Encoder scale, manufacturing method for encoder scale, and encoder

Patent metadata

Field	Value
Publication number	US-10955265-B2
Application number	US-201816173023-A
Country	US
Kind code	B2
Filing date	Oct 29, 2018
Priority date	Oct 30, 2017
Publication date	Mar 23, 2021
Grant date	Mar 23, 2021

Abstract

An encoder scale includes a tabular base material and an optical pattern provided above one surface of the base material, a first region and a second region being disposed side by side above the optical pattern. The first region includes a resin layer disposed above the base material and including photosensitive resin and a metal film disposed above the resin layer and formed of a metal material. The surface of the first region is configured mainly by a first surface having a normal line in the thickness direction of the base material. The surface of the second region is configured mainly by a second surface inclined with respect to the first surface.

First claim

What is claimed is:

1. An encoder scale comprising:
a tabular base material; and
an optical pattern provided above one surface of the base material, a first region and a second region being disposed side by side above the optical pattern, wherein
the first region includes:
a resin layer disposed above the base material and including photosensitive resin; and
a metal film disposed above the resin layer,

a surface of the first region is configured mainly by a first surface having a normal line in a thickness direction of the base material, and
a surface of the second region is configured mainly by a second surface inclined with respect to the first surface.

2. The encoder scale according to claim 1 ,
wherein the base material is formed of an anisotropically etchable crystal material.

3. The encoder scale according to claim 2 ,
wherein the crystal material is single crystal silicon.

4. The encoder scale according to claim 3 ,
wherein a plane orientation of the single crystal silicon is (100).

5. The encoder scale according to claim 2 ,
wherein the second surface is provided along a crystal surface of the crystal material.

6. The encoder scale according to claim 1 ,
wherein the photosensitive resin is a negative type.

7. A manufacturing method for an encoder scale comprising:
performing anisotropic etching above one surface of a tabular base material and forming an inclined surface region configured mainly by a surface inclined with respect to a surface having a normal line in a thickness direction of the base material; and
applying photosensitive resin above the one surface and patterning the photosensitive resin to form a resin layer and thereafter forming a metal film above the resin layer to thereby form a thickness direction normal line surface region configured mainly by a surface having a normal line in the thickness direction of the base material.

8. An encoder comprising:
the encoder scale according to claim 1 ;
a light emitting section configured to emit light toward the encoder scale; and
a light detecting section configured to detect the light reflected on the encoder scale.

9. An encoder comprising:
the encoder scale according to claim 2 ;
a light emitting section configured to emit light toward the encoder scale; and
a light detecting section configured to detect the light reflected on the encoder scale.

10. An encoder comprising:
the encoder scale according to claim 3 ;
a light emitting section configured to emit light toward the encoder scale; and
a light detecting section configured to detect the light reflected on the encoder scale.

11. An encoder comprising:
the encoder scale according to claim 4 ;
a light emitting section configured to emit light toward the encoder scale; and
a light detecting section configured to detect the light reflected on the encoder scale.

12. An encoder comprising:
the encoder scale according to claim 5 ;
a light emitting section configured to emit light toward the encoder scale; and
a light detecting section configured to detect the light reflected on the encoder scale.

13. An encoder comprising:
the encoder scale according to claim 6 ;
a light emitting section configured to emit light toward the encoder scale; and
a light detecting section configured to detect the light reflected on the encoder scale.

Assignees

• Seiko Epson Corp

Inventors

• Konishi Akio

Classifications

• G01D5/34707 Primary

  Scales; Discs, e.g. fixation, fabrication, compensation · CPC title

• G01D5/35354

  Sensor working in reflection · CPC title

• G01D5/366

  Particular pulse shapes · CPC title

• G01D5/347 Primary

  using displacement encoding scales · CPC title