High temperature heater for processing chamber

Patent metadata

Field	Value
Publication number	US-10959294-B2
Application number	US-201615392453-A
Country	US
Kind code	B2
Filing date	Dec 28, 2016
Priority date	Dec 31, 2015
Publication date	Mar 23, 2021
Grant date	Mar 23, 2021

Abstract

Heater assemblies comprising a cylindrical body with a surface and a central axis including a plurality of heating elements are described. The plurality of heating elements is axially spaced on the surface of the cylindrical body. Each of the heating elements forms an axially spaced heating zone. Each heating element has a spiral shape with an inner end and an outer end defining a length of the heating element. Each coil of the spiral shape is spaced from an adjacent coil by a distance sufficient to prevent arcing between adjacent coils.

First claim

What is claimed is:

1. A heater assembly for a semiconductor processing chamber, the heater assembly comprising:
a cylindrical body with a central axis and a surface surrounded by a sidewall, a distance between the central axis and the sidewall being sufficient for a batch processing chamber at greater than or equal to 300 mm; and
a plurality of resistive heating elements radially spaced on the surface of the cylindrical body, each of the plurality of resistive heating elements forming a radially spaced heating zone, the plurality of resistive heating elements forming an inner heating zone a first distance from the central axis, a middle heating zone a second distance from the central axis greater than the first distance and an outer heating zone a third distance from the central axis greater than the second distance, each heating element having a spiral shape with an inner end and an outer end defining a length of the heating element, each coil of the spiral shape spaced from an adjacent coil by a distance sufficient to prevent arcing between adjacent coils,
wherein the inner heating zone comprises an inner heating element with a first length and a first number of coils, the middle heating zone comprising a middle heating element with a second length a second number of coils and the outer heating zone comprises an outer heating element with a third length and a third number of coils, wherein each of the inner heating element, middle heating element and outer heating element comprise at least three coils,
wherein the inner heating element is positioned within an inner channel in the surface of the cylindrical body, the inner channel conforming in shape to the inner heating element so that the length of the inner heating element is within the inner channel,
wherein the middle heating element is positioned within a middle channel in the surface of the cylindrical body, the middle channel conforming in shape to the middle heating element so that the length of the middle heating element is within the middle channel,
wherein the outer heating element is positioned within an outer channel in the surface of the cylindrical body, the outer channel conforming in shape to the outer heating element so that the length of the outer heating element is within the outer channel, and
wherein the outer channel has a depth less than a depth of the middle channel, the middle channel has a depth less than a depth of the inner channel, and the inner heating element has a first width and a first height, the middle heating element has a second width and a second height, and the outer heating element has a third width and a third height, the first width being greater than the second width, the second width being greater than the third width, the first height being less than the second height, and the second height being less than the third height.

2. The heater assembly of claim 1 , wherein each of the inner heating element, middle heating element and outer heating element comprise graphite.

3. The heater assembly of claim 1 , wherein the inner channel is wider than the inner heating element to allow expansion of the inner heating element.

4. The heater assembly of claim 1 , wherein the inner channel has a depth greater than a height of the inner heating element so that walls of the inner channel extend above a top of the inner heating element.

5. The heater assembly of claim 1 , wherein the middle channel is wider than the middle heating element to allow expansion of the middle heating element.

6. The heater assembly of claim 1 , wherein the middle channel has a depth greater than a height of the middle heating element so that walls of the middle channel extend above a top of the middle heating element.

7. The heater assembly of claim 1 , wherein the outer channel is wider than the outer heating element to allow expansion of the outer heating element.

8. The heater assembly of claim 1 , wherein the outer channel has a depth that is substantially the same as a height of the outer heating element so that a top of the outer heating element is substantially even with the surface of the cylindrical body.

9. The heater assembly of claim 1 , wherein the plurality of spiral resistive heating elements are axially spaced into the surface of the cylindrical body, each of the plurality of resistive heating elements forming an axially spaced heating zone within axially spaced heating channels, wherein the inner heating element in the inner heating channel is lower than the middle heating element in the middle heating channel, and the middle heating element in the middle heating channel is lower than the outer heating element in the outer heating channel.

Assignees

• Applied Materials Inc

Inventors

• Polyak Alexander S
• Yudovsky Joseph
• Kwong Garry K

Classifications

• H10P72/7621

  characterised by supporting two or more semiconductor substrates · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H05B3/18 Primary

  the conductor being embedded in an insulating material · CPC title

• H05B6/105 Primary

  using a susceptor · CPC title