Laser-seeding for electro-conductive plating

Patent metadata

Field	Value
Publication number	US-10957615-B2
Application number	US-201716067693-A
Country	US
Kind code	B2
Filing date	Mar 31, 2017
Priority date	Mar 31, 2016
Publication date	Mar 23, 2021
Grant date	Mar 23, 2021

Abstract

A workpiece (100) having substrate, such as a glass substrate, can be etched by a laser or by other means to create recessed features (200, 202). A laser-induced forward transfer (LIFT) process or metal oxide printing process can be employed to impart a seed material (402), such as a metal, onto the glass substrate, especially into the recessed features (200, 202). The seeded recessed features can be plated, if desired, by conventional techniques, such as electroless plating, to provide conductive features (500) with predictable and better electrical properties. The workpieces (100) can be connected in a stacked such that subsequently stacked workpieces (100) can be modified in place.

First claim

What is claimed is:

1. A method, comprising:
in a first laser process, directing a beam of laser energy to a workpiece to form a recess within the workpiece, wherein the workpiece comprises a main surface and wherein the recess includes a sidewall surface extending from the main surface;
in a second laser process, forming a seed layer within the recess, wherein forming the seed layer includes directing a beam of laser energy onto a seed material, wherein forming the seed layer comprises:
providing a donor structure comprising a carrier substrate that is transparent to the beam of laser energy and a donor film, wherein the donor film faces toward the workpiece; and
directing the beam of laser energy through the carrier substrate to impinge a portion of the donor film such that at least a portion of the donor film impinged by the laser energy is transferred off from the carrier substrate as a plurality of liquid droplets and onto the workpiece,
wherein, in the second laser process, the seed layer is formed on the sidewall surface of the recess; and

performing a plating process using the seed layer as a seed to form a conductive feature within the recess.

2. The method of claim 1 , wherein the workpiece comprises a glass substrate.

3. The method of claim 1 , wherein the seed layer comprises copper.

4. The method of claim 1 , wherein performing the plating comprises performing an electroless plating process.

5. The method of claim 1 , wherein the conductive feature comprises copper.

6. The method of claim 1 , wherein the conductive feature has a width smaller than 12 μm.

7. The method of claim 1 , wherein the conductive feature comprises copper and wherein the conductive feature has a resistivity less than or equal to 1.5 times that of bulk copper.

8. The method of claim 1 , further comprising forming a through hole within the workpiece, wherein forming the seed layer comprises forming the seed layer within the through hole.

9. The method of claim 1 , wherein, in the second laser process, the beam of laser energy has a wavelength shorter than 550 nm.

10. The method of claim 1 , wherein, in the second laser process, the beam of laser energy is characterized by a pulse repetition rate less than 200 kHz and an average power less than 20 W.

11. The method of claim 1 , wherein the donor structure is spaced apart from the workpiece during formation of the seed layer.

12. The method of claim 1 , wherein the beam of laser energy directed in the second laser process is a pulsed beam of laser energy.

13. The method of claim 1 , wherein a quasi-continuous wave (QCW) laser is employed to provide the beam of laser energy directed in the second laser process.

14. The method of claim 1 , wherein the conductive feature is a wire mesh.

15. The method of claim 1 , wherein the workpiece and the conductive features exhibit an optical transmission greater than or equal to 90%.

16. The method of claim 1 , wherein the workpiece is flexible.

17. The method of claim 1 , wherein the recess further includes a bottom surface extending from the sidewall surface,
wherein, in the second laser process, the seed layer is formed on the bottom surface of the recess.

18. The method of claim 1 , wherein the second laser process further includes forming the seed layer outside the recess, the method further comprising:
removing the seed layer outside the recess before performing the plating process.

19. The method of claim 1 , wherein the workpiece comprises a main surface and wherein the recess extends into the workpiece from the main surface,
wherein a surface defining the recess is rougher than the main surface.

20. A method, comprising:
in a first laser process, directing a beam of laser energy to a workpiece to form a through hole within the workpiece;
in a second laser process, forming a seed layer within the through hole, wherein forming the seed layer includes directing a beam of laser energy onto a seed material, wherein forming the seed layer comprises:
providing a donor structure comprising a carrier substrate that is transparent to the beam of laser energy and a donor film, wherein the donor film faces toward the workpiece; and
directing the beam of laser energy through the carrier substrate to impinge a portion of the donor film such that at least a portion of the donor film impinged by the laser energy is transferred off from the carrier substrate as a plurality of liquid droplets and onto the workpiece; and

performing a plating process using the seed layer as a seed to form a conductive feature within the through hole.

Assignees

• Electro Scient Ind Inc

Inventors

• Schrauben Joel
• Kleinert Jan

Classifications

• H10W70/685

  comprising multiple insulating layers · CPC title

• H10W70/635

  Through-vias · CPC title

• H10W70/095

  of vias therein · CPC title

• H10W70/05

  of insulating or insulated package substrates, or of interposers, or of redistribution layers (manufacture or treatment of leadframes H10W70/04) · CPC title

• H10W70/682

  comprising holes having chips therein · CPC title