Pellicle frame and pellicle

Patent metadata

Field	Value
Publication number	US-10955740-B2
Application number	US-201716316501-A
Country	US
Kind code	B2
Filing date	Jun 30, 2017
Priority date	Jul 12, 2016
Publication date	Mar 23, 2021
Grant date	Mar 23, 2021

Abstract

The present invention provides; a pellicle frame which can effectively inhibit distortion of the photo mask (8) caused by mounting the pellicle (1), and which does not have a complex shape, and a pellicle which uses said pellicle frame are provided, and a manufacturing method of a blackened pellicle frame is also provided which can reduce the defect of the surface flickering under concentrated light and which facilitates inspection of the foreign matter adhesion prior to use. The present invention relates to a pellicle frame with an anodized film on a surface of an aluminum alloy frame, characterized in that: the aluminum alloy frame comprises an aluminum alloy which contains Ca: 5.0 to 10.0% by mass with the remainder aluminum and unavoidable impurities are contained, and has an area (volume) ratio of an Al4Ca phase, which is a dispersed phase, is greater than or equal to 25%, and a crystal structure of a part of the Al4Ca phase is monoclinic; wherein the Al4Ca phase dispersed in the anodized film is anodized, and the anodized film is stained with a black dye.

First claim

The invention claimed is:

1. A pellicle frame with an anodized film on a surface of an aluminum alloy frame, characterized in that:
the aluminum alloy frame comprises an aluminum alloy which contains Ca: 5.0 to 10.0% by mass with the remainder aluminum and unavoidable impurities are contained, and has an area (volume) ratio of an Al 4 Ca phase, which is a dispersed phase, is greater than or equal to 25%, and a crystal structure of a part of the Al 4 Ca phase is monoclinic; wherein
the Al 4 Ca phase dispersed in the anodized film is anodized, and
the anodized film is stained with a black dye.

2. The pellicle frame according to claim 1 , wherein a V content and a Fe content of the aluminum alloy are 0.0001 to 0.005% by mass and 0.05 to 1.0% by mass, respectively.

3. The pellicle frame according to claim 1 , wherein an average crystal grain size of the Al 4 Ca phase is 1. 5 μm or less.

4. The pellicle frame according to claim 1 , further comprising a resin film on the anodized film.

5. A method for manufacturing a pellicle frame, comprising:
a first step for obtaining an aluminum alloy plastic worked by subjecting an aluminum alloy ingot which contains 5.0 to 10.0% by mass of Ca with the remainder aluminum and inevitable impurities, and has a volume ratio of an Al 4 Ca phase which is a dispersed phase of 25% or more to a plastic working,
a second step for subjecting the aluminum alloy plastic worked to a heat treatment in a temperature range of 100 to 300° C., and
a third step for subjecting the heat-treated aluminum alloy plastic worked to an anodizing treatment with an alkaline electrolytic solution containing tartaric acid as an electrolyte.

6. The method for manufacturing a pellicle frame according to claim 5 , wherein, before the first step, the aluminum alloy ingot is subjected to a heat treatment where the ingot is maintained at a temperature of 400° C. or more.

7. A pellicle comprising the pellicle frame according to claim 1 and a pellicle film supported by the pellicle frame.

Assignees

• Nippon Light Metal Co
• Mitsui Chemicals Inc

Inventors

• Taguchi Yoshihiro
• Kohmura Kazuo
• Taneichi Daiki

Classifications

• G03F1/64 Primary

  characterised by the frames, e.g. structure or material, including bonding means therefor · CPC title

• C22C21/00

  Alloys based on aluminium · CPC title

• C25D11/18

  After-treatment, e.g. pore-sealing · CPC title

• G03F1/84

  Inspecting · CPC title

• C22F1/04

  of aluminium or alloys based thereon · CPC title