

1. A system for sending a cassette pod, comprising:
a processing machine having a load port for receiving the cassette pod; and
a manipulating apparatus positioned above and outside the processing machine and comprising:
an intermediate module positioned at a lower section of the manipulating apparatus and comprising a stage and a driving mechanism connected to the stage to change the position of the stage to adjust orientation or position of the cassette pod when the cassette pod is placed on the stage;
a conveyor module positioned at an upper section of the manipulating apparatus and comprising a gripper assembly for grasping the cassette pod;
a door handling module configured for disengaging or engaging a door of the cassette pod, wherein the door handling module comprises an insertion member having a shape corresponding to the shape of a through hole formed on the door of the cassette pod; and
a storage rack positioned adjacent to the intermediate module and configured for storing door of the cassette pod, wherein the storage rack comprises an accommodation space having a shape corresponding to the shape of the door of the cassette pod.

2. The system for sending the cassette pod as claimed in claim 1 , wherein the driving mechanism comprises:
a first linear actuator connected to the stage to drive the movement of the stage in a longitudinal direction; and
a second linear actuator connected to the stage to drive the movement of the stage in a traversal direction, wherein the longitudinal direction is perpendicular to the traversal direction.

3. The system for sending the cassette pod as claimed in claim 1 , wherein the driving mechanism comprises a rotary actuator connected to the stage to drive the rotation of the stage about a vertical axis.

4. The system for sending the cassette pod as claimed in claim 1 , wherein the conveyor module further comprises a hoisting mechanism connected to the gripper assembly to drive the movement of the gripper assembly along an axis that passes through the load port of the process module.

5. The system for sending the cassette pod as claimed in claim 1 , wherein the conveyor module further comprises a linear actuator connected to the gripper assembly to drive the movement of the gripper assembly in a longitudinal direction.

6. The system for sending the cassette pod as claimed in claim 1 , wherein the door handling module further comprises a second driving mechanism connected to the insertion member to drive the movement of the insertion member in at least one linear direction.

7. The system for sending the cassette pod as claimed in claim 1 , wherein the door handling module further comprises a suction member arranged adjacent to the insertion member and configured for attaching the door of the cassette pod.

8. The system for sending the cassette pod as claimed in claim 6 , wherein the door handling module further comprises a suction member arranged adjacent to the insertion member and configured for attaching the door of the cassette pod.

9. The system for sending the cassette pod as claimed in claim 1 , further comprising a transportation apparatus configured to send the cassette pod to or from the stage, wherein the transportation apparatus comprises an overhead hoist transport (OHT) vehicle moveable along a rail that is located over the processing machine; wherein the transportation apparatus, the stage, and the load port of the processing machine are arranged in sequence in a vertical axis.

10. A system for sending a cassette pod, comprising:
a processing machine having a load port for receiving the cassette pod; and
a manipulating apparatus positioned above and outside the processing machine and comprising:
an intermediate module positioned at a lower section of the manipulating apparatus and comprising a stage and a driving mechanism connected to the stage to change the position of the stage to adjust orientation or position of the cassette pod when the cassette pod is placed on the stage;
a conveyor module positioned at an upper section of the manipulating apparatus and comprising a gripper assembly for grasping the cassette pod;
a storage rack positioned adjacent to the lower section and comprising an accommodation space configured for storing a door of the cassette pod; and
a door handling module configured for disengaging or engaging the door of the cassette pod when the cassette pod is placed on the stage, wherein the door handling module comprises a suction member configured for attaching the door.

11. The system for sending the cassette pod as claimed in claim 10 , wherein the door handling module is also configured for moving the door to or from the storage rack, wherein the door handling module further comprises a driving mechanism connected to the suction member to drive the movement of the suction member in at least one linear direction.

12. The system for sending the cassette pod as claimed in claim 11 , wherein the driving mechanism of the door handling module is configured to drive the movement of the suction member in a first linear direction relative to the cassette pod, and configured to drive the movement of the suction member in a second linear direction relative to the storage rack, wherein the second linear direction is perpendicular to the first linear direction.

13. The system for sending the cassette pod as claimed in claim 10 , wherein the driving mechanism comprises:
a first linear actuator connected to the stage to drive the movement of the stage in a longitudinal direction; and
a second linear actuator connected to the stage to drive the movement of the stage in a traversal direction, wherein the longitudinal direction is perpendicular to the traversal direction.

14. The system for sending the cassette pod as claimed in claim 10 , wherein the driving mechanism comprises a rotary actuator connected to the stage to drive the rotation of the stage about a vertical axis.

15. The system for sending the cassette pod as claimed in claim 10 , wherein the conveyor module further comprises a hoisting mechanism connected to the gripper assembly to drive the movement of the gripper assembly along an axis that passes through the load port of the process module.

16. The system for sending the cassette pod as claimed in claim 15 , wherein the conveyor module further comprises a linear actuator connected to the hoisting mechanism to drive the movement of the hoisting mechanism in a longitudinal direction perpendicular to the axis that passes through the load port.

17. The system for sending the cassette pod as claimed in claim 10 , further comprising a transportation apparatus configured to send the cassette pod to or from the stage, wherein the transportation apparatus comprises an overhead hoist transport (OHT) vehicle moveable along a rail that is located over the processing machine; wherein the transportation apparatus, the stage, and the load port of the processing machine are arranged in sequence in a vertical axis and separated from each other.

18. A system for sending a cassette pod, comprising:
a processing machine having a load port for receiving the cassette pod; and
a manipulating apparatus positioned above and outside the processing machine and comprising:
an intermediate module positioned at a lower section of the manipulating apparatus and comprising a stage and a driving mechanism connected to the stage to change the position of the stage to adjust orientation or position of the cassette pod when the cassette pod is placed on the stage;
a conveyor mod

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Kuo Tsung-Sheng

Classifications

• H10P72/3408

  Docking arrangements · CPC title

• H10P72/3406

  involving removal of lid, door or cover · CPC title

• H10P72/3222

  Loading to or unloading from a conveyor · CPC title

• H10P72/3221 Primary

  Overhead conveying · CPC title

• B65G2201/0297

  Wafer cassette · CPC title